8/1/2012	11:10:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/1/2012	11:10:36 AM	Recipe started at 11:10 AM
8/1/2012	11:10:36 AM	Helium valve closed
8/1/2012	11:10:36 AM	H2 valve closed
8/1/2012	11:10:36 AM	BCl3 valve closed
8/1/2012	11:10:36 AM	PH3 valve closed
8/1/2012	11:10:36 AM	SiCl4 pre valve closed
8/1/2012	11:10:36 AM	SiCl4 post valve closed
8/1/2012	11:10:36 AM	Main Vac valve closed
8/1/2012	11:10:36 AM	Bypass valve closed
8/1/2012	11:10:36 AM	Bubbler valve closed
8/1/2012	11:10:36 AM	Helium MFC set to  0.000000
8/1/2012	11:10:36 AM	H2 MFC set to  0.000000
8/1/2012	11:10:36 AM	BCl3 MFC set to  0.000000
8/1/2012	11:10:36 AM	PH3 MFC set to  0.000000
8/1/2012	11:10:36 AM	SiCl4 MFC set to  0.000000
8/1/2012	11:10:36 AM	Bypass solenoid MFC set to  0.000000
8/1/2012	11:10:36 AM	Tube furnace set to 0
8/1/2012	11:10:39 AM	H2 valve closed
8/1/2012	11:10:39 AM	BCl3 valve closed
8/1/2012	11:10:39 AM	PH3 valve closed
8/1/2012	11:10:39 AM	SiCl4 pre valve closed
8/1/2012	11:10:39 AM	SiCl4 post valve closed
8/1/2012	11:10:39 AM	Main Vac valve closed
8/1/2012	11:10:39 AM	Bypass valve closed
8/1/2012	11:10:39 AM	Bubbler valve closed
8/1/2012	11:10:39 AM	Helium valve opened
8/1/2012	11:10:39 AM	Helium MFC set to  500.000000
8/1/2012	11:10:39 AM	H2 MFC set to  0.000000
8/1/2012	11:10:39 AM	BCl3 MFC set to  0.000000
8/1/2012	11:10:39 AM	PH3 MFC set to  0.000000
8/1/2012	11:10:39 AM	SiCl4 MFC set to  0.000000
8/1/2012	11:10:39 AM	Bypass solenoid MFC set to  0.000000
8/1/2012	11:10:39 AM	Tube furnace set to 0
8/1/2012	11:11:51 AM	Helium valve closed
8/1/2012	11:11:51 AM	H2 valve closed
8/1/2012	11:11:51 AM	BCl3 valve closed
8/1/2012	11:11:51 AM	PH3 valve closed
8/1/2012	11:11:51 AM	SiCl4 pre valve closed
8/1/2012	11:11:51 AM	SiCl4 post valve closed
8/1/2012	11:11:51 AM	Main Vac valve closed
8/1/2012	11:11:51 AM	Bypass valve closed
8/1/2012	11:11:51 AM	Bubbler valve closed
8/1/2012	11:11:51 AM	Helium MFC set to  0.000000
8/1/2012	11:11:51 AM	H2 MFC set to  0.000000
8/1/2012	11:11:51 AM	BCl3 MFC set to  0.000000
8/1/2012	11:11:51 AM	PH3 MFC set to  0.000000
8/1/2012	11:11:51 AM	SiCl4 MFC set to  0.000000
8/1/2012	11:11:51 AM	Bypass solenoid MFC set to  0.000000
8/1/2012	11:11:52 AM	Tube furnace set to 0
8/1/2012	11:11:53 AM	Run finished at 11:11 AM
8/1/2012	11:11:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/1/2012	11:27:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/1/2012	11:27:49 AM	Recipe started at 11:27 AM
8/1/2012	11:27:50 AM	Helium valve closed
8/1/2012	11:27:50 AM	H2 valve closed
8/1/2012	11:27:50 AM	BCl3 valve closed
8/1/2012	11:27:50 AM	PH3 valve closed
8/1/2012	11:27:50 AM	SiCl4 pre valve closed
8/1/2012	11:27:50 AM	SiCl4 post valve closed
8/1/2012	11:27:50 AM	Main Vac valve closed
8/1/2012	11:27:50 AM	Bubbler valve closed
8/1/2012	11:27:50 AM	Bypass valve opened
8/1/2012	11:27:50 AM	Helium MFC set to  0.000000
8/1/2012	11:27:50 AM	H2 MFC set to  0.000000
8/1/2012	11:27:50 AM	BCl3 MFC set to  0.000000
8/1/2012	11:27:50 AM	PH3 MFC set to  0.000000
8/1/2012	11:27:50 AM	SiCl4 MFC set to  0.000000
8/1/2012	11:27:50 AM	Bypass solenoid MFC set to  0.000000
8/1/2012	11:27:50 AM	Tube furnace set to 0
8/1/2012	11:29:12 AM	Helium valve closed
8/1/2012	11:29:12 AM	H2 valve closed
8/1/2012	11:29:12 AM	BCl3 valve closed
8/1/2012	11:29:12 AM	PH3 valve closed
8/1/2012	11:29:12 AM	SiCl4 pre valve closed
8/1/2012	11:29:12 AM	SiCl4 post valve closed
8/1/2012	11:29:12 AM	Main Vac valve closed
8/1/2012	11:29:12 AM	Bubbler valve closed
8/1/2012	11:29:12 AM	Bypass valve opened
8/1/2012	11:29:12 AM	Helium MFC set to  0.000000
8/1/2012	11:29:12 AM	H2 MFC set to  0.000000
8/1/2012	11:29:12 AM	BCl3 MFC set to  0.000000
8/1/2012	11:29:12 AM	PH3 MFC set to  0.000000
8/1/2012	11:29:12 AM	SiCl4 MFC set to  0.000000
8/1/2012	11:29:12 AM	Bypass solenoid MFC set to  0.000000
8/1/2012	11:29:12 AM	Tube furnace set to 0
8/1/2012	11:30:12 AM	Helium valve closed
8/1/2012	11:30:12 AM	H2 valve closed
8/1/2012	11:30:12 AM	BCl3 valve closed
8/1/2012	11:30:12 AM	PH3 valve closed
8/1/2012	11:30:12 AM	SiCl4 pre valve closed
8/1/2012	11:30:12 AM	SiCl4 post valve closed
8/1/2012	11:30:12 AM	Bypass valve closed
8/1/2012	11:30:12 AM	Bubbler valve closed
8/1/2012	11:30:12 AM	Main Vac valve opened
8/1/2012	11:30:12 AM	Helium MFC set to  0.000000
8/1/2012	11:30:12 AM	H2 MFC set to  0.000000
8/1/2012	11:30:12 AM	BCl3 MFC set to  0.000000
8/1/2012	11:30:12 AM	PH3 MFC set to  0.000000
8/1/2012	11:30:12 AM	SiCl4 MFC set to  0.000000
8/1/2012	11:30:12 AM	Bypass solenoid MFC set to  0.000000
8/1/2012	11:30:12 AM	Tube furnace set to 0
8/1/2012	11:30:13 AM	Run finished at 11:30 AM
8/1/2012	11:30:13 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/1/2012	11:31:11 AM	Helium MFC set to  0.000000
8/1/2012	11:32:33 AM	Recipe started at 11:32 AM
8/1/2012	11:32:33 AM	Helium valve closed
8/1/2012	11:32:33 AM	H2 valve closed
8/1/2012	11:32:33 AM	BCl3 valve closed
8/1/2012	11:32:33 AM	PH3 valve closed
8/1/2012	11:32:33 AM	SiCl4 pre valve closed
8/1/2012	11:32:33 AM	SiCl4 post valve closed
8/1/2012	11:32:33 AM	Bypass valve closed
8/1/2012	11:32:33 AM	Bubbler valve closed
8/1/2012	11:32:33 AM	Main Vac valve opened
8/1/2012	11:32:33 AM	Helium MFC set to  0.000000
8/1/2012	11:32:33 AM	H2 MFC set to  0.000000
8/1/2012	11:32:33 AM	BCl3 MFC set to  0.000000
8/1/2012	11:32:33 AM	PH3 MFC set to  0.000000
8/1/2012	11:32:33 AM	SiCl4 MFC set to  0.000000
8/1/2012	11:32:33 AM	Bypass solenoid MFC set to  0.000000
8/1/2012	11:32:33 AM	Tube furnace set to 150
8/1/2012	11:32:57 AM	Run aborted at 11:32 AM
8/1/2012	11:32:57 AM	Helium valve closed
8/1/2012	11:32:57 AM	H2 valve closed
8/1/2012	11:32:57 AM	BCl3 valve closed
8/1/2012	11:32:57 AM	PH3 valve closed
8/1/2012	11:32:57 AM	SiCl4 pre valve closed
8/1/2012	11:32:57 AM	SiCl4 post valve closed
8/1/2012	11:32:57 AM	Bypass valve closed
8/1/2012	11:32:57 AM	Main Vac valve closed
8/1/2012	11:32:57 AM	Bubbler valve closed
8/1/2012	11:32:57 AM	Helium MFC set to  0.000000
8/1/2012	11:32:57 AM	H2 MFC set to  0.000000
8/1/2012	11:32:57 AM	BCl3 MFC set to  0.000000
8/1/2012	11:32:57 AM	PH3 MFC set to  0.000000
8/1/2012	11:32:57 AM	SiCl4 MFC set to  0.000000
8/1/2012	11:32:57 AM	Tube furnace set to 0
8/1/2012	11:32:58 AM	Main Vac valve opened
8/1/2012	11:34:26 AM	Recipe started at 11:34 AM
8/1/2012	11:34:26 AM	Helium valve closed
8/1/2012	11:34:26 AM	H2 valve closed
8/1/2012	11:34:26 AM	BCl3 valve closed
8/1/2012	11:34:26 AM	PH3 valve closed
8/1/2012	11:34:26 AM	SiCl4 pre valve closed
8/1/2012	11:34:26 AM	SiCl4 post valve closed
8/1/2012	11:34:26 AM	Bypass valve closed
8/1/2012	11:34:26 AM	Bubbler valve closed
8/1/2012	11:34:26 AM	Main Vac valve opened
8/1/2012	11:34:26 AM	Helium MFC set to  0.000000
8/1/2012	11:34:26 AM	H2 MFC set to  0.000000
8/1/2012	11:34:26 AM	BCl3 MFC set to  0.000000
8/1/2012	11:34:26 AM	PH3 MFC set to  0.000000
8/1/2012	11:34:26 AM	SiCl4 MFC set to  0.000000
8/1/2012	11:34:26 AM	Bypass solenoid MFC set to  0.000000
8/1/2012	11:34:26 AM	Tube furnace set to 150
8/1/2012	11:34:56 AM	H2 valve closed
8/1/2012	11:34:56 AM	BCl3 valve closed
8/1/2012	11:34:56 AM	PH3 valve closed
8/1/2012	11:34:56 AM	SiCl4 pre valve closed
8/1/2012	11:34:56 AM	SiCl4 post valve closed
8/1/2012	11:34:56 AM	Bypass valve closed
8/1/2012	11:34:56 AM	Bubbler valve closed
8/1/2012	11:34:57 AM	Helium valve opened
8/1/2012	11:34:57 AM	Main Vac valve opened
8/1/2012	11:34:57 AM	Helium MFC set to  20.000000
8/1/2012	11:34:57 AM	H2 MFC set to  0.000000
8/1/2012	11:34:57 AM	BCl3 MFC set to  0.000000
8/1/2012	11:34:57 AM	PH3 MFC set to  0.000000
8/1/2012	11:34:57 AM	SiCl4 MFC set to  0.000000
8/1/2012	11:34:57 AM	Bypass solenoid MFC set to  0.000000
8/1/2012	11:34:57 AM	Tube furnace set to 150
8/1/2012	11:35:27 AM	Helium valve closed
8/1/2012	11:35:27 AM	H2 valve closed
8/1/2012	11:35:27 AM	BCl3 valve closed
8/1/2012	11:35:27 AM	PH3 valve closed
8/1/2012	11:35:27 AM	SiCl4 pre valve closed
8/1/2012	11:35:27 AM	SiCl4 post valve closed
8/1/2012	11:35:27 AM	Bypass valve closed
8/1/2012	11:35:27 AM	Bubbler valve closed
8/1/2012	11:35:27 AM	Main Vac valve opened
8/1/2012	11:35:27 AM	Helium MFC set to  0.000000
8/1/2012	11:35:27 AM	H2 MFC set to  0.000000
8/1/2012	11:35:27 AM	BCl3 MFC set to  0.000000
8/1/2012	11:35:27 AM	PH3 MFC set to  0.000000
8/1/2012	11:35:27 AM	SiCl4 MFC set to  0.000000
8/1/2012	11:35:27 AM	Bypass solenoid MFC set to  0.000000
8/1/2012	11:35:27 AM	Tube furnace set to 150
8/1/2012	11:35:57 AM	H2 valve closed
8/1/2012	11:35:57 AM	BCl3 valve closed
8/1/2012	11:35:57 AM	PH3 valve closed
8/1/2012	11:35:57 AM	SiCl4 pre valve closed
8/1/2012	11:35:57 AM	SiCl4 post valve closed
8/1/2012	11:35:57 AM	Bypass valve closed
8/1/2012	11:35:57 AM	Bubbler valve closed
8/1/2012	11:35:57 AM	Helium valve opened
8/1/2012	11:35:57 AM	Main Vac valve opened
8/1/2012	11:35:57 AM	Helium MFC set to  20.000000
8/1/2012	11:35:57 AM	H2 MFC set to  0.000000
8/1/2012	11:35:57 AM	BCl3 MFC set to  0.000000
8/1/2012	11:35:57 AM	PH3 MFC set to  0.000000
8/1/2012	11:35:57 AM	SiCl4 MFC set to  0.000000
8/1/2012	11:35:57 AM	Bypass solenoid MFC set to  0.000000
8/1/2012	11:35:57 AM	Tube furnace set to 150
8/1/2012	11:36:27 AM	Helium valve closed
8/1/2012	11:36:27 AM	H2 valve closed
8/1/2012	11:36:27 AM	BCl3 valve closed
8/1/2012	11:36:27 AM	PH3 valve closed
8/1/2012	11:36:27 AM	SiCl4 pre valve closed
8/1/2012	11:36:27 AM	SiCl4 post valve closed
8/1/2012	11:36:27 AM	Bypass valve closed
8/1/2012	11:36:27 AM	Bubbler valve closed
8/1/2012	11:36:27 AM	Main Vac valve opened
8/1/2012	11:36:27 AM	Helium MFC set to  0.000000
8/1/2012	11:36:27 AM	H2 MFC set to  0.000000
8/1/2012	11:36:27 AM	BCl3 MFC set to  0.000000
8/1/2012	11:36:27 AM	PH3 MFC set to  0.000000
8/1/2012	11:36:27 AM	SiCl4 MFC set to  0.000000
8/1/2012	11:36:27 AM	Bypass solenoid MFC set to  0.000000
8/1/2012	11:36:27 AM	Tube furnace set to 150
8/1/2012	11:36:57 AM	H2 valve closed
8/1/2012	11:36:57 AM	BCl3 valve closed
8/1/2012	11:36:57 AM	PH3 valve closed
8/1/2012	11:36:57 AM	SiCl4 pre valve closed
8/1/2012	11:36:57 AM	SiCl4 post valve closed
8/1/2012	11:36:57 AM	Bypass valve closed
8/1/2012	11:36:57 AM	Bubbler valve closed
8/1/2012	11:36:57 AM	Helium valve opened
8/1/2012	11:36:57 AM	Main Vac valve opened
8/1/2012	11:36:57 AM	Helium MFC set to  20.000000
8/1/2012	11:36:57 AM	H2 MFC set to  0.000000
8/1/2012	11:36:57 AM	BCl3 MFC set to  0.000000
8/1/2012	11:36:57 AM	PH3 MFC set to  0.000000
8/1/2012	11:36:57 AM	SiCl4 MFC set to  0.000000
8/1/2012	11:36:57 AM	Bypass solenoid MFC set to  0.000000
8/1/2012	11:36:58 AM	Tube furnace set to 150
8/1/2012	11:38:58 AM	Helium valve closed
8/1/2012	11:38:58 AM	H2 valve closed
8/1/2012	11:38:58 AM	BCl3 valve closed
8/1/2012	11:38:58 AM	PH3 valve closed
8/1/2012	11:38:58 AM	SiCl4 pre valve closed
8/1/2012	11:38:58 AM	SiCl4 post valve closed
8/1/2012	11:38:58 AM	Bypass valve closed
8/1/2012	11:38:58 AM	Bubbler valve closed
8/1/2012	11:38:58 AM	Main Vac valve opened
8/1/2012	11:38:58 AM	Helium MFC set to  0.000000
8/1/2012	11:38:58 AM	H2 MFC set to  0.000000
8/1/2012	11:38:58 AM	BCl3 MFC set to  0.000000
8/1/2012	11:38:58 AM	PH3 MFC set to  0.000000
8/1/2012	11:38:58 AM	SiCl4 MFC set to  0.000000
8/1/2012	11:38:58 AM	Bypass solenoid MFC set to  0.000000
8/1/2012	11:38:58 AM	Tube furnace set to 150
8/1/2012	11:39:28 AM	H2 valve closed
8/1/2012	11:39:28 AM	BCl3 valve closed
8/1/2012	11:39:28 AM	PH3 valve closed
8/1/2012	11:39:28 AM	SiCl4 pre valve closed
8/1/2012	11:39:28 AM	SiCl4 post valve closed
8/1/2012	11:39:28 AM	Bypass valve closed
8/1/2012	11:39:28 AM	Bubbler valve closed
8/1/2012	11:39:28 AM	Helium valve opened
8/1/2012	11:39:28 AM	Main Vac valve opened
8/1/2012	11:39:28 AM	Helium MFC set to  20.000000
8/1/2012	11:39:28 AM	H2 MFC set to  0.000000
8/1/2012	11:39:28 AM	BCl3 MFC set to  0.000000
8/1/2012	11:39:28 AM	PH3 MFC set to  0.000000
8/1/2012	11:39:28 AM	SiCl4 MFC set to  0.000000
8/1/2012	11:39:28 AM	Bypass solenoid MFC set to  0.000000
8/1/2012	11:39:28 AM	Tube furnace set to 150
8/1/2012	11:39:58 AM	Helium valve closed
8/1/2012	11:39:58 AM	H2 valve closed
8/1/2012	11:39:58 AM	BCl3 valve closed
8/1/2012	11:39:58 AM	PH3 valve closed
8/1/2012	11:39:58 AM	SiCl4 pre valve closed
8/1/2012	11:39:58 AM	SiCl4 post valve closed
8/1/2012	11:39:58 AM	Bypass valve closed
8/1/2012	11:39:58 AM	Bubbler valve closed
8/1/2012	11:39:58 AM	Main Vac valve opened
8/1/2012	11:39:58 AM	Helium MFC set to  0.000000
8/1/2012	11:39:58 AM	H2 MFC set to  0.000000
8/1/2012	11:39:58 AM	BCl3 MFC set to  0.000000
8/1/2012	11:39:58 AM	PH3 MFC set to  0.000000
8/1/2012	11:39:58 AM	SiCl4 MFC set to  0.000000
8/1/2012	11:39:58 AM	Bypass solenoid MFC set to  0.000000
8/1/2012	11:39:58 AM	Tube furnace set to 150
8/1/2012	11:40:28 AM	H2 valve closed
8/1/2012	11:40:28 AM	BCl3 valve closed
8/1/2012	11:40:28 AM	PH3 valve closed
8/1/2012	11:40:28 AM	SiCl4 pre valve closed
8/1/2012	11:40:28 AM	SiCl4 post valve closed
8/1/2012	11:40:28 AM	Bypass valve closed
8/1/2012	11:40:28 AM	Bubbler valve closed
8/1/2012	11:40:28 AM	Helium valve opened
8/1/2012	11:40:28 AM	Main Vac valve opened
8/1/2012	11:40:28 AM	Helium MFC set to  20.000000
8/1/2012	11:40:28 AM	H2 MFC set to  0.000000
8/1/2012	11:40:28 AM	BCl3 MFC set to  0.000000
8/1/2012	11:40:28 AM	PH3 MFC set to  0.000000
8/1/2012	11:40:28 AM	SiCl4 MFC set to  0.000000
8/1/2012	11:40:28 AM	Bypass solenoid MFC set to  0.000000
8/1/2012	11:40:29 AM	Tube furnace set to 150
8/1/2012	11:40:59 AM	Helium valve closed
8/1/2012	11:40:59 AM	H2 valve closed
8/1/2012	11:40:59 AM	BCl3 valve closed
8/1/2012	11:40:59 AM	PH3 valve closed
8/1/2012	11:40:59 AM	SiCl4 pre valve closed
8/1/2012	11:40:59 AM	SiCl4 post valve closed
8/1/2012	11:40:59 AM	Bypass valve closed
8/1/2012	11:40:59 AM	Bubbler valve closed
8/1/2012	11:40:59 AM	Main Vac valve opened
8/1/2012	11:40:59 AM	Helium MFC set to  0.000000
8/1/2012	11:40:59 AM	H2 MFC set to  0.000000
8/1/2012	11:40:59 AM	BCl3 MFC set to  0.000000
8/1/2012	11:40:59 AM	PH3 MFC set to  0.000000
8/1/2012	11:40:59 AM	SiCl4 MFC set to  0.000000
8/1/2012	11:40:59 AM	Bypass solenoid MFC set to  0.000000
8/1/2012	11:40:59 AM	Tube furnace set to 150
8/1/2012	11:41:29 AM	H2 valve closed
8/1/2012	11:41:29 AM	BCl3 valve closed
8/1/2012	11:41:29 AM	PH3 valve closed
8/1/2012	11:41:29 AM	SiCl4 pre valve closed
8/1/2012	11:41:29 AM	SiCl4 post valve closed
8/1/2012	11:41:29 AM	Bypass valve closed
8/1/2012	11:41:29 AM	Bubbler valve closed
8/1/2012	11:41:29 AM	Helium valve opened
8/1/2012	11:41:29 AM	Main Vac valve opened
8/1/2012	11:41:29 AM	Helium MFC set to  20.000000
8/1/2012	11:41:29 AM	H2 MFC set to  0.000000
8/1/2012	11:41:29 AM	BCl3 MFC set to  0.000000
8/1/2012	11:41:29 AM	PH3 MFC set to  0.000000
8/1/2012	11:41:29 AM	SiCl4 MFC set to  0.000000
8/1/2012	11:41:29 AM	Bypass solenoid MFC set to  0.000000
8/1/2012	11:41:29 AM	Tube furnace set to 150
8/1/2012	11:43:29 AM	Helium valve closed
8/1/2012	11:43:29 AM	H2 valve closed
8/1/2012	11:43:29 AM	BCl3 valve closed
8/1/2012	11:43:29 AM	PH3 valve closed
8/1/2012	11:43:29 AM	SiCl4 pre valve closed
8/1/2012	11:43:29 AM	SiCl4 post valve closed
8/1/2012	11:43:29 AM	Bypass valve closed
8/1/2012	11:43:29 AM	Bubbler valve closed
8/1/2012	11:43:29 AM	Main Vac valve opened
8/1/2012	11:43:29 AM	Helium MFC set to  0.000000
8/1/2012	11:43:29 AM	H2 MFC set to  0.000000
8/1/2012	11:43:29 AM	BCl3 MFC set to  0.000000
8/1/2012	11:43:29 AM	PH3 MFC set to  0.000000
8/1/2012	11:43:29 AM	SiCl4 MFC set to  0.000000
8/1/2012	11:43:29 AM	Bypass solenoid MFC set to  0.000000
8/1/2012	11:43:29 AM	Tube furnace set to 150
8/1/2012	11:43:59 AM	H2 valve closed
8/1/2012	11:43:59 AM	BCl3 valve closed
8/1/2012	11:43:59 AM	PH3 valve closed
8/1/2012	11:43:59 AM	SiCl4 pre valve closed
8/1/2012	11:43:59 AM	SiCl4 post valve closed
8/1/2012	11:43:59 AM	Bypass valve closed
8/1/2012	11:43:59 AM	Bubbler valve closed
8/1/2012	11:43:59 AM	Helium valve opened
8/1/2012	11:43:59 AM	Main Vac valve opened
8/1/2012	11:43:59 AM	Helium MFC set to  20.000000
8/1/2012	11:43:59 AM	H2 MFC set to  0.000000
8/1/2012	11:43:59 AM	BCl3 MFC set to  0.000000
8/1/2012	11:43:59 AM	PH3 MFC set to  0.000000
8/1/2012	11:43:59 AM	SiCl4 MFC set to  0.000000
8/1/2012	11:43:59 AM	Bypass solenoid MFC set to  0.000000
8/1/2012	11:44:00 AM	Tube furnace set to 150
8/1/2012	11:44:30 AM	Helium valve closed
8/1/2012	11:44:30 AM	H2 valve closed
8/1/2012	11:44:30 AM	BCl3 valve closed
8/1/2012	11:44:30 AM	PH3 valve closed
8/1/2012	11:44:30 AM	SiCl4 pre valve closed
8/1/2012	11:44:30 AM	SiCl4 post valve closed
8/1/2012	11:44:30 AM	Bypass valve closed
8/1/2012	11:44:30 AM	Bubbler valve closed
8/1/2012	11:44:30 AM	Main Vac valve opened
8/1/2012	11:44:30 AM	Helium MFC set to  0.000000
8/1/2012	11:44:30 AM	H2 MFC set to  0.000000
8/1/2012	11:44:30 AM	BCl3 MFC set to  0.000000
8/1/2012	11:44:30 AM	PH3 MFC set to  0.000000
8/1/2012	11:44:30 AM	SiCl4 MFC set to  0.000000
8/1/2012	11:44:30 AM	Bypass solenoid MFC set to  0.000000
8/1/2012	11:44:30 AM	Tube furnace set to 150
8/1/2012	11:45:00 AM	H2 valve closed
8/1/2012	11:45:00 AM	BCl3 valve closed
8/1/2012	11:45:00 AM	PH3 valve closed
8/1/2012	11:45:00 AM	SiCl4 pre valve closed
8/1/2012	11:45:00 AM	SiCl4 post valve closed
8/1/2012	11:45:00 AM	Bypass valve closed
8/1/2012	11:45:00 AM	Bubbler valve closed
8/1/2012	11:45:00 AM	Helium valve opened
8/1/2012	11:45:00 AM	Main Vac valve opened
8/1/2012	11:45:00 AM	Helium MFC set to  20.000000
8/1/2012	11:45:00 AM	H2 MFC set to  0.000000
8/1/2012	11:45:00 AM	BCl3 MFC set to  0.000000
8/1/2012	11:45:00 AM	PH3 MFC set to  0.000000
8/1/2012	11:45:00 AM	SiCl4 MFC set to  0.000000
8/1/2012	11:45:00 AM	Bypass solenoid MFC set to  0.000000
8/1/2012	11:45:00 AM	Tube furnace set to 150
8/1/2012	11:47:00 AM	Helium valve closed
8/1/2012	11:47:00 AM	H2 valve closed
8/1/2012	11:47:00 AM	BCl3 valve closed
8/1/2012	11:47:00 AM	PH3 valve closed
8/1/2012	11:47:00 AM	SiCl4 pre valve closed
8/1/2012	11:47:00 AM	SiCl4 post valve closed
8/1/2012	11:47:00 AM	Bypass valve closed
8/1/2012	11:47:00 AM	Bubbler valve closed
8/1/2012	11:47:00 AM	Main Vac valve opened
8/1/2012	11:47:00 AM	Helium MFC set to  0.000000
8/1/2012	11:47:00 AM	H2 MFC set to  0.000000
8/1/2012	11:47:00 AM	BCl3 MFC set to  0.000000
8/1/2012	11:47:00 AM	PH3 MFC set to  0.000000
8/1/2012	11:47:00 AM	SiCl4 MFC set to  0.000000
8/1/2012	11:47:00 AM	Bypass solenoid MFC set to  0.000000
8/1/2012	11:47:00 AM	Tube furnace set to 150
8/1/2012	11:47:30 AM	H2 valve closed
8/1/2012	11:47:30 AM	BCl3 valve closed
8/1/2012	11:47:30 AM	PH3 valve closed
8/1/2012	11:47:30 AM	SiCl4 pre valve closed
8/1/2012	11:47:30 AM	SiCl4 post valve closed
8/1/2012	11:47:30 AM	Bypass valve closed
8/1/2012	11:47:30 AM	Bubbler valve closed
8/1/2012	11:47:30 AM	Helium valve opened
8/1/2012	11:47:30 AM	Main Vac valve opened
8/1/2012	11:47:30 AM	Helium MFC set to  20.000000
8/1/2012	11:47:30 AM	H2 MFC set to  0.000000
8/1/2012	11:47:30 AM	BCl3 MFC set to  0.000000
8/1/2012	11:47:30 AM	PH3 MFC set to  0.000000
8/1/2012	11:47:30 AM	SiCl4 MFC set to  0.000000
8/1/2012	11:47:30 AM	Bypass solenoid MFC set to  0.000000
8/1/2012	11:47:31 AM	Tube furnace set to 150
8/1/2012	11:48:01 AM	Helium valve closed
8/1/2012	11:48:01 AM	H2 valve closed
8/1/2012	11:48:01 AM	BCl3 valve closed
8/1/2012	11:48:01 AM	PH3 valve closed
8/1/2012	11:48:01 AM	SiCl4 pre valve closed
8/1/2012	11:48:01 AM	SiCl4 post valve closed
8/1/2012	11:48:01 AM	Bypass valve closed
8/1/2012	11:48:01 AM	Bubbler valve closed
8/1/2012	11:48:01 AM	Main Vac valve opened
8/1/2012	11:48:01 AM	Helium MFC set to  0.000000
8/1/2012	11:48:01 AM	H2 MFC set to  0.000000
8/1/2012	11:48:01 AM	BCl3 MFC set to  0.000000
8/1/2012	11:48:01 AM	PH3 MFC set to  0.000000
8/1/2012	11:48:01 AM	SiCl4 MFC set to  0.000000
8/1/2012	11:48:01 AM	Bypass solenoid MFC set to  0.000000
8/1/2012	11:48:01 AM	Tube furnace set to 150
8/1/2012	11:48:31 AM	H2 valve closed
8/1/2012	11:48:31 AM	BCl3 valve closed
8/1/2012	11:48:31 AM	PH3 valve closed
8/1/2012	11:48:31 AM	SiCl4 pre valve closed
8/1/2012	11:48:31 AM	SiCl4 post valve closed
8/1/2012	11:48:31 AM	Bypass valve closed
8/1/2012	11:48:31 AM	Bubbler valve closed
8/1/2012	11:48:31 AM	Helium valve opened
8/1/2012	11:48:31 AM	Main Vac valve opened
8/1/2012	11:48:31 AM	Helium MFC set to  20.000000
8/1/2012	11:48:31 AM	H2 MFC set to  0.000000
8/1/2012	11:48:31 AM	BCl3 MFC set to  0.000000
8/1/2012	11:48:31 AM	PH3 MFC set to  0.000000
8/1/2012	11:48:31 AM	SiCl4 MFC set to  0.000000
8/1/2012	11:48:31 AM	Bypass solenoid MFC set to  0.000000
8/1/2012	11:48:31 AM	Tube furnace set to 150
8/1/2012	11:50:31 AM	Helium valve closed
8/1/2012	11:50:31 AM	H2 valve closed
8/1/2012	11:50:31 AM	BCl3 valve closed
8/1/2012	11:50:31 AM	PH3 valve closed
8/1/2012	11:50:31 AM	SiCl4 pre valve closed
8/1/2012	11:50:31 AM	SiCl4 post valve closed
8/1/2012	11:50:31 AM	Bypass valve closed
8/1/2012	11:50:31 AM	Bubbler valve closed
8/1/2012	11:50:31 AM	Main Vac valve opened
8/1/2012	11:50:31 AM	Helium MFC set to  0.000000
8/1/2012	11:50:31 AM	H2 MFC set to  0.000000
8/1/2012	11:50:31 AM	BCl3 MFC set to  0.000000
8/1/2012	11:50:31 AM	PH3 MFC set to  0.000000
8/1/2012	11:50:31 AM	SiCl4 MFC set to  0.000000
8/1/2012	11:50:31 AM	Bypass solenoid MFC set to  0.000000
8/1/2012	11:50:31 AM	Tube furnace set to 150
8/1/2012	11:50:32 AM	Run finished at 11:50 AM
8/1/2012	11:53:04 AM	Recipe started at 11:52 AM
8/1/2012	11:53:04 AM	Helium valve closed
8/1/2012	11:53:04 AM	H2 valve closed
8/1/2012	11:53:04 AM	BCl3 valve closed
8/1/2012	11:53:04 AM	PH3 valve closed
8/1/2012	11:53:04 AM	SiCl4 pre valve closed
8/1/2012	11:53:05 AM	SiCl4 post valve closed
8/1/2012	11:53:05 AM	Bypass valve closed
8/1/2012	11:53:05 AM	Bubbler valve closed
8/1/2012	11:53:05 AM	Main Vac valve opened
8/1/2012	11:53:05 AM	Helium MFC set to  0.000000
8/1/2012	11:53:05 AM	H2 MFC set to  0.000000
8/1/2012	11:53:05 AM	BCl3 MFC set to  0.000000
8/1/2012	11:53:05 AM	PH3 MFC set to  0.000000
8/1/2012	11:53:05 AM	SiCl4 MFC set to  0.000000
8/1/2012	11:53:05 AM	Bypass solenoid MFC set to  0.000000
8/1/2012	11:53:05 AM	Tube furnace set to 150
8/1/2012	11:53:35 AM	H2 valve closed
8/1/2012	11:53:35 AM	BCl3 valve closed
8/1/2012	11:53:35 AM	PH3 valve closed
8/1/2012	11:53:35 AM	SiCl4 pre valve closed
8/1/2012	11:53:35 AM	SiCl4 post valve closed
8/1/2012	11:53:35 AM	Bypass valve closed
8/1/2012	11:53:35 AM	Bubbler valve closed
8/1/2012	11:53:35 AM	Helium valve opened
8/1/2012	11:53:35 AM	Main Vac valve opened
8/1/2012	11:53:35 AM	Helium MFC set to  20.000000
8/1/2012	11:53:35 AM	H2 MFC set to  0.000000
8/1/2012	11:53:35 AM	BCl3 MFC set to  0.000000
8/1/2012	11:53:35 AM	PH3 MFC set to  0.000000
8/1/2012	11:53:35 AM	SiCl4 MFC set to  0.000000
8/1/2012	11:53:35 AM	Bypass solenoid MFC set to  0.000000
8/1/2012	11:53:35 AM	Tube furnace set to 150
8/1/2012	11:54:05 AM	Helium valve closed
8/1/2012	11:54:05 AM	H2 valve closed
8/1/2012	11:54:05 AM	BCl3 valve closed
8/1/2012	11:54:05 AM	PH3 valve closed
8/1/2012	11:54:05 AM	SiCl4 pre valve closed
8/1/2012	11:54:05 AM	SiCl4 post valve closed
8/1/2012	11:54:05 AM	Bypass valve closed
8/1/2012	11:54:05 AM	Bubbler valve closed
8/1/2012	11:54:05 AM	Main Vac valve opened
8/1/2012	11:54:05 AM	Helium MFC set to  0.000000
8/1/2012	11:54:05 AM	H2 MFC set to  0.000000
8/1/2012	11:54:05 AM	BCl3 MFC set to  0.000000
8/1/2012	11:54:05 AM	PH3 MFC set to  0.000000
8/1/2012	11:54:05 AM	SiCl4 MFC set to  0.000000
8/1/2012	11:54:05 AM	Bypass solenoid MFC set to  0.000000
8/1/2012	11:54:05 AM	Tube furnace set to 150
8/1/2012	11:54:35 AM	H2 valve closed
8/1/2012	11:54:35 AM	BCl3 valve closed
8/1/2012	11:54:35 AM	PH3 valve closed
8/1/2012	11:54:35 AM	SiCl4 pre valve closed
8/1/2012	11:54:35 AM	SiCl4 post valve closed
8/1/2012	11:54:35 AM	Bypass valve closed
8/1/2012	11:54:35 AM	Bubbler valve closed
8/1/2012	11:54:35 AM	Helium valve opened
8/1/2012	11:54:35 AM	Main Vac valve opened
8/1/2012	11:54:35 AM	Helium MFC set to  20.000000
8/1/2012	11:54:35 AM	H2 MFC set to  0.000000
8/1/2012	11:54:35 AM	BCl3 MFC set to  0.000000
8/1/2012	11:54:35 AM	PH3 MFC set to  0.000000
8/1/2012	11:54:35 AM	SiCl4 MFC set to  0.000000
8/1/2012	11:54:35 AM	Bypass solenoid MFC set to  0.000000
8/1/2012	11:54:35 AM	Tube furnace set to 150
8/1/2012	11:55:05 AM	Helium valve closed
8/1/2012	11:55:05 AM	H2 valve closed
8/1/2012	11:55:05 AM	BCl3 valve closed
8/1/2012	11:55:05 AM	PH3 valve closed
8/1/2012	11:55:05 AM	SiCl4 pre valve closed
8/1/2012	11:55:05 AM	SiCl4 post valve closed
8/1/2012	11:55:05 AM	Bypass valve closed
8/1/2012	11:55:05 AM	Bubbler valve closed
8/1/2012	11:55:05 AM	Main Vac valve opened
8/1/2012	11:55:05 AM	Helium MFC set to  0.000000
8/1/2012	11:55:05 AM	H2 MFC set to  0.000000
8/1/2012	11:55:05 AM	BCl3 MFC set to  0.000000
8/1/2012	11:55:05 AM	PH3 MFC set to  0.000000
8/1/2012	11:55:05 AM	SiCl4 MFC set to  0.000000
8/1/2012	11:55:05 AM	Bypass solenoid MFC set to  0.000000
8/1/2012	11:55:06 AM	Tube furnace set to 150
8/1/2012	11:55:36 AM	H2 valve closed
8/1/2012	11:55:36 AM	BCl3 valve closed
8/1/2012	11:55:36 AM	PH3 valve closed
8/1/2012	11:55:36 AM	SiCl4 pre valve closed
8/1/2012	11:55:36 AM	SiCl4 post valve closed
8/1/2012	11:55:36 AM	Bypass valve closed
8/1/2012	11:55:36 AM	Bubbler valve closed
8/1/2012	11:55:36 AM	Helium valve opened
8/1/2012	11:55:36 AM	Main Vac valve opened
8/1/2012	11:55:36 AM	Helium MFC set to  20.000000
8/1/2012	11:55:36 AM	H2 MFC set to  0.000000
8/1/2012	11:55:36 AM	BCl3 MFC set to  0.000000
8/1/2012	11:55:36 AM	PH3 MFC set to  0.000000
8/1/2012	11:55:36 AM	SiCl4 MFC set to  0.000000
8/1/2012	11:55:36 AM	Bypass solenoid MFC set to  0.000000
8/1/2012	11:55:36 AM	Tube furnace set to 150
8/1/2012	11:57:36 AM	Helium valve closed
8/1/2012	11:57:36 AM	H2 valve closed
8/1/2012	11:57:36 AM	BCl3 valve closed
8/1/2012	11:57:36 AM	PH3 valve closed
8/1/2012	11:57:36 AM	SiCl4 pre valve closed
8/1/2012	11:57:36 AM	SiCl4 post valve closed
8/1/2012	11:57:36 AM	Bypass valve closed
8/1/2012	11:57:36 AM	Bubbler valve closed
8/1/2012	11:57:36 AM	Main Vac valve opened
8/1/2012	11:57:36 AM	Helium MFC set to  0.000000
8/1/2012	11:57:36 AM	H2 MFC set to  0.000000
8/1/2012	11:57:36 AM	BCl3 MFC set to  0.000000
8/1/2012	11:57:36 AM	PH3 MFC set to  0.000000
8/1/2012	11:57:36 AM	SiCl4 MFC set to  0.000000
8/1/2012	11:57:36 AM	Bypass solenoid MFC set to  0.000000
8/1/2012	11:57:36 AM	Tube furnace set to 150
8/1/2012	11:58:06 AM	H2 valve closed
8/1/2012	11:58:06 AM	BCl3 valve closed
8/1/2012	11:58:06 AM	PH3 valve closed
8/1/2012	11:58:06 AM	SiCl4 pre valve closed
8/1/2012	11:58:06 AM	SiCl4 post valve closed
8/1/2012	11:58:06 AM	Bypass valve closed
8/1/2012	11:58:06 AM	Bubbler valve closed
8/1/2012	11:58:06 AM	Helium valve opened
8/1/2012	11:58:06 AM	Main Vac valve opened
8/1/2012	11:58:06 AM	Helium MFC set to  20.000000
8/1/2012	11:58:06 AM	H2 MFC set to  0.000000
8/1/2012	11:58:06 AM	BCl3 MFC set to  0.000000
8/1/2012	11:58:06 AM	PH3 MFC set to  0.000000
8/1/2012	11:58:06 AM	SiCl4 MFC set to  0.000000
8/1/2012	11:58:06 AM	Bypass solenoid MFC set to  0.000000
8/1/2012	11:58:06 AM	Tube furnace set to 150
8/1/2012	11:58:36 AM	Helium valve closed
8/1/2012	11:58:36 AM	H2 valve closed
8/1/2012	11:58:36 AM	BCl3 valve closed
8/1/2012	11:58:36 AM	PH3 valve closed
8/1/2012	11:58:36 AM	SiCl4 pre valve closed
8/1/2012	11:58:36 AM	SiCl4 post valve closed
8/1/2012	11:58:36 AM	Bypass valve closed
8/1/2012	11:58:36 AM	Bubbler valve closed
8/1/2012	11:58:36 AM	Main Vac valve opened
8/1/2012	11:58:36 AM	Helium MFC set to  0.000000
8/1/2012	11:58:36 AM	H2 MFC set to  0.000000
8/1/2012	11:58:36 AM	BCl3 MFC set to  0.000000
8/1/2012	11:58:36 AM	PH3 MFC set to  0.000000
8/1/2012	11:58:36 AM	SiCl4 MFC set to  0.000000
8/1/2012	11:58:36 AM	Bypass solenoid MFC set to  0.000000
8/1/2012	11:58:37 AM	Tube furnace set to 150
8/1/2012	11:59:07 AM	H2 valve closed
8/1/2012	11:59:07 AM	BCl3 valve closed
8/1/2012	11:59:07 AM	PH3 valve closed
8/1/2012	11:59:07 AM	SiCl4 pre valve closed
8/1/2012	11:59:07 AM	SiCl4 post valve closed
8/1/2012	11:59:07 AM	Bypass valve closed
8/1/2012	11:59:07 AM	Bubbler valve closed
8/1/2012	11:59:07 AM	Helium valve opened
8/1/2012	11:59:07 AM	Main Vac valve opened
8/1/2012	11:59:07 AM	Helium MFC set to  20.000000
8/1/2012	11:59:07 AM	H2 MFC set to  0.000000
8/1/2012	11:59:07 AM	BCl3 MFC set to  0.000000
8/1/2012	11:59:07 AM	PH3 MFC set to  0.000000
8/1/2012	11:59:07 AM	SiCl4 MFC set to  0.000000
8/1/2012	11:59:07 AM	Bypass solenoid MFC set to  0.000000
8/1/2012	11:59:07 AM	Tube furnace set to 150
8/1/2012	11:59:37 AM	Helium valve closed
8/1/2012	11:59:37 AM	H2 valve closed
8/1/2012	11:59:37 AM	BCl3 valve closed
8/1/2012	11:59:37 AM	PH3 valve closed
8/1/2012	11:59:37 AM	SiCl4 pre valve closed
8/1/2012	11:59:37 AM	SiCl4 post valve closed
8/1/2012	11:59:37 AM	Bypass valve closed
8/1/2012	11:59:37 AM	Bubbler valve closed
8/1/2012	11:59:37 AM	Main Vac valve opened
8/1/2012	11:59:37 AM	Helium MFC set to  0.000000
8/1/2012	11:59:37 AM	H2 MFC set to  0.000000
8/1/2012	11:59:37 AM	BCl3 MFC set to  0.000000
8/1/2012	11:59:37 AM	PH3 MFC set to  0.000000
8/1/2012	11:59:37 AM	SiCl4 MFC set to  0.000000
8/1/2012	11:59:37 AM	Bypass solenoid MFC set to  0.000000
8/1/2012	11:59:37 AM	Tube furnace set to 150
8/1/2012	12:00:07 PM	H2 valve closed
8/1/2012	12:00:07 PM	BCl3 valve closed
8/1/2012	12:00:07 PM	PH3 valve closed
8/1/2012	12:00:07 PM	SiCl4 pre valve closed
8/1/2012	12:00:07 PM	SiCl4 post valve closed
8/1/2012	12:00:07 PM	Bypass valve closed
8/1/2012	12:00:07 PM	Bubbler valve closed
8/1/2012	12:00:07 PM	Helium valve opened
8/1/2012	12:00:07 PM	Main Vac valve opened
8/1/2012	12:00:07 PM	Helium MFC set to  20.000000
8/1/2012	12:00:07 PM	H2 MFC set to  0.000000
8/1/2012	12:00:07 PM	BCl3 MFC set to  0.000000
8/1/2012	12:00:07 PM	PH3 MFC set to  0.000000
8/1/2012	12:00:07 PM	SiCl4 MFC set to  0.000000
8/1/2012	12:00:07 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	12:00:07 PM	Tube furnace set to 150
8/1/2012	12:02:07 PM	Helium valve closed
8/1/2012	12:02:07 PM	H2 valve closed
8/1/2012	12:02:07 PM	BCl3 valve closed
8/1/2012	12:02:07 PM	PH3 valve closed
8/1/2012	12:02:07 PM	SiCl4 pre valve closed
8/1/2012	12:02:07 PM	SiCl4 post valve closed
8/1/2012	12:02:07 PM	Bypass valve closed
8/1/2012	12:02:07 PM	Bubbler valve closed
8/1/2012	12:02:07 PM	Main Vac valve opened
8/1/2012	12:02:07 PM	Helium MFC set to  0.000000
8/1/2012	12:02:07 PM	H2 MFC set to  0.000000
8/1/2012	12:02:07 PM	BCl3 MFC set to  0.000000
8/1/2012	12:02:07 PM	PH3 MFC set to  0.000000
8/1/2012	12:02:07 PM	SiCl4 MFC set to  0.000000
8/1/2012	12:02:07 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	12:02:08 PM	Tube furnace set to 150
8/1/2012	12:02:38 PM	H2 valve closed
8/1/2012	12:02:38 PM	BCl3 valve closed
8/1/2012	12:02:38 PM	PH3 valve closed
8/1/2012	12:02:38 PM	SiCl4 pre valve closed
8/1/2012	12:02:38 PM	SiCl4 post valve closed
8/1/2012	12:02:38 PM	Bypass valve closed
8/1/2012	12:02:38 PM	Bubbler valve closed
8/1/2012	12:02:38 PM	Helium valve opened
8/1/2012	12:02:38 PM	Main Vac valve opened
8/1/2012	12:02:38 PM	Helium MFC set to  20.000000
8/1/2012	12:02:38 PM	H2 MFC set to  0.000000
8/1/2012	12:02:38 PM	BCl3 MFC set to  0.000000
8/1/2012	12:02:38 PM	PH3 MFC set to  0.000000
8/1/2012	12:02:38 PM	SiCl4 MFC set to  0.000000
8/1/2012	12:02:38 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	12:02:38 PM	Tube furnace set to 150
8/1/2012	12:03:08 PM	Helium valve closed
8/1/2012	12:03:08 PM	H2 valve closed
8/1/2012	12:03:08 PM	BCl3 valve closed
8/1/2012	12:03:08 PM	PH3 valve closed
8/1/2012	12:03:08 PM	SiCl4 pre valve closed
8/1/2012	12:03:08 PM	SiCl4 post valve closed
8/1/2012	12:03:08 PM	Bypass valve closed
8/1/2012	12:03:08 PM	Bubbler valve closed
8/1/2012	12:03:08 PM	Main Vac valve opened
8/1/2012	12:03:08 PM	Helium MFC set to  0.000000
8/1/2012	12:03:08 PM	H2 MFC set to  0.000000
8/1/2012	12:03:08 PM	BCl3 MFC set to  0.000000
8/1/2012	12:03:08 PM	PH3 MFC set to  0.000000
8/1/2012	12:03:08 PM	SiCl4 MFC set to  0.000000
8/1/2012	12:03:08 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	12:03:08 PM	Tube furnace set to 150
8/1/2012	12:03:38 PM	H2 valve closed
8/1/2012	12:03:38 PM	BCl3 valve closed
8/1/2012	12:03:38 PM	PH3 valve closed
8/1/2012	12:03:38 PM	SiCl4 pre valve closed
8/1/2012	12:03:38 PM	SiCl4 post valve closed
8/1/2012	12:03:38 PM	Bypass valve closed
8/1/2012	12:03:38 PM	Bubbler valve closed
8/1/2012	12:03:38 PM	Helium valve opened
8/1/2012	12:03:38 PM	Main Vac valve opened
8/1/2012	12:03:38 PM	Helium MFC set to  20.000000
8/1/2012	12:03:38 PM	H2 MFC set to  0.000000
8/1/2012	12:03:38 PM	BCl3 MFC set to  0.000000
8/1/2012	12:03:38 PM	PH3 MFC set to  0.000000
8/1/2012	12:03:38 PM	SiCl4 MFC set to  0.000000
8/1/2012	12:03:38 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	12:03:38 PM	Tube furnace set to 150
8/1/2012	12:05:38 PM	Helium valve closed
8/1/2012	12:05:38 PM	H2 valve closed
8/1/2012	12:05:38 PM	BCl3 valve closed
8/1/2012	12:05:38 PM	PH3 valve closed
8/1/2012	12:05:38 PM	SiCl4 pre valve closed
8/1/2012	12:05:38 PM	SiCl4 post valve closed
8/1/2012	12:05:38 PM	Bypass valve closed
8/1/2012	12:05:38 PM	Bubbler valve closed
8/1/2012	12:05:38 PM	Main Vac valve opened
8/1/2012	12:05:38 PM	Helium MFC set to  0.000000
8/1/2012	12:05:38 PM	H2 MFC set to  0.000000
8/1/2012	12:05:38 PM	BCl3 MFC set to  0.000000
8/1/2012	12:05:38 PM	PH3 MFC set to  0.000000
8/1/2012	12:05:38 PM	SiCl4 MFC set to  0.000000
8/1/2012	12:05:38 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	12:05:38 PM	Tube furnace set to 150
8/1/2012	12:06:08 PM	H2 valve closed
8/1/2012	12:06:08 PM	BCl3 valve closed
8/1/2012	12:06:08 PM	PH3 valve closed
8/1/2012	12:06:08 PM	SiCl4 pre valve closed
8/1/2012	12:06:08 PM	SiCl4 post valve closed
8/1/2012	12:06:09 PM	Bypass valve closed
8/1/2012	12:06:09 PM	Bubbler valve closed
8/1/2012	12:06:09 PM	Helium valve opened
8/1/2012	12:06:09 PM	Main Vac valve opened
8/1/2012	12:06:09 PM	Helium MFC set to  20.000000
8/1/2012	12:06:09 PM	H2 MFC set to  0.000000
8/1/2012	12:06:09 PM	BCl3 MFC set to  0.000000
8/1/2012	12:06:09 PM	PH3 MFC set to  0.000000
8/1/2012	12:06:09 PM	SiCl4 MFC set to  0.000000
8/1/2012	12:06:09 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	12:06:09 PM	Tube furnace set to 150
8/1/2012	12:06:39 PM	Helium valve closed
8/1/2012	12:06:39 PM	H2 valve closed
8/1/2012	12:06:39 PM	BCl3 valve closed
8/1/2012	12:06:39 PM	PH3 valve closed
8/1/2012	12:06:39 PM	SiCl4 pre valve closed
8/1/2012	12:06:39 PM	SiCl4 post valve closed
8/1/2012	12:06:39 PM	Bypass valve closed
8/1/2012	12:06:39 PM	Bubbler valve closed
8/1/2012	12:06:39 PM	Main Vac valve opened
8/1/2012	12:06:39 PM	Helium MFC set to  0.000000
8/1/2012	12:06:39 PM	H2 MFC set to  0.000000
8/1/2012	12:06:39 PM	BCl3 MFC set to  0.000000
8/1/2012	12:06:39 PM	PH3 MFC set to  0.000000
8/1/2012	12:06:39 PM	SiCl4 MFC set to  0.000000
8/1/2012	12:06:39 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	12:06:39 PM	Tube furnace set to 150
8/1/2012	12:07:09 PM	H2 valve closed
8/1/2012	12:07:09 PM	BCl3 valve closed
8/1/2012	12:07:09 PM	PH3 valve closed
8/1/2012	12:07:09 PM	SiCl4 pre valve closed
8/1/2012	12:07:09 PM	SiCl4 post valve closed
8/1/2012	12:07:09 PM	Bypass valve closed
8/1/2012	12:07:09 PM	Bubbler valve closed
8/1/2012	12:07:09 PM	Helium valve opened
8/1/2012	12:07:09 PM	Main Vac valve opened
8/1/2012	12:07:09 PM	Helium MFC set to  20.000000
8/1/2012	12:07:09 PM	H2 MFC set to  0.000000
8/1/2012	12:07:09 PM	BCl3 MFC set to  0.000000
8/1/2012	12:07:09 PM	PH3 MFC set to  0.000000
8/1/2012	12:07:09 PM	SiCl4 MFC set to  0.000000
8/1/2012	12:07:09 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	12:07:09 PM	Tube furnace set to 150
8/1/2012	12:09:09 PM	Helium valve closed
8/1/2012	12:09:09 PM	H2 valve closed
8/1/2012	12:09:09 PM	BCl3 valve closed
8/1/2012	12:09:09 PM	PH3 valve closed
8/1/2012	12:09:09 PM	SiCl4 pre valve closed
8/1/2012	12:09:09 PM	SiCl4 post valve closed
8/1/2012	12:09:09 PM	Bypass valve closed
8/1/2012	12:09:09 PM	Bubbler valve closed
8/1/2012	12:09:09 PM	Main Vac valve opened
8/1/2012	12:09:09 PM	Helium MFC set to  0.000000
8/1/2012	12:09:09 PM	H2 MFC set to  0.000000
8/1/2012	12:09:09 PM	BCl3 MFC set to  0.000000
8/1/2012	12:09:09 PM	PH3 MFC set to  0.000000
8/1/2012	12:09:09 PM	SiCl4 MFC set to  0.000000
8/1/2012	12:09:09 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	12:09:09 PM	Tube furnace set to 150
8/1/2012	12:09:10 PM	Run finished at 12:09 PM
8/1/2012	12:26:02 PM	Main Vac valve closed
8/1/2012	12:26:07 PM	Main Vac valve opened
8/1/2012	12:27:16 PM	Recipe started at 12:27 PM
8/1/2012	12:27:16 PM	Helium valve closed
8/1/2012	12:27:16 PM	H2 valve closed
8/1/2012	12:27:16 PM	BCl3 valve closed
8/1/2012	12:27:16 PM	PH3 valve closed
8/1/2012	12:27:16 PM	SiCl4 pre valve closed
8/1/2012	12:27:16 PM	SiCl4 post valve closed
8/1/2012	12:27:16 PM	Main Vac valve closed
8/1/2012	12:27:16 PM	Bypass valve closed
8/1/2012	12:27:16 PM	Bubbler valve closed
8/1/2012	12:27:16 PM	Helium MFC set to  0.000000
8/1/2012	12:27:16 PM	H2 MFC set to  0.000000
8/1/2012	12:27:16 PM	BCl3 MFC set to  0.000000
8/1/2012	12:27:16 PM	PH3 MFC set to  0.000000
8/1/2012	12:27:16 PM	SiCl4 MFC set to  0.000000
8/1/2012	12:27:16 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	12:27:16 PM	Tube furnace set to 0
8/1/2012	12:27:19 PM	Helium valve closed
8/1/2012	12:27:20 PM	BCl3 valve closed
8/1/2012	12:27:20 PM	PH3 valve closed
8/1/2012	12:27:20 PM	SiCl4 pre valve closed
8/1/2012	12:27:20 PM	SiCl4 post valve closed
8/1/2012	12:27:20 PM	Main Vac valve closed
8/1/2012	12:27:20 PM	Bypass valve closed
8/1/2012	12:27:20 PM	Bubbler valve closed
8/1/2012	12:27:20 PM	H2 valve opened
8/1/2012	12:27:20 PM	Helium MFC set to  0.000000
8/1/2012	12:27:20 PM	H2 MFC set to  500.000000
8/1/2012	12:27:20 PM	BCl3 MFC set to  0.000000
8/1/2012	12:27:20 PM	PH3 MFC set to  0.000000
8/1/2012	12:27:20 PM	SiCl4 MFC set to  0.000000
8/1/2012	12:27:20 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	12:27:20 PM	Tube furnace set to 0
8/1/2012	12:28:32 PM	Helium valve closed
8/1/2012	12:28:32 PM	BCl3 valve closed
8/1/2012	12:28:32 PM	PH3 valve closed
8/1/2012	12:28:32 PM	SiCl4 pre valve closed
8/1/2012	12:28:32 PM	SiCl4 post valve closed
8/1/2012	12:28:32 PM	Main Vac valve closed
8/1/2012	12:28:32 PM	Bypass valve closed
8/1/2012	12:28:32 PM	H2 valve opened
8/1/2012	12:28:32 PM	Bubbler valve opened
8/1/2012	12:28:32 PM	Helium MFC set to  0.000000
8/1/2012	12:28:32 PM	H2 MFC set to  500.000000
8/1/2012	12:28:32 PM	BCl3 MFC set to  0.000000
8/1/2012	12:28:32 PM	PH3 MFC set to  0.000000
8/1/2012	12:28:32 PM	SiCl4 MFC set to  0.000000
8/1/2012	12:28:32 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	12:28:32 PM	Tube furnace set to 0
8/1/2012	12:28:33 PM	Helium valve closed
8/1/2012	12:28:33 PM	BCl3 valve closed
8/1/2012	12:28:33 PM	PH3 valve closed
8/1/2012	12:28:33 PM	SiCl4 pre valve closed
8/1/2012	12:28:33 PM	SiCl4 post valve closed
8/1/2012	12:28:33 PM	Main Vac valve closed
8/1/2012	12:28:33 PM	Bypass valve closed
8/1/2012	12:28:33 PM	H2 valve opened
8/1/2012	12:28:33 PM	Bubbler valve opened
8/1/2012	12:28:33 PM	Helium MFC set to  0.000000
8/1/2012	12:28:33 PM	H2 MFC set to  500.000000
8/1/2012	12:28:33 PM	BCl3 MFC set to  0.000000
8/1/2012	12:28:33 PM	PH3 MFC set to  0.000000
8/1/2012	12:28:33 PM	SiCl4 MFC set to  0.000000
8/1/2012	12:28:33 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	12:28:33 PM	Tube furnace set to 1000
8/1/2012	12:48:33 PM	Helium valve closed
8/1/2012	12:48:33 PM	BCl3 valve closed
8/1/2012	12:48:33 PM	Main Vac valve closed
8/1/2012	12:48:33 PM	Bypass valve closed
8/1/2012	12:48:33 PM	H2 valve opened
8/1/2012	12:48:33 PM	PH3 valve opened
8/1/2012	12:48:33 PM	SiCl4 pre valve opened
8/1/2012	12:48:33 PM	SiCl4 post valve opened
8/1/2012	12:48:33 PM	Bubbler valve opened
8/1/2012	12:48:33 PM	Helium MFC set to  0.000000
8/1/2012	12:48:33 PM	H2 MFC set to  500.000000
8/1/2012	12:48:33 PM	BCl3 MFC set to  0.000000
8/1/2012	12:48:33 PM	PH3 MFC set to  0.300000
8/1/2012	12:48:33 PM	SiCl4 MFC set to  25.000000
8/1/2012	12:48:33 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	12:48:33 PM	Tube furnace set to 1000
8/1/2012	12:57:33 PM	Helium valve closed
8/1/2012	12:57:33 PM	BCl3 valve closed
8/1/2012	12:57:33 PM	PH3 valve closed
8/1/2012	12:57:33 PM	SiCl4 pre valve closed
8/1/2012	12:57:33 PM	SiCl4 post valve closed
8/1/2012	12:57:33 PM	Main Vac valve closed
8/1/2012	12:57:33 PM	Bypass valve closed
8/1/2012	12:57:33 PM	H2 valve opened
8/1/2012	12:57:33 PM	Bubbler valve opened
8/1/2012	12:57:33 PM	Helium MFC set to  0.000000
8/1/2012	12:57:33 PM	H2 MFC set to  500.000000
8/1/2012	12:57:33 PM	BCl3 MFC set to  0.000000
8/1/2012	12:57:33 PM	PH3 MFC set to  0.000000
8/1/2012	12:57:33 PM	SiCl4 MFC set to  0.000000
8/1/2012	12:57:33 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	12:57:34 PM	Tube furnace set to 750
8/1/2012	1:02:34 PM	H2 valve closed
8/1/2012	1:02:34 PM	BCl3 valve closed
8/1/2012	1:02:34 PM	PH3 valve closed
8/1/2012	1:02:34 PM	SiCl4 pre valve closed
8/1/2012	1:02:34 PM	SiCl4 post valve closed
8/1/2012	1:02:34 PM	Main Vac valve closed
8/1/2012	1:02:34 PM	Bypass valve closed
8/1/2012	1:02:34 PM	Helium valve opened
8/1/2012	1:02:34 PM	Bubbler valve opened
8/1/2012	1:02:34 PM	Helium MFC set to  500.000000
8/1/2012	1:02:34 PM	H2 MFC set to  0.000000
8/1/2012	1:02:34 PM	BCl3 MFC set to  0.000000
8/1/2012	1:02:34 PM	PH3 MFC set to  0.000000
8/1/2012	1:02:34 PM	SiCl4 MFC set to  0.000000
8/1/2012	1:02:34 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	1:02:34 PM	Tube furnace set to 0
8/1/2012	1:18:55 PM	Run aborted at 1:18 PM
8/1/2012	1:18:55 PM	Helium valve closed
8/1/2012	1:18:55 PM	H2 valve closed
8/1/2012	1:18:55 PM	BCl3 valve closed
8/1/2012	1:18:55 PM	PH3 valve closed
8/1/2012	1:18:55 PM	SiCl4 pre valve closed
8/1/2012	1:18:55 PM	SiCl4 post valve closed
8/1/2012	1:18:55 PM	Bypass valve closed
8/1/2012	1:18:55 PM	Main Vac valve closed
8/1/2012	1:18:55 PM	Bubbler valve closed
8/1/2012	1:18:55 PM	Helium MFC set to  0.000000
8/1/2012	1:18:55 PM	H2 MFC set to  0.000000
8/1/2012	1:18:55 PM	BCl3 MFC set to  0.000000
8/1/2012	1:18:55 PM	PH3 MFC set to  0.000000
8/1/2012	1:18:55 PM	SiCl4 MFC set to  0.000000
8/1/2012	1:18:55 PM	Tube furnace set to 0
8/1/2012	1:18:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/1/2012	1:18:57 PM	Recipe started at 1:18 PM
8/1/2012	1:18:57 PM	Helium valve closed
8/1/2012	1:18:57 PM	H2 valve closed
8/1/2012	1:18:57 PM	BCl3 valve closed
8/1/2012	1:18:57 PM	PH3 valve closed
8/1/2012	1:18:57 PM	SiCl4 pre valve closed
8/1/2012	1:18:57 PM	SiCl4 post valve closed
8/1/2012	1:18:57 PM	Main Vac valve closed
8/1/2012	1:18:57 PM	Bypass valve closed
8/1/2012	1:18:57 PM	Bubbler valve closed
8/1/2012	1:18:57 PM	Helium MFC set to  0.000000
8/1/2012	1:18:57 PM	H2 MFC set to  0.000000
8/1/2012	1:18:57 PM	BCl3 MFC set to  0.000000
8/1/2012	1:18:57 PM	PH3 MFC set to  0.000000
8/1/2012	1:18:57 PM	SiCl4 MFC set to  0.000000
8/1/2012	1:18:57 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	1:18:57 PM	Tube furnace set to 0
8/1/2012	1:19:00 PM	H2 valve closed
8/1/2012	1:19:00 PM	BCl3 valve closed
8/1/2012	1:19:00 PM	PH3 valve closed
8/1/2012	1:19:00 PM	SiCl4 pre valve closed
8/1/2012	1:19:00 PM	SiCl4 post valve closed
8/1/2012	1:19:00 PM	Main Vac valve closed
8/1/2012	1:19:00 PM	Bypass valve closed
8/1/2012	1:19:00 PM	Bubbler valve closed
8/1/2012	1:19:00 PM	Helium valve opened
8/1/2012	1:19:00 PM	Helium MFC set to  500.000000
8/1/2012	1:19:00 PM	H2 MFC set to  0.000000
8/1/2012	1:19:00 PM	BCl3 MFC set to  0.000000
8/1/2012	1:19:00 PM	PH3 MFC set to  0.000000
8/1/2012	1:19:00 PM	SiCl4 MFC set to  0.000000
8/1/2012	1:19:00 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	1:19:01 PM	Tube furnace set to 0
8/1/2012	1:19:01 PM	Helium valve closed
8/1/2012	1:19:01 PM	H2 valve closed
8/1/2012	1:19:01 PM	BCl3 valve closed
8/1/2012	1:19:01 PM	PH3 valve closed
8/1/2012	1:19:01 PM	SiCl4 pre valve closed
8/1/2012	1:19:01 PM	SiCl4 post valve closed
8/1/2012	1:19:01 PM	Main Vac valve closed
8/1/2012	1:19:01 PM	Bypass valve closed
8/1/2012	1:19:01 PM	Bubbler valve closed
8/1/2012	1:19:01 PM	Helium MFC set to  0.000000
8/1/2012	1:19:01 PM	H2 MFC set to  0.000000
8/1/2012	1:19:01 PM	BCl3 MFC set to  0.000000
8/1/2012	1:19:01 PM	PH3 MFC set to  0.000000
8/1/2012	1:19:01 PM	SiCl4 MFC set to  0.000000
8/1/2012	1:19:01 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	1:19:01 PM	Tube furnace set to 0
8/1/2012	1:19:02 PM	Run finished at 1:19 PM
8/1/2012	1:19:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/1/2012	1:22:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/1/2012	1:22:01 PM	Recipe started at 1:22 PM
8/1/2012	1:22:01 PM	Helium valve closed
8/1/2012	1:22:01 PM	H2 valve closed
8/1/2012	1:22:01 PM	BCl3 valve closed
8/1/2012	1:22:01 PM	PH3 valve closed
8/1/2012	1:22:01 PM	SiCl4 pre valve closed
8/1/2012	1:22:01 PM	SiCl4 post valve closed
8/1/2012	1:22:01 PM	Main Vac valve closed
8/1/2012	1:22:01 PM	Bubbler valve closed
8/1/2012	1:22:01 PM	Bypass valve opened
8/1/2012	1:22:01 PM	Helium MFC set to  0.000000
8/1/2012	1:22:01 PM	H2 MFC set to  0.000000
8/1/2012	1:22:01 PM	BCl3 MFC set to  0.000000
8/1/2012	1:22:01 PM	PH3 MFC set to  0.000000
8/1/2012	1:22:01 PM	SiCl4 MFC set to  0.000000
8/1/2012	1:22:01 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	1:22:01 PM	Tube furnace set to 0
8/1/2012	1:23:08 PM	Helium valve closed
8/1/2012	1:23:08 PM	H2 valve closed
8/1/2012	1:23:08 PM	BCl3 valve closed
8/1/2012	1:23:08 PM	PH3 valve closed
8/1/2012	1:23:08 PM	SiCl4 pre valve closed
8/1/2012	1:23:08 PM	SiCl4 post valve closed
8/1/2012	1:23:08 PM	Main Vac valve closed
8/1/2012	1:23:08 PM	Bubbler valve closed
8/1/2012	1:23:08 PM	Bypass valve opened
8/1/2012	1:23:08 PM	Helium MFC set to  0.000000
8/1/2012	1:23:08 PM	H2 MFC set to  0.000000
8/1/2012	1:23:08 PM	BCl3 MFC set to  0.000000
8/1/2012	1:23:08 PM	PH3 MFC set to  0.000000
8/1/2012	1:23:08 PM	SiCl4 MFC set to  0.000000
8/1/2012	1:23:08 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	1:23:08 PM	Tube furnace set to 0
8/1/2012	1:24:08 PM	Helium valve closed
8/1/2012	1:24:08 PM	H2 valve closed
8/1/2012	1:24:08 PM	BCl3 valve closed
8/1/2012	1:24:08 PM	PH3 valve closed
8/1/2012	1:24:08 PM	SiCl4 pre valve closed
8/1/2012	1:24:08 PM	SiCl4 post valve closed
8/1/2012	1:24:08 PM	Bypass valve closed
8/1/2012	1:24:08 PM	Bubbler valve closed
8/1/2012	1:24:08 PM	Main Vac valve opened
8/1/2012	1:24:08 PM	Helium MFC set to  0.000000
8/1/2012	1:24:08 PM	H2 MFC set to  0.000000
8/1/2012	1:24:08 PM	BCl3 MFC set to  0.000000
8/1/2012	1:24:08 PM	PH3 MFC set to  0.000000
8/1/2012	1:24:08 PM	SiCl4 MFC set to  0.000000
8/1/2012	1:24:08 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	1:24:08 PM	Tube furnace set to 0
8/1/2012	1:24:09 PM	Run finished at 1:24 PM
8/1/2012	1:24:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/1/2012	1:27:26 PM	Recipe started at 1:27 PM
8/1/2012	1:27:26 PM	Helium valve closed
8/1/2012	1:27:26 PM	H2 valve closed
8/1/2012	1:27:26 PM	BCl3 valve closed
8/1/2012	1:27:26 PM	PH3 valve closed
8/1/2012	1:27:26 PM	SiCl4 pre valve closed
8/1/2012	1:27:26 PM	SiCl4 post valve closed
8/1/2012	1:27:26 PM	Bypass valve closed
8/1/2012	1:27:26 PM	Bubbler valve closed
8/1/2012	1:27:26 PM	Main Vac valve opened
8/1/2012	1:27:26 PM	Helium MFC set to  0.000000
8/1/2012	1:27:26 PM	H2 MFC set to  0.000000
8/1/2012	1:27:26 PM	BCl3 MFC set to  0.000000
8/1/2012	1:27:26 PM	PH3 MFC set to  0.000000
8/1/2012	1:27:26 PM	SiCl4 MFC set to  0.000000
8/1/2012	1:27:26 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	1:27:26 PM	Tube furnace set to 150
8/1/2012	1:27:56 PM	H2 valve closed
8/1/2012	1:27:56 PM	BCl3 valve closed
8/1/2012	1:27:56 PM	PH3 valve closed
8/1/2012	1:27:56 PM	SiCl4 pre valve closed
8/1/2012	1:27:56 PM	SiCl4 post valve closed
8/1/2012	1:27:56 PM	Bypass valve closed
8/1/2012	1:27:56 PM	Bubbler valve closed
8/1/2012	1:27:56 PM	Helium valve opened
8/1/2012	1:27:56 PM	Main Vac valve opened
8/1/2012	1:27:56 PM	Helium MFC set to  20.000000
8/1/2012	1:27:56 PM	H2 MFC set to  0.000000
8/1/2012	1:27:56 PM	BCl3 MFC set to  0.000000
8/1/2012	1:27:56 PM	PH3 MFC set to  0.000000
8/1/2012	1:27:56 PM	SiCl4 MFC set to  0.000000
8/1/2012	1:27:56 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	1:27:56 PM	Tube furnace set to 150
8/1/2012	1:28:26 PM	Helium valve closed
8/1/2012	1:28:26 PM	H2 valve closed
8/1/2012	1:28:26 PM	BCl3 valve closed
8/1/2012	1:28:26 PM	PH3 valve closed
8/1/2012	1:28:26 PM	SiCl4 pre valve closed
8/1/2012	1:28:26 PM	SiCl4 post valve closed
8/1/2012	1:28:26 PM	Bypass valve closed
8/1/2012	1:28:26 PM	Bubbler valve closed
8/1/2012	1:28:26 PM	Main Vac valve opened
8/1/2012	1:28:26 PM	Helium MFC set to  0.000000
8/1/2012	1:28:26 PM	H2 MFC set to  0.000000
8/1/2012	1:28:26 PM	BCl3 MFC set to  0.000000
8/1/2012	1:28:26 PM	PH3 MFC set to  0.000000
8/1/2012	1:28:26 PM	SiCl4 MFC set to  0.000000
8/1/2012	1:28:26 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	1:28:26 PM	Tube furnace set to 150
8/1/2012	1:28:56 PM	H2 valve closed
8/1/2012	1:28:56 PM	BCl3 valve closed
8/1/2012	1:28:56 PM	PH3 valve closed
8/1/2012	1:28:56 PM	SiCl4 pre valve closed
8/1/2012	1:28:56 PM	SiCl4 post valve closed
8/1/2012	1:28:56 PM	Bypass valve closed
8/1/2012	1:28:56 PM	Bubbler valve closed
8/1/2012	1:28:56 PM	Helium valve opened
8/1/2012	1:28:56 PM	Main Vac valve opened
8/1/2012	1:28:56 PM	Helium MFC set to  20.000000
8/1/2012	1:28:56 PM	H2 MFC set to  0.000000
8/1/2012	1:28:56 PM	BCl3 MFC set to  0.000000
8/1/2012	1:28:56 PM	PH3 MFC set to  0.000000
8/1/2012	1:28:56 PM	SiCl4 MFC set to  0.000000
8/1/2012	1:28:56 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	1:28:57 PM	Tube furnace set to 150
8/1/2012	1:29:27 PM	Helium valve closed
8/1/2012	1:29:27 PM	H2 valve closed
8/1/2012	1:29:27 PM	BCl3 valve closed
8/1/2012	1:29:27 PM	PH3 valve closed
8/1/2012	1:29:27 PM	SiCl4 pre valve closed
8/1/2012	1:29:27 PM	SiCl4 post valve closed
8/1/2012	1:29:27 PM	Bypass valve closed
8/1/2012	1:29:27 PM	Bubbler valve closed
8/1/2012	1:29:27 PM	Main Vac valve opened
8/1/2012	1:29:27 PM	Helium MFC set to  0.000000
8/1/2012	1:29:27 PM	H2 MFC set to  0.000000
8/1/2012	1:29:27 PM	BCl3 MFC set to  0.000000
8/1/2012	1:29:27 PM	PH3 MFC set to  0.000000
8/1/2012	1:29:27 PM	SiCl4 MFC set to  0.000000
8/1/2012	1:29:27 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	1:29:27 PM	Tube furnace set to 150
8/1/2012	1:29:57 PM	H2 valve closed
8/1/2012	1:29:57 PM	BCl3 valve closed
8/1/2012	1:29:57 PM	PH3 valve closed
8/1/2012	1:29:57 PM	SiCl4 pre valve closed
8/1/2012	1:29:57 PM	SiCl4 post valve closed
8/1/2012	1:29:57 PM	Bypass valve closed
8/1/2012	1:29:57 PM	Bubbler valve closed
8/1/2012	1:29:57 PM	Helium valve opened
8/1/2012	1:29:57 PM	Main Vac valve opened
8/1/2012	1:29:57 PM	Helium MFC set to  20.000000
8/1/2012	1:29:57 PM	H2 MFC set to  0.000000
8/1/2012	1:29:57 PM	BCl3 MFC set to  0.000000
8/1/2012	1:29:57 PM	PH3 MFC set to  0.000000
8/1/2012	1:29:57 PM	SiCl4 MFC set to  0.000000
8/1/2012	1:29:57 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	1:29:57 PM	Tube furnace set to 150
8/1/2012	1:31:57 PM	Helium valve closed
8/1/2012	1:31:57 PM	H2 valve closed
8/1/2012	1:31:57 PM	BCl3 valve closed
8/1/2012	1:31:57 PM	PH3 valve closed
8/1/2012	1:31:57 PM	SiCl4 pre valve closed
8/1/2012	1:31:57 PM	SiCl4 post valve closed
8/1/2012	1:31:57 PM	Bypass valve closed
8/1/2012	1:31:57 PM	Bubbler valve closed
8/1/2012	1:31:57 PM	Main Vac valve opened
8/1/2012	1:31:57 PM	Helium MFC set to  0.000000
8/1/2012	1:31:57 PM	H2 MFC set to  0.000000
8/1/2012	1:31:57 PM	BCl3 MFC set to  0.000000
8/1/2012	1:31:57 PM	PH3 MFC set to  0.000000
8/1/2012	1:31:57 PM	SiCl4 MFC set to  0.000000
8/1/2012	1:31:57 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	1:31:57 PM	Tube furnace set to 150
8/1/2012	1:32:27 PM	H2 valve closed
8/1/2012	1:32:27 PM	BCl3 valve closed
8/1/2012	1:32:27 PM	PH3 valve closed
8/1/2012	1:32:27 PM	SiCl4 pre valve closed
8/1/2012	1:32:27 PM	SiCl4 post valve closed
8/1/2012	1:32:27 PM	Bypass valve closed
8/1/2012	1:32:27 PM	Bubbler valve closed
8/1/2012	1:32:27 PM	Helium valve opened
8/1/2012	1:32:27 PM	Main Vac valve opened
8/1/2012	1:32:27 PM	Helium MFC set to  20.000000
8/1/2012	1:32:27 PM	H2 MFC set to  0.000000
8/1/2012	1:32:27 PM	BCl3 MFC set to  0.000000
8/1/2012	1:32:27 PM	PH3 MFC set to  0.000000
8/1/2012	1:32:27 PM	SiCl4 MFC set to  0.000000
8/1/2012	1:32:27 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	1:32:27 PM	Tube furnace set to 150
8/1/2012	1:32:57 PM	Helium valve closed
8/1/2012	1:32:57 PM	H2 valve closed
8/1/2012	1:32:57 PM	BCl3 valve closed
8/1/2012	1:32:57 PM	PH3 valve closed
8/1/2012	1:32:57 PM	SiCl4 pre valve closed
8/1/2012	1:32:57 PM	SiCl4 post valve closed
8/1/2012	1:32:57 PM	Bypass valve closed
8/1/2012	1:32:57 PM	Bubbler valve closed
8/1/2012	1:32:57 PM	Main Vac valve opened
8/1/2012	1:32:57 PM	Helium MFC set to  0.000000
8/1/2012	1:32:57 PM	H2 MFC set to  0.000000
8/1/2012	1:32:57 PM	BCl3 MFC set to  0.000000
8/1/2012	1:32:57 PM	PH3 MFC set to  0.000000
8/1/2012	1:32:57 PM	SiCl4 MFC set to  0.000000
8/1/2012	1:32:58 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	1:32:58 PM	Tube furnace set to 150
8/1/2012	1:33:28 PM	H2 valve closed
8/1/2012	1:33:28 PM	BCl3 valve closed
8/1/2012	1:33:28 PM	PH3 valve closed
8/1/2012	1:33:28 PM	SiCl4 pre valve closed
8/1/2012	1:33:28 PM	SiCl4 post valve closed
8/1/2012	1:33:28 PM	Bypass valve closed
8/1/2012	1:33:28 PM	Bubbler valve closed
8/1/2012	1:33:28 PM	Helium valve opened
8/1/2012	1:33:28 PM	Main Vac valve opened
8/1/2012	1:33:28 PM	Helium MFC set to  20.000000
8/1/2012	1:33:28 PM	H2 MFC set to  0.000000
8/1/2012	1:33:28 PM	BCl3 MFC set to  0.000000
8/1/2012	1:33:28 PM	PH3 MFC set to  0.000000
8/1/2012	1:33:28 PM	SiCl4 MFC set to  0.000000
8/1/2012	1:33:28 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	1:33:28 PM	Tube furnace set to 150
8/1/2012	1:33:58 PM	Helium valve closed
8/1/2012	1:33:58 PM	H2 valve closed
8/1/2012	1:33:58 PM	BCl3 valve closed
8/1/2012	1:33:58 PM	PH3 valve closed
8/1/2012	1:33:58 PM	SiCl4 pre valve closed
8/1/2012	1:33:58 PM	SiCl4 post valve closed
8/1/2012	1:33:58 PM	Bypass valve closed
8/1/2012	1:33:58 PM	Bubbler valve closed
8/1/2012	1:33:58 PM	Main Vac valve opened
8/1/2012	1:33:58 PM	Helium MFC set to  0.000000
8/1/2012	1:33:58 PM	H2 MFC set to  0.000000
8/1/2012	1:33:58 PM	BCl3 MFC set to  0.000000
8/1/2012	1:33:58 PM	PH3 MFC set to  0.000000
8/1/2012	1:33:58 PM	SiCl4 MFC set to  0.000000
8/1/2012	1:33:58 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	1:33:58 PM	Tube furnace set to 150
8/1/2012	1:34:28 PM	H2 valve closed
8/1/2012	1:34:28 PM	BCl3 valve closed
8/1/2012	1:34:28 PM	PH3 valve closed
8/1/2012	1:34:28 PM	SiCl4 pre valve closed
8/1/2012	1:34:28 PM	SiCl4 post valve closed
8/1/2012	1:34:28 PM	Bypass valve closed
8/1/2012	1:34:28 PM	Bubbler valve closed
8/1/2012	1:34:28 PM	Helium valve opened
8/1/2012	1:34:28 PM	Main Vac valve opened
8/1/2012	1:34:28 PM	Helium MFC set to  20.000000
8/1/2012	1:34:28 PM	H2 MFC set to  0.000000
8/1/2012	1:34:28 PM	BCl3 MFC set to  0.000000
8/1/2012	1:34:28 PM	PH3 MFC set to  0.000000
8/1/2012	1:34:28 PM	SiCl4 MFC set to  0.000000
8/1/2012	1:34:28 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	1:34:28 PM	Tube furnace set to 150
8/1/2012	1:36:28 PM	Helium valve closed
8/1/2012	1:36:28 PM	H2 valve closed
8/1/2012	1:36:28 PM	BCl3 valve closed
8/1/2012	1:36:28 PM	PH3 valve closed
8/1/2012	1:36:28 PM	SiCl4 pre valve closed
8/1/2012	1:36:28 PM	SiCl4 post valve closed
8/1/2012	1:36:28 PM	Bypass valve closed
8/1/2012	1:36:28 PM	Bubbler valve closed
8/1/2012	1:36:28 PM	Main Vac valve opened
8/1/2012	1:36:28 PM	Helium MFC set to  0.000000
8/1/2012	1:36:28 PM	H2 MFC set to  0.000000
8/1/2012	1:36:28 PM	BCl3 MFC set to  0.000000
8/1/2012	1:36:28 PM	PH3 MFC set to  0.000000
8/1/2012	1:36:28 PM	SiCl4 MFC set to  0.000000
8/1/2012	1:36:28 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	1:36:29 PM	Tube furnace set to 150
8/1/2012	1:36:59 PM	H2 valve closed
8/1/2012	1:36:59 PM	BCl3 valve closed
8/1/2012	1:36:59 PM	PH3 valve closed
8/1/2012	1:36:59 PM	SiCl4 pre valve closed
8/1/2012	1:36:59 PM	SiCl4 post valve closed
8/1/2012	1:36:59 PM	Bypass valve closed
8/1/2012	1:36:59 PM	Bubbler valve closed
8/1/2012	1:36:59 PM	Helium valve opened
8/1/2012	1:36:59 PM	Main Vac valve opened
8/1/2012	1:36:59 PM	Helium MFC set to  20.000000
8/1/2012	1:36:59 PM	H2 MFC set to  0.000000
8/1/2012	1:36:59 PM	BCl3 MFC set to  0.000000
8/1/2012	1:36:59 PM	PH3 MFC set to  0.000000
8/1/2012	1:36:59 PM	SiCl4 MFC set to  0.000000
8/1/2012	1:36:59 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	1:36:59 PM	Tube furnace set to 150
8/1/2012	1:37:29 PM	Helium valve closed
8/1/2012	1:37:29 PM	H2 valve closed
8/1/2012	1:37:29 PM	BCl3 valve closed
8/1/2012	1:37:29 PM	PH3 valve closed
8/1/2012	1:37:29 PM	SiCl4 pre valve closed
8/1/2012	1:37:29 PM	SiCl4 post valve closed
8/1/2012	1:37:29 PM	Bypass valve closed
8/1/2012	1:37:29 PM	Bubbler valve closed
8/1/2012	1:37:29 PM	Main Vac valve opened
8/1/2012	1:37:29 PM	Helium MFC set to  0.000000
8/1/2012	1:37:29 PM	H2 MFC set to  0.000000
8/1/2012	1:37:29 PM	BCl3 MFC set to  0.000000
8/1/2012	1:37:29 PM	PH3 MFC set to  0.000000
8/1/2012	1:37:29 PM	SiCl4 MFC set to  0.000000
8/1/2012	1:37:29 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	1:37:29 PM	Tube furnace set to 150
8/1/2012	1:37:59 PM	H2 valve closed
8/1/2012	1:37:59 PM	BCl3 valve closed
8/1/2012	1:37:59 PM	PH3 valve closed
8/1/2012	1:37:59 PM	SiCl4 pre valve closed
8/1/2012	1:37:59 PM	SiCl4 post valve closed
8/1/2012	1:37:59 PM	Bypass valve closed
8/1/2012	1:37:59 PM	Bubbler valve closed
8/1/2012	1:37:59 PM	Helium valve opened
8/1/2012	1:37:59 PM	Main Vac valve opened
8/1/2012	1:37:59 PM	Helium MFC set to  20.000000
8/1/2012	1:37:59 PM	H2 MFC set to  0.000000
8/1/2012	1:37:59 PM	BCl3 MFC set to  0.000000
8/1/2012	1:37:59 PM	PH3 MFC set to  0.000000
8/1/2012	1:37:59 PM	SiCl4 MFC set to  0.000000
8/1/2012	1:37:59 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	1:37:59 PM	Tube furnace set to 150
8/1/2012	1:39:59 PM	Helium valve closed
8/1/2012	1:39:59 PM	H2 valve closed
8/1/2012	1:39:59 PM	BCl3 valve closed
8/1/2012	1:39:59 PM	PH3 valve closed
8/1/2012	1:39:59 PM	SiCl4 pre valve closed
8/1/2012	1:39:59 PM	SiCl4 post valve closed
8/1/2012	1:39:59 PM	Bypass valve closed
8/1/2012	1:39:59 PM	Bubbler valve closed
8/1/2012	1:39:59 PM	Main Vac valve opened
8/1/2012	1:39:59 PM	Helium MFC set to  0.000000
8/1/2012	1:39:59 PM	H2 MFC set to  0.000000
8/1/2012	1:39:59 PM	BCl3 MFC set to  0.000000
8/1/2012	1:39:59 PM	PH3 MFC set to  0.000000
8/1/2012	1:39:59 PM	SiCl4 MFC set to  0.000000
8/1/2012	1:39:59 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	1:40:00 PM	Tube furnace set to 150
8/1/2012	1:40:30 PM	H2 valve closed
8/1/2012	1:40:30 PM	BCl3 valve closed
8/1/2012	1:40:30 PM	PH3 valve closed
8/1/2012	1:40:30 PM	SiCl4 pre valve closed
8/1/2012	1:40:30 PM	SiCl4 post valve closed
8/1/2012	1:40:30 PM	Bypass valve closed
8/1/2012	1:40:30 PM	Bubbler valve closed
8/1/2012	1:40:30 PM	Helium valve opened
8/1/2012	1:40:30 PM	Main Vac valve opened
8/1/2012	1:40:30 PM	Helium MFC set to  20.000000
8/1/2012	1:40:30 PM	H2 MFC set to  0.000000
8/1/2012	1:40:30 PM	BCl3 MFC set to  0.000000
8/1/2012	1:40:30 PM	PH3 MFC set to  0.000000
8/1/2012	1:40:30 PM	SiCl4 MFC set to  0.000000
8/1/2012	1:40:30 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	1:40:30 PM	Tube furnace set to 150
8/1/2012	1:41:00 PM	Helium valve closed
8/1/2012	1:41:00 PM	H2 valve closed
8/1/2012	1:41:00 PM	BCl3 valve closed
8/1/2012	1:41:00 PM	PH3 valve closed
8/1/2012	1:41:00 PM	SiCl4 pre valve closed
8/1/2012	1:41:00 PM	SiCl4 post valve closed
8/1/2012	1:41:00 PM	Bypass valve closed
8/1/2012	1:41:00 PM	Bubbler valve closed
8/1/2012	1:41:00 PM	Main Vac valve opened
8/1/2012	1:41:00 PM	Helium MFC set to  0.000000
8/1/2012	1:41:00 PM	H2 MFC set to  0.000000
8/1/2012	1:41:00 PM	BCl3 MFC set to  0.000000
8/1/2012	1:41:00 PM	PH3 MFC set to  0.000000
8/1/2012	1:41:00 PM	SiCl4 MFC set to  0.000000
8/1/2012	1:41:00 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	1:41:00 PM	Tube furnace set to 150
8/1/2012	1:41:30 PM	H2 valve closed
8/1/2012	1:41:30 PM	BCl3 valve closed
8/1/2012	1:41:30 PM	PH3 valve closed
8/1/2012	1:41:30 PM	SiCl4 pre valve closed
8/1/2012	1:41:30 PM	SiCl4 post valve closed
8/1/2012	1:41:30 PM	Bypass valve closed
8/1/2012	1:41:30 PM	Bubbler valve closed
8/1/2012	1:41:30 PM	Helium valve opened
8/1/2012	1:41:30 PM	Main Vac valve opened
8/1/2012	1:41:30 PM	Helium MFC set to  20.000000
8/1/2012	1:41:30 PM	H2 MFC set to  0.000000
8/1/2012	1:41:30 PM	BCl3 MFC set to  0.000000
8/1/2012	1:41:30 PM	PH3 MFC set to  0.000000
8/1/2012	1:41:30 PM	SiCl4 MFC set to  0.000000
8/1/2012	1:41:30 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	1:41:30 PM	Tube furnace set to 150
8/1/2012	1:43:30 PM	Helium valve closed
8/1/2012	1:43:30 PM	H2 valve closed
8/1/2012	1:43:30 PM	BCl3 valve closed
8/1/2012	1:43:30 PM	PH3 valve closed
8/1/2012	1:43:30 PM	SiCl4 pre valve closed
8/1/2012	1:43:30 PM	SiCl4 post valve closed
8/1/2012	1:43:30 PM	Bypass valve closed
8/1/2012	1:43:30 PM	Bubbler valve closed
8/1/2012	1:43:30 PM	Main Vac valve opened
8/1/2012	1:43:30 PM	Helium MFC set to  0.000000
8/1/2012	1:43:30 PM	H2 MFC set to  0.000000
8/1/2012	1:43:30 PM	BCl3 MFC set to  0.000000
8/1/2012	1:43:30 PM	PH3 MFC set to  0.000000
8/1/2012	1:43:30 PM	SiCl4 MFC set to  0.000000
8/1/2012	1:43:30 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	1:43:31 PM	Tube furnace set to 150
8/1/2012	1:43:32 PM	Run finished at 1:43 PM
8/1/2012	2:01:10 PM	Recipe started at 2:01 PM
8/1/2012	2:01:10 PM	Helium valve closed
8/1/2012	2:01:10 PM	H2 valve closed
8/1/2012	2:01:10 PM	BCl3 valve closed
8/1/2012	2:01:10 PM	PH3 valve closed
8/1/2012	2:01:10 PM	SiCl4 pre valve closed
8/1/2012	2:01:10 PM	SiCl4 post valve closed
8/1/2012	2:01:10 PM	Bypass valve closed
8/1/2012	2:01:10 PM	Bubbler valve closed
8/1/2012	2:01:10 PM	Main Vac valve opened
8/1/2012	2:01:10 PM	Helium MFC set to  0.000000
8/1/2012	2:01:10 PM	H2 MFC set to  0.000000
8/1/2012	2:01:10 PM	BCl3 MFC set to  0.000000
8/1/2012	2:01:10 PM	PH3 MFC set to  0.000000
8/1/2012	2:01:10 PM	SiCl4 MFC set to  0.000000
8/1/2012	2:01:10 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	2:01:10 PM	Tube furnace set to 150
8/1/2012	2:01:40 PM	H2 valve closed
8/1/2012	2:01:40 PM	BCl3 valve closed
8/1/2012	2:01:40 PM	PH3 valve closed
8/1/2012	2:01:40 PM	SiCl4 pre valve closed
8/1/2012	2:01:40 PM	SiCl4 post valve closed
8/1/2012	2:01:40 PM	Bypass valve closed
8/1/2012	2:01:40 PM	Bubbler valve closed
8/1/2012	2:01:40 PM	Helium valve opened
8/1/2012	2:01:40 PM	Main Vac valve opened
8/1/2012	2:01:40 PM	Helium MFC set to  20.000000
8/1/2012	2:01:40 PM	H2 MFC set to  0.000000
8/1/2012	2:01:40 PM	BCl3 MFC set to  0.000000
8/1/2012	2:01:40 PM	PH3 MFC set to  0.000000
8/1/2012	2:01:40 PM	SiCl4 MFC set to  0.000000
8/1/2012	2:01:40 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	2:01:40 PM	Tube furnace set to 150
8/1/2012	2:02:10 PM	Helium valve closed
8/1/2012	2:02:10 PM	H2 valve closed
8/1/2012	2:02:10 PM	BCl3 valve closed
8/1/2012	2:02:10 PM	PH3 valve closed
8/1/2012	2:02:10 PM	SiCl4 pre valve closed
8/1/2012	2:02:10 PM	SiCl4 post valve closed
8/1/2012	2:02:10 PM	Bypass valve closed
8/1/2012	2:02:10 PM	Bubbler valve closed
8/1/2012	2:02:10 PM	Main Vac valve opened
8/1/2012	2:02:10 PM	Helium MFC set to  0.000000
8/1/2012	2:02:10 PM	H2 MFC set to  0.000000
8/1/2012	2:02:10 PM	BCl3 MFC set to  0.000000
8/1/2012	2:02:10 PM	PH3 MFC set to  0.000000
8/1/2012	2:02:10 PM	SiCl4 MFC set to  0.000000
8/1/2012	2:02:10 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	2:02:10 PM	Tube furnace set to 150
8/1/2012	2:02:41 PM	H2 valve closed
8/1/2012	2:02:41 PM	BCl3 valve closed
8/1/2012	2:02:41 PM	PH3 valve closed
8/1/2012	2:02:41 PM	SiCl4 pre valve closed
8/1/2012	2:02:41 PM	SiCl4 post valve closed
8/1/2012	2:02:41 PM	Bypass valve closed
8/1/2012	2:02:41 PM	Bubbler valve closed
8/1/2012	2:02:41 PM	Helium valve opened
8/1/2012	2:02:41 PM	Main Vac valve opened
8/1/2012	2:02:41 PM	Helium MFC set to  20.000000
8/1/2012	2:02:41 PM	H2 MFC set to  0.000000
8/1/2012	2:02:41 PM	BCl3 MFC set to  0.000000
8/1/2012	2:02:41 PM	PH3 MFC set to  0.000000
8/1/2012	2:02:41 PM	SiCl4 MFC set to  0.000000
8/1/2012	2:02:41 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	2:02:41 PM	Tube furnace set to 150
8/1/2012	2:03:11 PM	Helium valve closed
8/1/2012	2:03:11 PM	H2 valve closed
8/1/2012	2:03:11 PM	BCl3 valve closed
8/1/2012	2:03:11 PM	PH3 valve closed
8/1/2012	2:03:11 PM	SiCl4 pre valve closed
8/1/2012	2:03:11 PM	SiCl4 post valve closed
8/1/2012	2:03:11 PM	Bypass valve closed
8/1/2012	2:03:11 PM	Bubbler valve closed
8/1/2012	2:03:11 PM	Main Vac valve opened
8/1/2012	2:03:11 PM	Helium MFC set to  0.000000
8/1/2012	2:03:11 PM	H2 MFC set to  0.000000
8/1/2012	2:03:11 PM	BCl3 MFC set to  0.000000
8/1/2012	2:03:11 PM	PH3 MFC set to  0.000000
8/1/2012	2:03:11 PM	SiCl4 MFC set to  0.000000
8/1/2012	2:03:11 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	2:03:12 PM	Tube furnace set to 150
8/1/2012	2:03:41 PM	H2 valve closed
8/1/2012	2:03:41 PM	BCl3 valve closed
8/1/2012	2:03:41 PM	PH3 valve closed
8/1/2012	2:03:41 PM	SiCl4 pre valve closed
8/1/2012	2:03:41 PM	SiCl4 post valve closed
8/1/2012	2:03:41 PM	Bypass valve closed
8/1/2012	2:03:41 PM	Bubbler valve closed
8/1/2012	2:03:41 PM	Helium valve opened
8/1/2012	2:03:41 PM	Main Vac valve opened
8/1/2012	2:03:41 PM	Helium MFC set to  20.000000
8/1/2012	2:03:41 PM	H2 MFC set to  0.000000
8/1/2012	2:03:41 PM	BCl3 MFC set to  0.000000
8/1/2012	2:03:41 PM	PH3 MFC set to  0.000000
8/1/2012	2:03:41 PM	SiCl4 MFC set to  0.000000
8/1/2012	2:03:41 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	2:03:41 PM	Tube furnace set to 150
8/1/2012	2:05:41 PM	Helium valve closed
8/1/2012	2:05:41 PM	H2 valve closed
8/1/2012	2:05:41 PM	BCl3 valve closed
8/1/2012	2:05:41 PM	PH3 valve closed
8/1/2012	2:05:41 PM	SiCl4 pre valve closed
8/1/2012	2:05:41 PM	SiCl4 post valve closed
8/1/2012	2:05:41 PM	Bypass valve closed
8/1/2012	2:05:41 PM	Bubbler valve closed
8/1/2012	2:05:41 PM	Main Vac valve opened
8/1/2012	2:05:41 PM	Helium MFC set to  0.000000
8/1/2012	2:05:41 PM	H2 MFC set to  0.000000
8/1/2012	2:05:41 PM	BCl3 MFC set to  0.000000
8/1/2012	2:05:41 PM	PH3 MFC set to  0.000000
8/1/2012	2:05:41 PM	SiCl4 MFC set to  0.000000
8/1/2012	2:05:41 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	2:05:42 PM	Tube furnace set to 150
8/1/2012	2:06:12 PM	H2 valve closed
8/1/2012	2:06:12 PM	BCl3 valve closed
8/1/2012	2:06:12 PM	PH3 valve closed
8/1/2012	2:06:12 PM	SiCl4 pre valve closed
8/1/2012	2:06:12 PM	SiCl4 post valve closed
8/1/2012	2:06:12 PM	Bypass valve closed
8/1/2012	2:06:12 PM	Bubbler valve closed
8/1/2012	2:06:12 PM	Helium valve opened
8/1/2012	2:06:12 PM	Main Vac valve opened
8/1/2012	2:06:12 PM	Helium MFC set to  20.000000
8/1/2012	2:06:12 PM	H2 MFC set to  0.000000
8/1/2012	2:06:12 PM	BCl3 MFC set to  0.000000
8/1/2012	2:06:12 PM	PH3 MFC set to  0.000000
8/1/2012	2:06:12 PM	SiCl4 MFC set to  0.000000
8/1/2012	2:06:12 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	2:06:12 PM	Tube furnace set to 150
8/1/2012	2:06:42 PM	Helium valve closed
8/1/2012	2:06:42 PM	H2 valve closed
8/1/2012	2:06:42 PM	BCl3 valve closed
8/1/2012	2:06:42 PM	PH3 valve closed
8/1/2012	2:06:42 PM	SiCl4 pre valve closed
8/1/2012	2:06:42 PM	SiCl4 post valve closed
8/1/2012	2:06:42 PM	Bypass valve closed
8/1/2012	2:06:42 PM	Bubbler valve closed
8/1/2012	2:06:42 PM	Main Vac valve opened
8/1/2012	2:06:42 PM	Helium MFC set to  0.000000
8/1/2012	2:06:42 PM	H2 MFC set to  0.000000
8/1/2012	2:06:42 PM	BCl3 MFC set to  0.000000
8/1/2012	2:06:42 PM	PH3 MFC set to  0.000000
8/1/2012	2:06:42 PM	SiCl4 MFC set to  0.000000
8/1/2012	2:06:42 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	2:06:42 PM	Tube furnace set to 150
8/1/2012	2:07:12 PM	H2 valve closed
8/1/2012	2:07:12 PM	BCl3 valve closed
8/1/2012	2:07:12 PM	PH3 valve closed
8/1/2012	2:07:12 PM	SiCl4 pre valve closed
8/1/2012	2:07:12 PM	SiCl4 post valve closed
8/1/2012	2:07:12 PM	Bypass valve closed
8/1/2012	2:07:12 PM	Bubbler valve closed
8/1/2012	2:07:12 PM	Helium valve opened
8/1/2012	2:07:12 PM	Main Vac valve opened
8/1/2012	2:07:12 PM	Helium MFC set to  20.000000
8/1/2012	2:07:12 PM	H2 MFC set to  0.000000
8/1/2012	2:07:12 PM	BCl3 MFC set to  0.000000
8/1/2012	2:07:12 PM	PH3 MFC set to  0.000000
8/1/2012	2:07:12 PM	SiCl4 MFC set to  0.000000
8/1/2012	2:07:12 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	2:07:12 PM	Tube furnace set to 150
8/1/2012	2:07:42 PM	Helium valve closed
8/1/2012	2:07:42 PM	H2 valve closed
8/1/2012	2:07:42 PM	BCl3 valve closed
8/1/2012	2:07:42 PM	PH3 valve closed
8/1/2012	2:07:42 PM	SiCl4 pre valve closed
8/1/2012	2:07:42 PM	SiCl4 post valve closed
8/1/2012	2:07:42 PM	Bypass valve closed
8/1/2012	2:07:42 PM	Bubbler valve closed
8/1/2012	2:07:42 PM	Main Vac valve opened
8/1/2012	2:07:42 PM	Helium MFC set to  0.000000
8/1/2012	2:07:42 PM	H2 MFC set to  0.000000
8/1/2012	2:07:42 PM	BCl3 MFC set to  0.000000
8/1/2012	2:07:42 PM	PH3 MFC set to  0.000000
8/1/2012	2:07:42 PM	SiCl4 MFC set to  0.000000
8/1/2012	2:07:42 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	2:07:43 PM	Tube furnace set to 150
8/1/2012	2:08:13 PM	H2 valve closed
8/1/2012	2:08:13 PM	BCl3 valve closed
8/1/2012	2:08:13 PM	PH3 valve closed
8/1/2012	2:08:13 PM	SiCl4 pre valve closed
8/1/2012	2:08:13 PM	SiCl4 post valve closed
8/1/2012	2:08:13 PM	Bypass valve closed
8/1/2012	2:08:13 PM	Bubbler valve closed
8/1/2012	2:08:13 PM	Helium valve opened
8/1/2012	2:08:13 PM	Main Vac valve opened
8/1/2012	2:08:13 PM	Helium MFC set to  20.000000
8/1/2012	2:08:13 PM	H2 MFC set to  0.000000
8/1/2012	2:08:13 PM	BCl3 MFC set to  0.000000
8/1/2012	2:08:13 PM	PH3 MFC set to  0.000000
8/1/2012	2:08:13 PM	SiCl4 MFC set to  0.000000
8/1/2012	2:08:13 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	2:08:13 PM	Tube furnace set to 150
8/1/2012	2:10:13 PM	Helium valve closed
8/1/2012	2:10:13 PM	H2 valve closed
8/1/2012	2:10:13 PM	BCl3 valve closed
8/1/2012	2:10:13 PM	PH3 valve closed
8/1/2012	2:10:13 PM	SiCl4 pre valve closed
8/1/2012	2:10:13 PM	SiCl4 post valve closed
8/1/2012	2:10:13 PM	Bypass valve closed
8/1/2012	2:10:13 PM	Bubbler valve closed
8/1/2012	2:10:13 PM	Main Vac valve opened
8/1/2012	2:10:13 PM	Helium MFC set to  0.000000
8/1/2012	2:10:13 PM	H2 MFC set to  0.000000
8/1/2012	2:10:13 PM	BCl3 MFC set to  0.000000
8/1/2012	2:10:13 PM	PH3 MFC set to  0.000000
8/1/2012	2:10:13 PM	SiCl4 MFC set to  0.000000
8/1/2012	2:10:13 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	2:10:13 PM	Tube furnace set to 150
8/1/2012	2:10:43 PM	H2 valve closed
8/1/2012	2:10:43 PM	BCl3 valve closed
8/1/2012	2:10:43 PM	PH3 valve closed
8/1/2012	2:10:43 PM	SiCl4 pre valve closed
8/1/2012	2:10:43 PM	SiCl4 post valve closed
8/1/2012	2:10:43 PM	Bypass valve closed
8/1/2012	2:10:43 PM	Bubbler valve closed
8/1/2012	2:10:43 PM	Helium valve opened
8/1/2012	2:10:43 PM	Main Vac valve opened
8/1/2012	2:10:43 PM	Helium MFC set to  20.000000
8/1/2012	2:10:43 PM	H2 MFC set to  0.000000
8/1/2012	2:10:43 PM	BCl3 MFC set to  0.000000
8/1/2012	2:10:43 PM	PH3 MFC set to  0.000000
8/1/2012	2:10:43 PM	SiCl4 MFC set to  0.000000
8/1/2012	2:10:43 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	2:10:43 PM	Tube furnace set to 150
8/1/2012	2:11:13 PM	Helium valve closed
8/1/2012	2:11:13 PM	H2 valve closed
8/1/2012	2:11:13 PM	BCl3 valve closed
8/1/2012	2:11:13 PM	PH3 valve closed
8/1/2012	2:11:13 PM	SiCl4 pre valve closed
8/1/2012	2:11:13 PM	SiCl4 post valve closed
8/1/2012	2:11:13 PM	Bypass valve closed
8/1/2012	2:11:13 PM	Bubbler valve closed
8/1/2012	2:11:13 PM	Main Vac valve opened
8/1/2012	2:11:13 PM	Helium MFC set to  0.000000
8/1/2012	2:11:13 PM	H2 MFC set to  0.000000
8/1/2012	2:11:13 PM	BCl3 MFC set to  0.000000
8/1/2012	2:11:13 PM	PH3 MFC set to  0.000000
8/1/2012	2:11:13 PM	SiCl4 MFC set to  0.000000
8/1/2012	2:11:13 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	2:11:14 PM	Tube furnace set to 150
8/1/2012	2:11:44 PM	H2 valve closed
8/1/2012	2:11:44 PM	BCl3 valve closed
8/1/2012	2:11:44 PM	PH3 valve closed
8/1/2012	2:11:44 PM	SiCl4 pre valve closed
8/1/2012	2:11:44 PM	SiCl4 post valve closed
8/1/2012	2:11:44 PM	Bypass valve closed
8/1/2012	2:11:44 PM	Bubbler valve closed
8/1/2012	2:11:44 PM	Helium valve opened
8/1/2012	2:11:44 PM	Main Vac valve opened
8/1/2012	2:11:44 PM	Helium MFC set to  20.000000
8/1/2012	2:11:44 PM	H2 MFC set to  0.000000
8/1/2012	2:11:44 PM	BCl3 MFC set to  0.000000
8/1/2012	2:11:44 PM	PH3 MFC set to  0.000000
8/1/2012	2:11:44 PM	SiCl4 MFC set to  0.000000
8/1/2012	2:11:44 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	2:11:44 PM	Tube furnace set to 150
8/1/2012	2:13:44 PM	Helium valve closed
8/1/2012	2:13:44 PM	H2 valve closed
8/1/2012	2:13:44 PM	BCl3 valve closed
8/1/2012	2:13:44 PM	PH3 valve closed
8/1/2012	2:13:44 PM	SiCl4 pre valve closed
8/1/2012	2:13:44 PM	SiCl4 post valve closed
8/1/2012	2:13:44 PM	Bypass valve closed
8/1/2012	2:13:44 PM	Bubbler valve closed
8/1/2012	2:13:44 PM	Main Vac valve opened
8/1/2012	2:13:44 PM	Helium MFC set to  0.000000
8/1/2012	2:13:44 PM	H2 MFC set to  0.000000
8/1/2012	2:13:44 PM	BCl3 MFC set to  0.000000
8/1/2012	2:13:44 PM	PH3 MFC set to  0.000000
8/1/2012	2:13:44 PM	SiCl4 MFC set to  0.000000
8/1/2012	2:13:44 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	2:13:44 PM	Tube furnace set to 150
8/1/2012	2:14:14 PM	H2 valve closed
8/1/2012	2:14:14 PM	BCl3 valve closed
8/1/2012	2:14:14 PM	PH3 valve closed
8/1/2012	2:14:14 PM	SiCl4 pre valve closed
8/1/2012	2:14:14 PM	SiCl4 post valve closed
8/1/2012	2:14:14 PM	Bypass valve closed
8/1/2012	2:14:14 PM	Bubbler valve closed
8/1/2012	2:14:14 PM	Helium valve opened
8/1/2012	2:14:14 PM	Main Vac valve opened
8/1/2012	2:14:14 PM	Helium MFC set to  20.000000
8/1/2012	2:14:14 PM	H2 MFC set to  0.000000
8/1/2012	2:14:14 PM	BCl3 MFC set to  0.000000
8/1/2012	2:14:14 PM	PH3 MFC set to  0.000000
8/1/2012	2:14:14 PM	SiCl4 MFC set to  0.000000
8/1/2012	2:14:14 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	2:14:14 PM	Tube furnace set to 150
8/1/2012	2:14:44 PM	Helium valve closed
8/1/2012	2:14:44 PM	H2 valve closed
8/1/2012	2:14:44 PM	BCl3 valve closed
8/1/2012	2:14:44 PM	PH3 valve closed
8/1/2012	2:14:44 PM	SiCl4 pre valve closed
8/1/2012	2:14:44 PM	SiCl4 post valve closed
8/1/2012	2:14:44 PM	Bypass valve closed
8/1/2012	2:14:44 PM	Bubbler valve closed
8/1/2012	2:14:44 PM	Main Vac valve opened
8/1/2012	2:14:44 PM	Helium MFC set to  0.000000
8/1/2012	2:14:44 PM	H2 MFC set to  0.000000
8/1/2012	2:14:44 PM	BCl3 MFC set to  0.000000
8/1/2012	2:14:44 PM	PH3 MFC set to  0.000000
8/1/2012	2:14:44 PM	SiCl4 MFC set to  0.000000
8/1/2012	2:14:44 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	2:14:45 PM	Tube furnace set to 150
8/1/2012	2:15:15 PM	H2 valve closed
8/1/2012	2:15:15 PM	BCl3 valve closed
8/1/2012	2:15:15 PM	PH3 valve closed
8/1/2012	2:15:15 PM	SiCl4 pre valve closed
8/1/2012	2:15:15 PM	SiCl4 post valve closed
8/1/2012	2:15:15 PM	Bypass valve closed
8/1/2012	2:15:15 PM	Bubbler valve closed
8/1/2012	2:15:15 PM	Helium valve opened
8/1/2012	2:15:15 PM	Main Vac valve opened
8/1/2012	2:15:15 PM	Helium MFC set to  20.000000
8/1/2012	2:15:15 PM	H2 MFC set to  0.000000
8/1/2012	2:15:15 PM	BCl3 MFC set to  0.000000
8/1/2012	2:15:15 PM	PH3 MFC set to  0.000000
8/1/2012	2:15:15 PM	SiCl4 MFC set to  0.000000
8/1/2012	2:15:15 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	2:15:15 PM	Tube furnace set to 150
8/1/2012	2:17:15 PM	Helium valve closed
8/1/2012	2:17:15 PM	H2 valve closed
8/1/2012	2:17:15 PM	BCl3 valve closed
8/1/2012	2:17:15 PM	PH3 valve closed
8/1/2012	2:17:15 PM	SiCl4 pre valve closed
8/1/2012	2:17:15 PM	SiCl4 post valve closed
8/1/2012	2:17:15 PM	Bypass valve closed
8/1/2012	2:17:15 PM	Bubbler valve closed
8/1/2012	2:17:15 PM	Main Vac valve opened
8/1/2012	2:17:15 PM	Helium MFC set to  0.000000
8/1/2012	2:17:15 PM	H2 MFC set to  0.000000
8/1/2012	2:17:15 PM	BCl3 MFC set to  0.000000
8/1/2012	2:17:15 PM	PH3 MFC set to  0.000000
8/1/2012	2:17:15 PM	SiCl4 MFC set to  0.000000
8/1/2012	2:17:15 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	2:17:15 PM	Tube furnace set to 150
8/1/2012	2:17:16 PM	Run finished at 2:17 PM
8/1/2012	2:29:14 PM	Recipe started at 2:29 PM
8/1/2012	2:29:14 PM	Helium valve closed
8/1/2012	2:29:14 PM	H2 valve closed
8/1/2012	2:29:14 PM	BCl3 valve closed
8/1/2012	2:29:14 PM	PH3 valve closed
8/1/2012	2:29:14 PM	SiCl4 pre valve closed
8/1/2012	2:29:14 PM	SiCl4 post valve closed
8/1/2012	2:29:14 PM	Bypass valve closed
8/1/2012	2:29:14 PM	Bubbler valve closed
8/1/2012	2:29:14 PM	Main Vac valve opened
8/1/2012	2:29:14 PM	Helium MFC set to  0.000000
8/1/2012	2:29:14 PM	H2 MFC set to  0.000000
8/1/2012	2:29:14 PM	BCl3 MFC set to  0.000000
8/1/2012	2:29:14 PM	PH3 MFC set to  0.000000
8/1/2012	2:29:14 PM	SiCl4 MFC set to  0.000000
8/1/2012	2:29:14 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	2:29:15 PM	Tube furnace set to 150
8/1/2012	2:29:45 PM	H2 valve closed
8/1/2012	2:29:45 PM	BCl3 valve closed
8/1/2012	2:29:45 PM	PH3 valve closed
8/1/2012	2:29:45 PM	SiCl4 pre valve closed
8/1/2012	2:29:45 PM	SiCl4 post valve closed
8/1/2012	2:29:45 PM	Bypass valve closed
8/1/2012	2:29:45 PM	Bubbler valve closed
8/1/2012	2:29:45 PM	Helium valve opened
8/1/2012	2:29:45 PM	Main Vac valve opened
8/1/2012	2:29:45 PM	Helium MFC set to  20.000000
8/1/2012	2:29:45 PM	H2 MFC set to  0.000000
8/1/2012	2:29:45 PM	BCl3 MFC set to  0.000000
8/1/2012	2:29:45 PM	PH3 MFC set to  0.000000
8/1/2012	2:29:45 PM	SiCl4 MFC set to  0.000000
8/1/2012	2:29:45 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	2:29:45 PM	Tube furnace set to 150
8/1/2012	2:30:15 PM	Helium valve closed
8/1/2012	2:30:15 PM	H2 valve closed
8/1/2012	2:30:15 PM	BCl3 valve closed
8/1/2012	2:30:15 PM	PH3 valve closed
8/1/2012	2:30:15 PM	SiCl4 pre valve closed
8/1/2012	2:30:15 PM	SiCl4 post valve closed
8/1/2012	2:30:15 PM	Bypass valve closed
8/1/2012	2:30:15 PM	Bubbler valve closed
8/1/2012	2:30:15 PM	Main Vac valve opened
8/1/2012	2:30:15 PM	Helium MFC set to  0.000000
8/1/2012	2:30:15 PM	H2 MFC set to  0.000000
8/1/2012	2:30:15 PM	BCl3 MFC set to  0.000000
8/1/2012	2:30:15 PM	PH3 MFC set to  0.000000
8/1/2012	2:30:15 PM	SiCl4 MFC set to  0.000000
8/1/2012	2:30:15 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	2:30:15 PM	Tube furnace set to 150
8/1/2012	2:30:45 PM	H2 valve closed
8/1/2012	2:30:45 PM	BCl3 valve closed
8/1/2012	2:30:45 PM	PH3 valve closed
8/1/2012	2:30:45 PM	SiCl4 pre valve closed
8/1/2012	2:30:45 PM	SiCl4 post valve closed
8/1/2012	2:30:45 PM	Bypass valve closed
8/1/2012	2:30:45 PM	Bubbler valve closed
8/1/2012	2:30:45 PM	Helium valve opened
8/1/2012	2:30:45 PM	Main Vac valve opened
8/1/2012	2:30:45 PM	Helium MFC set to  20.000000
8/1/2012	2:30:45 PM	H2 MFC set to  0.000000
8/1/2012	2:30:45 PM	BCl3 MFC set to  0.000000
8/1/2012	2:30:45 PM	PH3 MFC set to  0.000000
8/1/2012	2:30:45 PM	SiCl4 MFC set to  0.000000
8/1/2012	2:30:45 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	2:30:45 PM	Tube furnace set to 150
8/1/2012	2:31:15 PM	Helium valve closed
8/1/2012	2:31:15 PM	H2 valve closed
8/1/2012	2:31:15 PM	BCl3 valve closed
8/1/2012	2:31:15 PM	PH3 valve closed
8/1/2012	2:31:15 PM	SiCl4 pre valve closed
8/1/2012	2:31:15 PM	SiCl4 post valve closed
8/1/2012	2:31:15 PM	Bypass valve closed
8/1/2012	2:31:15 PM	Bubbler valve closed
8/1/2012	2:31:15 PM	Main Vac valve opened
8/1/2012	2:31:15 PM	Helium MFC set to  0.000000
8/1/2012	2:31:15 PM	H2 MFC set to  0.000000
8/1/2012	2:31:15 PM	BCl3 MFC set to  0.000000
8/1/2012	2:31:15 PM	PH3 MFC set to  0.000000
8/1/2012	2:31:15 PM	SiCl4 MFC set to  0.000000
8/1/2012	2:31:15 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	2:31:16 PM	Tube furnace set to 150
8/1/2012	2:31:46 PM	H2 valve closed
8/1/2012	2:31:46 PM	BCl3 valve closed
8/1/2012	2:31:46 PM	PH3 valve closed
8/1/2012	2:31:46 PM	SiCl4 pre valve closed
8/1/2012	2:31:46 PM	SiCl4 post valve closed
8/1/2012	2:31:46 PM	Bypass valve closed
8/1/2012	2:31:46 PM	Bubbler valve closed
8/1/2012	2:31:46 PM	Helium valve opened
8/1/2012	2:31:46 PM	Main Vac valve opened
8/1/2012	2:31:46 PM	Helium MFC set to  20.000000
8/1/2012	2:31:46 PM	H2 MFC set to  0.000000
8/1/2012	2:31:46 PM	BCl3 MFC set to  0.000000
8/1/2012	2:31:46 PM	PH3 MFC set to  0.000000
8/1/2012	2:31:46 PM	SiCl4 MFC set to  0.000000
8/1/2012	2:31:46 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	2:31:46 PM	Tube furnace set to 150
8/1/2012	2:33:46 PM	Helium valve closed
8/1/2012	2:33:46 PM	H2 valve closed
8/1/2012	2:33:46 PM	BCl3 valve closed
8/1/2012	2:33:46 PM	PH3 valve closed
8/1/2012	2:33:46 PM	SiCl4 pre valve closed
8/1/2012	2:33:46 PM	SiCl4 post valve closed
8/1/2012	2:33:46 PM	Bypass valve closed
8/1/2012	2:33:46 PM	Bubbler valve closed
8/1/2012	2:33:46 PM	Main Vac valve opened
8/1/2012	2:33:46 PM	Helium MFC set to  0.000000
8/1/2012	2:33:46 PM	H2 MFC set to  0.000000
8/1/2012	2:33:46 PM	BCl3 MFC set to  0.000000
8/1/2012	2:33:46 PM	PH3 MFC set to  0.000000
8/1/2012	2:33:46 PM	SiCl4 MFC set to  0.000000
8/1/2012	2:33:46 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	2:33:46 PM	Tube furnace set to 150
8/1/2012	2:34:16 PM	H2 valve closed
8/1/2012	2:34:16 PM	BCl3 valve closed
8/1/2012	2:34:16 PM	PH3 valve closed
8/1/2012	2:34:16 PM	SiCl4 pre valve closed
8/1/2012	2:34:16 PM	SiCl4 post valve closed
8/1/2012	2:34:16 PM	Bypass valve closed
8/1/2012	2:34:16 PM	Bubbler valve closed
8/1/2012	2:34:16 PM	Helium valve opened
8/1/2012	2:34:16 PM	Main Vac valve opened
8/1/2012	2:34:16 PM	Helium MFC set to  20.000000
8/1/2012	2:34:16 PM	H2 MFC set to  0.000000
8/1/2012	2:34:16 PM	BCl3 MFC set to  0.000000
8/1/2012	2:34:16 PM	PH3 MFC set to  0.000000
8/1/2012	2:34:16 PM	SiCl4 MFC set to  0.000000
8/1/2012	2:34:16 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	2:34:16 PM	Tube furnace set to 150
8/1/2012	2:34:46 PM	Helium valve closed
8/1/2012	2:34:46 PM	H2 valve closed
8/1/2012	2:34:46 PM	BCl3 valve closed
8/1/2012	2:34:46 PM	PH3 valve closed
8/1/2012	2:34:46 PM	SiCl4 pre valve closed
8/1/2012	2:34:46 PM	SiCl4 post valve closed
8/1/2012	2:34:46 PM	Bypass valve closed
8/1/2012	2:34:46 PM	Bubbler valve closed
8/1/2012	2:34:46 PM	Main Vac valve opened
8/1/2012	2:34:46 PM	Helium MFC set to  0.000000
8/1/2012	2:34:46 PM	H2 MFC set to  0.000000
8/1/2012	2:34:46 PM	BCl3 MFC set to  0.000000
8/1/2012	2:34:46 PM	PH3 MFC set to  0.000000
8/1/2012	2:34:46 PM	SiCl4 MFC set to  0.000000
8/1/2012	2:34:46 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	2:34:46 PM	Tube furnace set to 150
8/1/2012	2:35:16 PM	H2 valve closed
8/1/2012	2:35:17 PM	BCl3 valve closed
8/1/2012	2:35:17 PM	PH3 valve closed
8/1/2012	2:35:17 PM	SiCl4 pre valve closed
8/1/2012	2:35:17 PM	SiCl4 post valve closed
8/1/2012	2:35:17 PM	Bypass valve closed
8/1/2012	2:35:17 PM	Bubbler valve closed
8/1/2012	2:35:17 PM	Helium valve opened
8/1/2012	2:35:17 PM	Main Vac valve opened
8/1/2012	2:35:17 PM	Helium MFC set to  20.000000
8/1/2012	2:35:17 PM	H2 MFC set to  0.000000
8/1/2012	2:35:17 PM	BCl3 MFC set to  0.000000
8/1/2012	2:35:17 PM	PH3 MFC set to  0.000000
8/1/2012	2:35:17 PM	SiCl4 MFC set to  0.000000
8/1/2012	2:35:17 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	2:35:17 PM	Tube furnace set to 150
8/1/2012	2:35:47 PM	Helium valve closed
8/1/2012	2:35:47 PM	H2 valve closed
8/1/2012	2:35:47 PM	BCl3 valve closed
8/1/2012	2:35:47 PM	PH3 valve closed
8/1/2012	2:35:47 PM	SiCl4 pre valve closed
8/1/2012	2:35:47 PM	SiCl4 post valve closed
8/1/2012	2:35:47 PM	Bypass valve closed
8/1/2012	2:35:47 PM	Bubbler valve closed
8/1/2012	2:35:47 PM	Main Vac valve opened
8/1/2012	2:35:47 PM	Helium MFC set to  0.000000
8/1/2012	2:35:47 PM	H2 MFC set to  0.000000
8/1/2012	2:35:47 PM	BCl3 MFC set to  0.000000
8/1/2012	2:35:47 PM	PH3 MFC set to  0.000000
8/1/2012	2:35:47 PM	SiCl4 MFC set to  0.000000
8/1/2012	2:35:47 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	2:35:47 PM	Tube furnace set to 150
8/1/2012	2:36:17 PM	H2 valve closed
8/1/2012	2:36:17 PM	BCl3 valve closed
8/1/2012	2:36:17 PM	PH3 valve closed
8/1/2012	2:36:17 PM	SiCl4 pre valve closed
8/1/2012	2:36:17 PM	SiCl4 post valve closed
8/1/2012	2:36:17 PM	Bypass valve closed
8/1/2012	2:36:17 PM	Bubbler valve closed
8/1/2012	2:36:17 PM	Helium valve opened
8/1/2012	2:36:17 PM	Main Vac valve opened
8/1/2012	2:36:17 PM	Helium MFC set to  20.000000
8/1/2012	2:36:17 PM	H2 MFC set to  0.000000
8/1/2012	2:36:17 PM	BCl3 MFC set to  0.000000
8/1/2012	2:36:17 PM	PH3 MFC set to  0.000000
8/1/2012	2:36:17 PM	SiCl4 MFC set to  0.000000
8/1/2012	2:36:17 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	2:36:17 PM	Tube furnace set to 150
8/1/2012	2:38:17 PM	Helium valve closed
8/1/2012	2:38:17 PM	H2 valve closed
8/1/2012	2:38:17 PM	BCl3 valve closed
8/1/2012	2:38:17 PM	PH3 valve closed
8/1/2012	2:38:17 PM	SiCl4 pre valve closed
8/1/2012	2:38:17 PM	SiCl4 post valve closed
8/1/2012	2:38:17 PM	Bypass valve closed
8/1/2012	2:38:17 PM	Bubbler valve closed
8/1/2012	2:38:17 PM	Main Vac valve opened
8/1/2012	2:38:17 PM	Helium MFC set to  0.000000
8/1/2012	2:38:17 PM	H2 MFC set to  0.000000
8/1/2012	2:38:17 PM	BCl3 MFC set to  0.000000
8/1/2012	2:38:17 PM	PH3 MFC set to  0.000000
8/1/2012	2:38:17 PM	SiCl4 MFC set to  0.000000
8/1/2012	2:38:17 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	2:38:17 PM	Tube furnace set to 150
8/1/2012	2:38:47 PM	H2 valve closed
8/1/2012	2:38:47 PM	BCl3 valve closed
8/1/2012	2:38:47 PM	PH3 valve closed
8/1/2012	2:38:47 PM	SiCl4 pre valve closed
8/1/2012	2:38:47 PM	SiCl4 post valve closed
8/1/2012	2:38:47 PM	Bypass valve closed
8/1/2012	2:38:47 PM	Bubbler valve closed
8/1/2012	2:38:47 PM	Helium valve opened
8/1/2012	2:38:47 PM	Main Vac valve opened
8/1/2012	2:38:47 PM	Helium MFC set to  20.000000
8/1/2012	2:38:47 PM	H2 MFC set to  0.000000
8/1/2012	2:38:47 PM	BCl3 MFC set to  0.000000
8/1/2012	2:38:47 PM	PH3 MFC set to  0.000000
8/1/2012	2:38:47 PM	SiCl4 MFC set to  0.000000
8/1/2012	2:38:48 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	2:38:48 PM	Tube furnace set to 150
8/1/2012	2:39:18 PM	Helium valve closed
8/1/2012	2:39:18 PM	H2 valve closed
8/1/2012	2:39:18 PM	BCl3 valve closed
8/1/2012	2:39:18 PM	PH3 valve closed
8/1/2012	2:39:18 PM	SiCl4 pre valve closed
8/1/2012	2:39:18 PM	SiCl4 post valve closed
8/1/2012	2:39:18 PM	Bypass valve closed
8/1/2012	2:39:18 PM	Bubbler valve closed
8/1/2012	2:39:18 PM	Main Vac valve opened
8/1/2012	2:39:18 PM	Helium MFC set to  0.000000
8/1/2012	2:39:18 PM	H2 MFC set to  0.000000
8/1/2012	2:39:18 PM	BCl3 MFC set to  0.000000
8/1/2012	2:39:18 PM	PH3 MFC set to  0.000000
8/1/2012	2:39:18 PM	SiCl4 MFC set to  0.000000
8/1/2012	2:39:18 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	2:39:18 PM	Tube furnace set to 150
8/1/2012	2:39:48 PM	H2 valve closed
8/1/2012	2:39:48 PM	BCl3 valve closed
8/1/2012	2:39:48 PM	PH3 valve closed
8/1/2012	2:39:48 PM	SiCl4 pre valve closed
8/1/2012	2:39:48 PM	SiCl4 post valve closed
8/1/2012	2:39:48 PM	Bypass valve closed
8/1/2012	2:39:48 PM	Bubbler valve closed
8/1/2012	2:39:48 PM	Helium valve opened
8/1/2012	2:39:48 PM	Main Vac valve opened
8/1/2012	2:39:48 PM	Helium MFC set to  20.000000
8/1/2012	2:39:48 PM	H2 MFC set to  0.000000
8/1/2012	2:39:48 PM	BCl3 MFC set to  0.000000
8/1/2012	2:39:48 PM	PH3 MFC set to  0.000000
8/1/2012	2:39:48 PM	SiCl4 MFC set to  0.000000
8/1/2012	2:39:48 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	2:39:48 PM	Tube furnace set to 150
8/1/2012	2:41:48 PM	Helium valve closed
8/1/2012	2:41:48 PM	H2 valve closed
8/1/2012	2:41:48 PM	BCl3 valve closed
8/1/2012	2:41:48 PM	PH3 valve closed
8/1/2012	2:41:48 PM	SiCl4 pre valve closed
8/1/2012	2:41:48 PM	SiCl4 post valve closed
8/1/2012	2:41:48 PM	Bypass valve closed
8/1/2012	2:41:48 PM	Bubbler valve closed
8/1/2012	2:41:48 PM	Main Vac valve opened
8/1/2012	2:41:48 PM	Helium MFC set to  0.000000
8/1/2012	2:41:48 PM	H2 MFC set to  0.000000
8/1/2012	2:41:48 PM	BCl3 MFC set to  0.000000
8/1/2012	2:41:48 PM	PH3 MFC set to  0.000000
8/1/2012	2:41:48 PM	SiCl4 MFC set to  0.000000
8/1/2012	2:41:48 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	2:41:48 PM	Tube furnace set to 150
8/1/2012	2:42:18 PM	H2 valve closed
8/1/2012	2:42:18 PM	BCl3 valve closed
8/1/2012	2:42:18 PM	PH3 valve closed
8/1/2012	2:42:18 PM	SiCl4 pre valve closed
8/1/2012	2:42:18 PM	SiCl4 post valve closed
8/1/2012	2:42:18 PM	Bypass valve closed
8/1/2012	2:42:18 PM	Bubbler valve closed
8/1/2012	2:42:18 PM	Helium valve opened
8/1/2012	2:42:18 PM	Main Vac valve opened
8/1/2012	2:42:18 PM	Helium MFC set to  20.000000
8/1/2012	2:42:18 PM	H2 MFC set to  0.000000
8/1/2012	2:42:18 PM	BCl3 MFC set to  0.000000
8/1/2012	2:42:18 PM	PH3 MFC set to  0.000000
8/1/2012	2:42:18 PM	SiCl4 MFC set to  0.000000
8/1/2012	2:42:18 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	2:42:19 PM	Tube furnace set to 150
8/1/2012	2:42:49 PM	Helium valve closed
8/1/2012	2:42:49 PM	H2 valve closed
8/1/2012	2:42:49 PM	BCl3 valve closed
8/1/2012	2:42:49 PM	PH3 valve closed
8/1/2012	2:42:49 PM	SiCl4 pre valve closed
8/1/2012	2:42:49 PM	SiCl4 post valve closed
8/1/2012	2:42:49 PM	Bypass valve closed
8/1/2012	2:42:49 PM	Bubbler valve closed
8/1/2012	2:42:49 PM	Main Vac valve opened
8/1/2012	2:42:49 PM	Helium MFC set to  0.000000
8/1/2012	2:42:49 PM	H2 MFC set to  0.000000
8/1/2012	2:42:49 PM	BCl3 MFC set to  0.000000
8/1/2012	2:42:49 PM	PH3 MFC set to  0.000000
8/1/2012	2:42:49 PM	SiCl4 MFC set to  0.000000
8/1/2012	2:42:49 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	2:42:49 PM	Tube furnace set to 150
8/1/2012	2:43:19 PM	H2 valve closed
8/1/2012	2:43:19 PM	BCl3 valve closed
8/1/2012	2:43:19 PM	PH3 valve closed
8/1/2012	2:43:19 PM	SiCl4 pre valve closed
8/1/2012	2:43:19 PM	SiCl4 post valve closed
8/1/2012	2:43:19 PM	Bypass valve closed
8/1/2012	2:43:19 PM	Bubbler valve closed
8/1/2012	2:43:19 PM	Helium valve opened
8/1/2012	2:43:19 PM	Main Vac valve opened
8/1/2012	2:43:19 PM	Helium MFC set to  20.000000
8/1/2012	2:43:19 PM	H2 MFC set to  0.000000
8/1/2012	2:43:19 PM	BCl3 MFC set to  0.000000
8/1/2012	2:43:19 PM	PH3 MFC set to  0.000000
8/1/2012	2:43:19 PM	SiCl4 MFC set to  0.000000
8/1/2012	2:43:19 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	2:43:19 PM	Tube furnace set to 150
8/1/2012	2:45:19 PM	Helium valve closed
8/1/2012	2:45:19 PM	H2 valve closed
8/1/2012	2:45:19 PM	BCl3 valve closed
8/1/2012	2:45:19 PM	PH3 valve closed
8/1/2012	2:45:19 PM	SiCl4 pre valve closed
8/1/2012	2:45:19 PM	SiCl4 post valve closed
8/1/2012	2:45:19 PM	Bypass valve closed
8/1/2012	2:45:19 PM	Bubbler valve closed
8/1/2012	2:45:19 PM	Main Vac valve opened
8/1/2012	2:45:19 PM	Helium MFC set to  0.000000
8/1/2012	2:45:19 PM	H2 MFC set to  0.000000
8/1/2012	2:45:19 PM	BCl3 MFC set to  0.000000
8/1/2012	2:45:19 PM	PH3 MFC set to  0.000000
8/1/2012	2:45:19 PM	SiCl4 MFC set to  0.000000
8/1/2012	2:45:19 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	2:45:19 PM	Tube furnace set to 150
8/1/2012	2:45:20 PM	Run finished at 2:45 PM
8/1/2012	2:46:43 PM	Recipe started at 2:46 PM
8/1/2012	2:46:43 PM	Helium valve closed
8/1/2012	2:46:43 PM	H2 valve closed
8/1/2012	2:46:43 PM	BCl3 valve closed
8/1/2012	2:46:43 PM	PH3 valve closed
8/1/2012	2:46:43 PM	SiCl4 pre valve closed
8/1/2012	2:46:43 PM	SiCl4 post valve closed
8/1/2012	2:46:43 PM	Main Vac valve closed
8/1/2012	2:46:43 PM	Bypass valve closed
8/1/2012	2:46:43 PM	Bubbler valve closed
8/1/2012	2:46:43 PM	Helium MFC set to  0.000000
8/1/2012	2:46:43 PM	H2 MFC set to  0.000000
8/1/2012	2:46:43 PM	BCl3 MFC set to  0.000000
8/1/2012	2:46:43 PM	PH3 MFC set to  0.000000
8/1/2012	2:46:43 PM	SiCl4 MFC set to  0.000000
8/1/2012	2:46:43 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	2:46:43 PM	Tube furnace set to 0
8/1/2012	2:46:46 PM	Helium valve closed
8/1/2012	2:46:46 PM	BCl3 valve closed
8/1/2012	2:46:46 PM	PH3 valve closed
8/1/2012	2:46:46 PM	SiCl4 pre valve closed
8/1/2012	2:46:46 PM	SiCl4 post valve closed
8/1/2012	2:46:46 PM	Main Vac valve closed
8/1/2012	2:46:46 PM	Bypass valve closed
8/1/2012	2:46:46 PM	Bubbler valve closed
8/1/2012	2:46:46 PM	H2 valve opened
8/1/2012	2:46:46 PM	Helium MFC set to  0.000000
8/1/2012	2:46:46 PM	H2 MFC set to  500.000000
8/1/2012	2:46:47 PM	BCl3 MFC set to  0.000000
8/1/2012	2:46:47 PM	PH3 MFC set to  0.000000
8/1/2012	2:46:47 PM	SiCl4 MFC set to  0.000000
8/1/2012	2:46:47 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	2:46:47 PM	Tube furnace set to 0
8/1/2012	2:47:58 PM	Helium valve closed
8/1/2012	2:47:58 PM	BCl3 valve closed
8/1/2012	2:47:58 PM	PH3 valve closed
8/1/2012	2:47:58 PM	SiCl4 pre valve closed
8/1/2012	2:47:58 PM	SiCl4 post valve closed
8/1/2012	2:47:58 PM	Main Vac valve closed
8/1/2012	2:47:58 PM	Bypass valve closed
8/1/2012	2:47:58 PM	H2 valve opened
8/1/2012	2:47:58 PM	Bubbler valve opened
8/1/2012	2:47:58 PM	Helium MFC set to  0.000000
8/1/2012	2:47:58 PM	H2 MFC set to  500.000000
8/1/2012	2:47:58 PM	BCl3 MFC set to  0.000000
8/1/2012	2:47:58 PM	PH3 MFC set to  0.000000
8/1/2012	2:47:58 PM	SiCl4 MFC set to  0.000000
8/1/2012	2:47:58 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	2:47:59 PM	Tube furnace set to 0
8/1/2012	2:48:00 PM	Helium valve closed
8/1/2012	2:48:00 PM	BCl3 valve closed
8/1/2012	2:48:00 PM	PH3 valve closed
8/1/2012	2:48:00 PM	SiCl4 pre valve closed
8/1/2012	2:48:00 PM	SiCl4 post valve closed
8/1/2012	2:48:00 PM	Main Vac valve closed
8/1/2012	2:48:00 PM	Bypass valve closed
8/1/2012	2:48:00 PM	H2 valve opened
8/1/2012	2:48:00 PM	Bubbler valve opened
8/1/2012	2:48:00 PM	Helium MFC set to  0.000000
8/1/2012	2:48:00 PM	H2 MFC set to  500.000000
8/1/2012	2:48:00 PM	BCl3 MFC set to  0.000000
8/1/2012	2:48:00 PM	PH3 MFC set to  0.000000
8/1/2012	2:48:00 PM	SiCl4 MFC set to  0.000000
8/1/2012	2:48:00 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	2:48:00 PM	Tube furnace set to 1000
8/1/2012	3:08:00 PM	Helium valve closed
8/1/2012	3:08:00 PM	BCl3 valve closed
8/1/2012	3:08:00 PM	Main Vac valve closed
8/1/2012	3:08:00 PM	Bypass valve closed
8/1/2012	3:08:00 PM	H2 valve opened
8/1/2012	3:08:00 PM	PH3 valve opened
8/1/2012	3:08:00 PM	SiCl4 pre valve opened
8/1/2012	3:08:00 PM	SiCl4 post valve opened
8/1/2012	3:08:00 PM	Bubbler valve opened
8/1/2012	3:08:00 PM	Helium MFC set to  0.000000
8/1/2012	3:08:00 PM	H2 MFC set to  500.000000
8/1/2012	3:08:00 PM	BCl3 MFC set to  0.000000
8/1/2012	3:08:00 PM	PH3 MFC set to  0.300000
8/1/2012	3:08:00 PM	SiCl4 MFC set to  25.000000
8/1/2012	3:08:00 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	3:08:00 PM	Tube furnace set to 1000
8/1/2012	3:20:00 PM	Helium valve closed
8/1/2012	3:20:00 PM	BCl3 valve closed
8/1/2012	3:20:00 PM	PH3 valve closed
8/1/2012	3:20:00 PM	SiCl4 pre valve closed
8/1/2012	3:20:00 PM	SiCl4 post valve closed
8/1/2012	3:20:00 PM	Main Vac valve closed
8/1/2012	3:20:00 PM	Bypass valve closed
8/1/2012	3:20:00 PM	H2 valve opened
8/1/2012	3:20:00 PM	Bubbler valve opened
8/1/2012	3:20:00 PM	Helium MFC set to  0.000000
8/1/2012	3:20:00 PM	H2 MFC set to  500.000000
8/1/2012	3:20:00 PM	BCl3 MFC set to  0.000000
8/1/2012	3:20:00 PM	PH3 MFC set to  0.000000
8/1/2012	3:20:00 PM	SiCl4 MFC set to  0.000000
8/1/2012	3:20:00 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	3:20:00 PM	Tube furnace set to 750
8/1/2012	3:25:00 PM	H2 valve closed
8/1/2012	3:25:00 PM	BCl3 valve closed
8/1/2012	3:25:00 PM	PH3 valve closed
8/1/2012	3:25:00 PM	SiCl4 pre valve closed
8/1/2012	3:25:00 PM	SiCl4 post valve closed
8/1/2012	3:25:00 PM	Main Vac valve closed
8/1/2012	3:25:00 PM	Bypass valve closed
8/1/2012	3:25:00 PM	Helium valve opened
8/1/2012	3:25:00 PM	Bubbler valve opened
8/1/2012	3:25:00 PM	Helium MFC set to  500.000000
8/1/2012	3:25:00 PM	H2 MFC set to  0.000000
8/1/2012	3:25:00 PM	BCl3 MFC set to  0.000000
8/1/2012	3:25:00 PM	PH3 MFC set to  0.000000
8/1/2012	3:25:00 PM	SiCl4 MFC set to  0.000000
8/1/2012	3:25:00 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	3:25:00 PM	Tube furnace set to 0
8/1/2012	3:45:00 PM	Helium valve closed
8/1/2012	3:45:00 PM	H2 valve closed
8/1/2012	3:45:00 PM	BCl3 valve closed
8/1/2012	3:45:00 PM	PH3 valve closed
8/1/2012	3:45:00 PM	SiCl4 pre valve closed
8/1/2012	3:45:00 PM	SiCl4 post valve closed
8/1/2012	3:45:00 PM	Main Vac valve closed
8/1/2012	3:45:00 PM	Bypass valve closed
8/1/2012	3:45:00 PM	Bubbler valve closed
8/1/2012	3:45:00 PM	Helium MFC set to  0.000000
8/1/2012	3:45:00 PM	H2 MFC set to  0.000000
8/1/2012	3:45:00 PM	BCl3 MFC set to  0.000000
8/1/2012	3:45:00 PM	PH3 MFC set to  0.000000
8/1/2012	3:45:00 PM	SiCl4 MFC set to  0.000000
8/1/2012	3:45:00 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	3:45:01 PM	Tube furnace set to 0
8/1/2012	3:45:02 PM	Run finished at 3:45 PM
8/1/2012	3:50:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/1/2012	3:50:59 PM	Recipe started at 3:50 PM
8/1/2012	3:50:59 PM	Helium valve closed
8/1/2012	3:50:59 PM	H2 valve closed
8/1/2012	3:50:59 PM	BCl3 valve closed
8/1/2012	3:50:59 PM	PH3 valve closed
8/1/2012	3:50:59 PM	SiCl4 pre valve closed
8/1/2012	3:50:59 PM	SiCl4 post valve closed
8/1/2012	3:50:59 PM	Main Vac valve closed
8/1/2012	3:50:59 PM	Bypass valve closed
8/1/2012	3:50:59 PM	Bubbler valve closed
8/1/2012	3:50:59 PM	Helium MFC set to  0.000000
8/1/2012	3:50:59 PM	H2 MFC set to  0.000000
8/1/2012	3:50:59 PM	BCl3 MFC set to  0.000000
8/1/2012	3:50:59 PM	PH3 MFC set to  0.000000
8/1/2012	3:50:59 PM	SiCl4 MFC set to  0.000000
8/1/2012	3:50:59 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	3:50:59 PM	Tube furnace set to 0
8/1/2012	3:51:02 PM	H2 valve closed
8/1/2012	3:51:02 PM	BCl3 valve closed
8/1/2012	3:51:02 PM	PH3 valve closed
8/1/2012	3:51:02 PM	SiCl4 pre valve closed
8/1/2012	3:51:02 PM	SiCl4 post valve closed
8/1/2012	3:51:02 PM	Main Vac valve closed
8/1/2012	3:51:02 PM	Bypass valve closed
8/1/2012	3:51:02 PM	Bubbler valve closed
8/1/2012	3:51:02 PM	Helium valve opened
8/1/2012	3:51:02 PM	Helium MFC set to  500.000000
8/1/2012	3:51:02 PM	H2 MFC set to  0.000000
8/1/2012	3:51:02 PM	BCl3 MFC set to  0.000000
8/1/2012	3:51:02 PM	PH3 MFC set to  0.000000
8/1/2012	3:51:02 PM	SiCl4 MFC set to  0.000000
8/1/2012	3:51:02 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	3:51:02 PM	Tube furnace set to 0
8/1/2012	3:51:03 PM	Helium valve closed
8/1/2012	3:51:03 PM	H2 valve closed
8/1/2012	3:51:03 PM	BCl3 valve closed
8/1/2012	3:51:03 PM	PH3 valve closed
8/1/2012	3:51:03 PM	SiCl4 pre valve closed
8/1/2012	3:51:03 PM	SiCl4 post valve closed
8/1/2012	3:51:03 PM	Main Vac valve closed
8/1/2012	3:51:03 PM	Bypass valve closed
8/1/2012	3:51:03 PM	Bubbler valve closed
8/1/2012	3:51:03 PM	Helium MFC set to  0.000000
8/1/2012	3:51:03 PM	H2 MFC set to  0.000000
8/1/2012	3:51:03 PM	BCl3 MFC set to  0.000000
8/1/2012	3:51:03 PM	PH3 MFC set to  0.000000
8/1/2012	3:51:03 PM	SiCl4 MFC set to  0.000000
8/1/2012	3:51:03 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	3:51:03 PM	Tube furnace set to 0
8/1/2012	3:51:04 PM	Run finished at 3:51 PM
8/1/2012	3:51:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/1/2012	3:56:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/1/2012	3:56:27 PM	Recipe started at 3:56 PM
8/1/2012	3:56:27 PM	Helium valve closed
8/1/2012	3:56:27 PM	H2 valve closed
8/1/2012	3:56:27 PM	BCl3 valve closed
8/1/2012	3:56:27 PM	PH3 valve closed
8/1/2012	3:56:27 PM	SiCl4 pre valve closed
8/1/2012	3:56:27 PM	SiCl4 post valve closed
8/1/2012	3:56:27 PM	Main Vac valve closed
8/1/2012	3:56:27 PM	Bubbler valve closed
8/1/2012	3:56:27 PM	Bypass valve opened
8/1/2012	3:56:27 PM	Helium MFC set to  0.000000
8/1/2012	3:56:27 PM	H2 MFC set to  0.000000
8/1/2012	3:56:27 PM	BCl3 MFC set to  0.000000
8/1/2012	3:56:27 PM	PH3 MFC set to  0.000000
8/1/2012	3:56:27 PM	SiCl4 MFC set to  0.000000
8/1/2012	3:56:27 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	3:56:27 PM	Tube furnace set to 0
8/1/2012	3:57:36 PM	Helium valve closed
8/1/2012	3:57:36 PM	H2 valve closed
8/1/2012	3:57:36 PM	BCl3 valve closed
8/1/2012	3:57:36 PM	PH3 valve closed
8/1/2012	3:57:36 PM	SiCl4 pre valve closed
8/1/2012	3:57:36 PM	SiCl4 post valve closed
8/1/2012	3:57:36 PM	Main Vac valve closed
8/1/2012	3:57:36 PM	Bubbler valve closed
8/1/2012	3:57:36 PM	Bypass valve opened
8/1/2012	3:57:36 PM	Helium MFC set to  0.000000
8/1/2012	3:57:36 PM	H2 MFC set to  0.000000
8/1/2012	3:57:36 PM	BCl3 MFC set to  0.000000
8/1/2012	3:57:36 PM	PH3 MFC set to  0.000000
8/1/2012	3:57:36 PM	SiCl4 MFC set to  0.000000
8/1/2012	3:57:36 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	3:57:37 PM	Tube furnace set to 0
8/1/2012	3:58:37 PM	Helium valve closed
8/1/2012	3:58:37 PM	H2 valve closed
8/1/2012	3:58:37 PM	BCl3 valve closed
8/1/2012	3:58:37 PM	PH3 valve closed
8/1/2012	3:58:37 PM	SiCl4 pre valve closed
8/1/2012	3:58:37 PM	SiCl4 post valve closed
8/1/2012	3:58:37 PM	Bypass valve closed
8/1/2012	3:58:37 PM	Bubbler valve closed
8/1/2012	3:58:37 PM	Main Vac valve opened
8/1/2012	3:58:37 PM	Helium MFC set to  0.000000
8/1/2012	3:58:37 PM	H2 MFC set to  0.000000
8/1/2012	3:58:37 PM	BCl3 MFC set to  0.000000
8/1/2012	3:58:37 PM	PH3 MFC set to  0.000000
8/1/2012	3:58:37 PM	SiCl4 MFC set to  0.000000
8/1/2012	3:58:37 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	3:58:37 PM	Tube furnace set to 0
8/1/2012	3:58:38 PM	Run finished at 3:58 PM
8/1/2012	3:58:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/1/2012	4:00:09 PM	Recipe started at 4:00 PM
8/1/2012	4:00:09 PM	Helium valve closed
8/1/2012	4:00:09 PM	H2 valve closed
8/1/2012	4:00:09 PM	BCl3 valve closed
8/1/2012	4:00:09 PM	PH3 valve closed
8/1/2012	4:00:09 PM	SiCl4 pre valve closed
8/1/2012	4:00:09 PM	SiCl4 post valve closed
8/1/2012	4:00:09 PM	Bypass valve closed
8/1/2012	4:00:09 PM	Bubbler valve closed
8/1/2012	4:00:09 PM	Main Vac valve opened
8/1/2012	4:00:09 PM	Helium MFC set to  0.000000
8/1/2012	4:00:09 PM	H2 MFC set to  0.000000
8/1/2012	4:00:09 PM	BCl3 MFC set to  0.000000
8/1/2012	4:00:09 PM	PH3 MFC set to  0.000000
8/1/2012	4:00:09 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:00:09 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:00:09 PM	Tube furnace set to 150
8/1/2012	4:00:39 PM	H2 valve closed
8/1/2012	4:00:39 PM	BCl3 valve closed
8/1/2012	4:00:39 PM	PH3 valve closed
8/1/2012	4:00:39 PM	SiCl4 pre valve closed
8/1/2012	4:00:40 PM	SiCl4 post valve closed
8/1/2012	4:00:40 PM	Bypass valve closed
8/1/2012	4:00:40 PM	Bubbler valve closed
8/1/2012	4:00:40 PM	Helium valve opened
8/1/2012	4:00:40 PM	Main Vac valve opened
8/1/2012	4:00:40 PM	Helium MFC set to  20.000000
8/1/2012	4:00:40 PM	H2 MFC set to  0.000000
8/1/2012	4:00:40 PM	BCl3 MFC set to  0.000000
8/1/2012	4:00:40 PM	PH3 MFC set to  0.000000
8/1/2012	4:00:40 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:00:40 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:00:40 PM	Tube furnace set to 150
8/1/2012	4:01:10 PM	Helium valve closed
8/1/2012	4:01:10 PM	H2 valve closed
8/1/2012	4:01:10 PM	BCl3 valve closed
8/1/2012	4:01:10 PM	PH3 valve closed
8/1/2012	4:01:10 PM	SiCl4 pre valve closed
8/1/2012	4:01:10 PM	SiCl4 post valve closed
8/1/2012	4:01:10 PM	Bypass valve closed
8/1/2012	4:01:10 PM	Bubbler valve closed
8/1/2012	4:01:10 PM	Main Vac valve opened
8/1/2012	4:01:10 PM	Helium MFC set to  0.000000
8/1/2012	4:01:10 PM	H2 MFC set to  0.000000
8/1/2012	4:01:10 PM	BCl3 MFC set to  0.000000
8/1/2012	4:01:10 PM	PH3 MFC set to  0.000000
8/1/2012	4:01:10 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:01:10 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:01:10 PM	Tube furnace set to 150
8/1/2012	4:01:40 PM	H2 valve closed
8/1/2012	4:01:40 PM	BCl3 valve closed
8/1/2012	4:01:40 PM	PH3 valve closed
8/1/2012	4:01:40 PM	SiCl4 pre valve closed
8/1/2012	4:01:40 PM	SiCl4 post valve closed
8/1/2012	4:01:40 PM	Bypass valve closed
8/1/2012	4:01:40 PM	Bubbler valve closed
8/1/2012	4:01:40 PM	Helium valve opened
8/1/2012	4:01:40 PM	Main Vac valve opened
8/1/2012	4:01:40 PM	Helium MFC set to  20.000000
8/1/2012	4:01:40 PM	H2 MFC set to  0.000000
8/1/2012	4:01:40 PM	BCl3 MFC set to  0.000000
8/1/2012	4:01:40 PM	PH3 MFC set to  0.000000
8/1/2012	4:01:40 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:01:40 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:01:40 PM	Tube furnace set to 150
8/1/2012	4:02:10 PM	Helium valve closed
8/1/2012	4:02:10 PM	H2 valve closed
8/1/2012	4:02:10 PM	BCl3 valve closed
8/1/2012	4:02:10 PM	PH3 valve closed
8/1/2012	4:02:10 PM	SiCl4 pre valve closed
8/1/2012	4:02:10 PM	SiCl4 post valve closed
8/1/2012	4:02:10 PM	Bypass valve closed
8/1/2012	4:02:10 PM	Bubbler valve closed
8/1/2012	4:02:10 PM	Main Vac valve opened
8/1/2012	4:02:10 PM	Helium MFC set to  0.000000
8/1/2012	4:02:10 PM	H2 MFC set to  0.000000
8/1/2012	4:02:10 PM	BCl3 MFC set to  0.000000
8/1/2012	4:02:10 PM	PH3 MFC set to  0.000000
8/1/2012	4:02:10 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:02:10 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:02:10 PM	Tube furnace set to 150
8/1/2012	4:02:40 PM	H2 valve closed
8/1/2012	4:02:40 PM	BCl3 valve closed
8/1/2012	4:02:40 PM	PH3 valve closed
8/1/2012	4:02:40 PM	SiCl4 pre valve closed
8/1/2012	4:02:40 PM	SiCl4 post valve closed
8/1/2012	4:02:40 PM	Bypass valve closed
8/1/2012	4:02:40 PM	Bubbler valve closed
8/1/2012	4:02:40 PM	Helium valve opened
8/1/2012	4:02:40 PM	Main Vac valve opened
8/1/2012	4:02:40 PM	Helium MFC set to  20.000000
8/1/2012	4:02:40 PM	H2 MFC set to  0.000000
8/1/2012	4:02:40 PM	BCl3 MFC set to  0.000000
8/1/2012	4:02:40 PM	PH3 MFC set to  0.000000
8/1/2012	4:02:40 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:02:40 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:02:41 PM	Tube furnace set to 150
8/1/2012	4:04:41 PM	Helium valve closed
8/1/2012	4:04:41 PM	H2 valve closed
8/1/2012	4:04:41 PM	BCl3 valve closed
8/1/2012	4:04:41 PM	PH3 valve closed
8/1/2012	4:04:41 PM	SiCl4 pre valve closed
8/1/2012	4:04:41 PM	SiCl4 post valve closed
8/1/2012	4:04:41 PM	Bypass valve closed
8/1/2012	4:04:41 PM	Bubbler valve closed
8/1/2012	4:04:41 PM	Main Vac valve opened
8/1/2012	4:04:41 PM	Helium MFC set to  0.000000
8/1/2012	4:04:41 PM	H2 MFC set to  0.000000
8/1/2012	4:04:41 PM	BCl3 MFC set to  0.000000
8/1/2012	4:04:41 PM	PH3 MFC set to  0.000000
8/1/2012	4:04:41 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:04:41 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:04:41 PM	Tube furnace set to 150
8/1/2012	4:05:11 PM	H2 valve closed
8/1/2012	4:05:11 PM	BCl3 valve closed
8/1/2012	4:05:11 PM	PH3 valve closed
8/1/2012	4:05:11 PM	SiCl4 pre valve closed
8/1/2012	4:05:11 PM	SiCl4 post valve closed
8/1/2012	4:05:11 PM	Bypass valve closed
8/1/2012	4:05:11 PM	Bubbler valve closed
8/1/2012	4:05:11 PM	Helium valve opened
8/1/2012	4:05:11 PM	Main Vac valve opened
8/1/2012	4:05:11 PM	Helium MFC set to  20.000000
8/1/2012	4:05:11 PM	H2 MFC set to  0.000000
8/1/2012	4:05:11 PM	BCl3 MFC set to  0.000000
8/1/2012	4:05:11 PM	PH3 MFC set to  0.000000
8/1/2012	4:05:11 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:05:11 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:05:11 PM	Tube furnace set to 150
8/1/2012	4:05:41 PM	Helium valve closed
8/1/2012	4:05:41 PM	H2 valve closed
8/1/2012	4:05:41 PM	BCl3 valve closed
8/1/2012	4:05:41 PM	PH3 valve closed
8/1/2012	4:05:41 PM	SiCl4 pre valve closed
8/1/2012	4:05:41 PM	SiCl4 post valve closed
8/1/2012	4:05:41 PM	Bypass valve closed
8/1/2012	4:05:41 PM	Bubbler valve closed
8/1/2012	4:05:41 PM	Main Vac valve opened
8/1/2012	4:05:41 PM	Helium MFC set to  0.000000
8/1/2012	4:05:41 PM	H2 MFC set to  0.000000
8/1/2012	4:05:41 PM	BCl3 MFC set to  0.000000
8/1/2012	4:05:41 PM	PH3 MFC set to  0.000000
8/1/2012	4:05:41 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:05:41 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:05:41 PM	Tube furnace set to 150
8/1/2012	4:06:11 PM	H2 valve closed
8/1/2012	4:06:11 PM	BCl3 valve closed
8/1/2012	4:06:11 PM	PH3 valve closed
8/1/2012	4:06:11 PM	SiCl4 pre valve closed
8/1/2012	4:06:11 PM	SiCl4 post valve closed
8/1/2012	4:06:11 PM	Bypass valve closed
8/1/2012	4:06:11 PM	Bubbler valve closed
8/1/2012	4:06:11 PM	Helium valve opened
8/1/2012	4:06:11 PM	Main Vac valve opened
8/1/2012	4:06:11 PM	Helium MFC set to  20.000000
8/1/2012	4:06:11 PM	H2 MFC set to  0.000000
8/1/2012	4:06:11 PM	BCl3 MFC set to  0.000000
8/1/2012	4:06:11 PM	PH3 MFC set to  0.000000
8/1/2012	4:06:11 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:06:11 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:06:12 PM	Tube furnace set to 150
8/1/2012	4:06:42 PM	Helium valve closed
8/1/2012	4:06:42 PM	H2 valve closed
8/1/2012	4:06:42 PM	BCl3 valve closed
8/1/2012	4:06:42 PM	PH3 valve closed
8/1/2012	4:06:42 PM	SiCl4 pre valve closed
8/1/2012	4:06:42 PM	SiCl4 post valve closed
8/1/2012	4:06:42 PM	Bypass valve closed
8/1/2012	4:06:42 PM	Bubbler valve closed
8/1/2012	4:06:42 PM	Main Vac valve opened
8/1/2012	4:06:42 PM	Helium MFC set to  0.000000
8/1/2012	4:06:42 PM	H2 MFC set to  0.000000
8/1/2012	4:06:42 PM	BCl3 MFC set to  0.000000
8/1/2012	4:06:42 PM	PH3 MFC set to  0.000000
8/1/2012	4:06:42 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:06:42 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:06:42 PM	Tube furnace set to 150
8/1/2012	4:07:12 PM	H2 valve closed
8/1/2012	4:07:12 PM	BCl3 valve closed
8/1/2012	4:07:12 PM	PH3 valve closed
8/1/2012	4:07:12 PM	SiCl4 pre valve closed
8/1/2012	4:07:12 PM	SiCl4 post valve closed
8/1/2012	4:07:12 PM	Bypass valve closed
8/1/2012	4:07:12 PM	Bubbler valve closed
8/1/2012	4:07:12 PM	Helium valve opened
8/1/2012	4:07:12 PM	Main Vac valve opened
8/1/2012	4:07:12 PM	Helium MFC set to  20.000000
8/1/2012	4:07:12 PM	H2 MFC set to  0.000000
8/1/2012	4:07:12 PM	BCl3 MFC set to  0.000000
8/1/2012	4:07:12 PM	PH3 MFC set to  0.000000
8/1/2012	4:07:12 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:07:12 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:07:12 PM	Tube furnace set to 150
8/1/2012	4:09:12 PM	Helium valve closed
8/1/2012	4:09:12 PM	H2 valve closed
8/1/2012	4:09:12 PM	BCl3 valve closed
8/1/2012	4:09:12 PM	PH3 valve closed
8/1/2012	4:09:12 PM	SiCl4 pre valve closed
8/1/2012	4:09:12 PM	SiCl4 post valve closed
8/1/2012	4:09:12 PM	Bypass valve closed
8/1/2012	4:09:12 PM	Bubbler valve closed
8/1/2012	4:09:12 PM	Main Vac valve opened
8/1/2012	4:09:12 PM	Helium MFC set to  0.000000
8/1/2012	4:09:12 PM	H2 MFC set to  0.000000
8/1/2012	4:09:12 PM	BCl3 MFC set to  0.000000
8/1/2012	4:09:12 PM	PH3 MFC set to  0.000000
8/1/2012	4:09:12 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:09:12 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:09:12 PM	Tube furnace set to 150
8/1/2012	4:09:42 PM	H2 valve closed
8/1/2012	4:09:42 PM	BCl3 valve closed
8/1/2012	4:09:42 PM	PH3 valve closed
8/1/2012	4:09:42 PM	SiCl4 pre valve closed
8/1/2012	4:09:42 PM	SiCl4 post valve closed
8/1/2012	4:09:42 PM	Bypass valve closed
8/1/2012	4:09:42 PM	Bubbler valve closed
8/1/2012	4:09:42 PM	Helium valve opened
8/1/2012	4:09:42 PM	Main Vac valve opened
8/1/2012	4:09:42 PM	Helium MFC set to  20.000000
8/1/2012	4:09:42 PM	H2 MFC set to  0.000000
8/1/2012	4:09:42 PM	BCl3 MFC set to  0.000000
8/1/2012	4:09:42 PM	PH3 MFC set to  0.000000
8/1/2012	4:09:42 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:09:42 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:09:43 PM	Tube furnace set to 150
8/1/2012	4:10:13 PM	Helium valve closed
8/1/2012	4:10:13 PM	H2 valve closed
8/1/2012	4:10:13 PM	BCl3 valve closed
8/1/2012	4:10:13 PM	PH3 valve closed
8/1/2012	4:10:13 PM	SiCl4 pre valve closed
8/1/2012	4:10:13 PM	SiCl4 post valve closed
8/1/2012	4:10:13 PM	Bypass valve closed
8/1/2012	4:10:13 PM	Bubbler valve closed
8/1/2012	4:10:13 PM	Main Vac valve opened
8/1/2012	4:10:13 PM	Helium MFC set to  0.000000
8/1/2012	4:10:13 PM	H2 MFC set to  0.000000
8/1/2012	4:10:13 PM	BCl3 MFC set to  0.000000
8/1/2012	4:10:13 PM	PH3 MFC set to  0.000000
8/1/2012	4:10:13 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:10:13 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:10:13 PM	Tube furnace set to 150
8/1/2012	4:10:43 PM	H2 valve closed
8/1/2012	4:10:43 PM	BCl3 valve closed
8/1/2012	4:10:43 PM	PH3 valve closed
8/1/2012	4:10:43 PM	SiCl4 pre valve closed
8/1/2012	4:10:43 PM	SiCl4 post valve closed
8/1/2012	4:10:43 PM	Bypass valve closed
8/1/2012	4:10:43 PM	Bubbler valve closed
8/1/2012	4:10:43 PM	Helium valve opened
8/1/2012	4:10:43 PM	Main Vac valve opened
8/1/2012	4:10:43 PM	Helium MFC set to  20.000000
8/1/2012	4:10:43 PM	H2 MFC set to  0.000000
8/1/2012	4:10:43 PM	BCl3 MFC set to  0.000000
8/1/2012	4:10:43 PM	PH3 MFC set to  0.000000
8/1/2012	4:10:43 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:10:43 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:10:43 PM	Tube furnace set to 150
8/1/2012	4:12:43 PM	Helium valve closed
8/1/2012	4:12:43 PM	H2 valve closed
8/1/2012	4:12:43 PM	BCl3 valve closed
8/1/2012	4:12:43 PM	PH3 valve closed
8/1/2012	4:12:43 PM	SiCl4 pre valve closed
8/1/2012	4:12:43 PM	SiCl4 post valve closed
8/1/2012	4:12:43 PM	Bypass valve closed
8/1/2012	4:12:43 PM	Bubbler valve closed
8/1/2012	4:12:43 PM	Main Vac valve opened
8/1/2012	4:12:43 PM	Helium MFC set to  0.000000
8/1/2012	4:12:43 PM	H2 MFC set to  0.000000
8/1/2012	4:12:43 PM	BCl3 MFC set to  0.000000
8/1/2012	4:12:43 PM	PH3 MFC set to  0.000000
8/1/2012	4:12:43 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:12:43 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:12:43 PM	Tube furnace set to 150
8/1/2012	4:13:13 PM	H2 valve closed
8/1/2012	4:13:13 PM	BCl3 valve closed
8/1/2012	4:13:13 PM	PH3 valve closed
8/1/2012	4:13:13 PM	SiCl4 pre valve closed
8/1/2012	4:13:13 PM	SiCl4 post valve closed
8/1/2012	4:13:13 PM	Bypass valve closed
8/1/2012	4:13:13 PM	Bubbler valve closed
8/1/2012	4:13:13 PM	Helium valve opened
8/1/2012	4:13:13 PM	Main Vac valve opened
8/1/2012	4:13:13 PM	Helium MFC set to  20.000000
8/1/2012	4:13:13 PM	H2 MFC set to  0.000000
8/1/2012	4:13:13 PM	BCl3 MFC set to  0.000000
8/1/2012	4:13:13 PM	PH3 MFC set to  0.000000
8/1/2012	4:13:13 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:13:13 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:13:13 PM	Tube furnace set to 150
8/1/2012	4:15:14 PM	Helium valve closed
8/1/2012	4:15:14 PM	H2 valve closed
8/1/2012	4:15:14 PM	BCl3 valve closed
8/1/2012	4:15:14 PM	PH3 valve closed
8/1/2012	4:15:14 PM	SiCl4 pre valve closed
8/1/2012	4:15:14 PM	SiCl4 post valve closed
8/1/2012	4:15:14 PM	Bypass valve closed
8/1/2012	4:15:14 PM	Bubbler valve closed
8/1/2012	4:15:14 PM	Main Vac valve opened
8/1/2012	4:15:14 PM	Helium MFC set to  0.000000
8/1/2012	4:15:14 PM	H2 MFC set to  0.000000
8/1/2012	4:15:14 PM	BCl3 MFC set to  0.000000
8/1/2012	4:15:14 PM	PH3 MFC set to  0.000000
8/1/2012	4:15:14 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:15:14 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:15:14 PM	Tube furnace set to 150
8/1/2012	4:15:44 PM	H2 valve closed
8/1/2012	4:15:44 PM	BCl3 valve closed
8/1/2012	4:15:44 PM	PH3 valve closed
8/1/2012	4:15:44 PM	SiCl4 pre valve closed
8/1/2012	4:15:44 PM	SiCl4 post valve closed
8/1/2012	4:15:44 PM	Bypass valve closed
8/1/2012	4:15:44 PM	Bubbler valve closed
8/1/2012	4:15:44 PM	Helium valve opened
8/1/2012	4:15:44 PM	Main Vac valve opened
8/1/2012	4:15:44 PM	Helium MFC set to  20.000000
8/1/2012	4:15:44 PM	H2 MFC set to  0.000000
8/1/2012	4:15:44 PM	BCl3 MFC set to  0.000000
8/1/2012	4:15:44 PM	PH3 MFC set to  0.000000
8/1/2012	4:15:44 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:15:44 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:15:44 PM	Tube furnace set to 150
8/1/2012	4:17:44 PM	Helium valve closed
8/1/2012	4:17:44 PM	H2 valve closed
8/1/2012	4:17:44 PM	BCl3 valve closed
8/1/2012	4:17:44 PM	PH3 valve closed
8/1/2012	4:17:44 PM	SiCl4 pre valve closed
8/1/2012	4:17:44 PM	SiCl4 post valve closed
8/1/2012	4:17:44 PM	Bypass valve closed
8/1/2012	4:17:44 PM	Bubbler valve closed
8/1/2012	4:17:44 PM	Main Vac valve opened
8/1/2012	4:17:44 PM	Helium MFC set to  0.000000
8/1/2012	4:17:44 PM	H2 MFC set to  0.000000
8/1/2012	4:17:44 PM	BCl3 MFC set to  0.000000
8/1/2012	4:17:44 PM	PH3 MFC set to  0.000000
8/1/2012	4:17:44 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:17:44 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:17:44 PM	Tube furnace set to 150
8/1/2012	4:17:45 PM	Run finished at 4:17 PM
8/1/2012	4:18:10 PM	Recipe started at 4:18 PM
8/1/2012	4:18:10 PM	Helium valve closed
8/1/2012	4:18:10 PM	H2 valve closed
8/1/2012	4:18:10 PM	BCl3 valve closed
8/1/2012	4:18:10 PM	PH3 valve closed
8/1/2012	4:18:10 PM	SiCl4 pre valve closed
8/1/2012	4:18:10 PM	SiCl4 post valve closed
8/1/2012	4:18:10 PM	Bypass valve closed
8/1/2012	4:18:10 PM	Bubbler valve closed
8/1/2012	4:18:10 PM	Main Vac valve opened
8/1/2012	4:18:10 PM	Helium MFC set to  0.000000
8/1/2012	4:18:10 PM	H2 MFC set to  0.000000
8/1/2012	4:18:10 PM	BCl3 MFC set to  0.000000
8/1/2012	4:18:10 PM	PH3 MFC set to  0.000000
8/1/2012	4:18:10 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:18:10 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:18:10 PM	Tube furnace set to 150
8/1/2012	4:18:40 PM	H2 valve closed
8/1/2012	4:18:40 PM	BCl3 valve closed
8/1/2012	4:18:40 PM	PH3 valve closed
8/1/2012	4:18:40 PM	SiCl4 pre valve closed
8/1/2012	4:18:40 PM	SiCl4 post valve closed
8/1/2012	4:18:40 PM	Bypass valve closed
8/1/2012	4:18:40 PM	Bubbler valve closed
8/1/2012	4:18:40 PM	Helium valve opened
8/1/2012	4:18:40 PM	Main Vac valve opened
8/1/2012	4:18:40 PM	Helium MFC set to  20.000000
8/1/2012	4:18:40 PM	H2 MFC set to  0.000000
8/1/2012	4:18:40 PM	BCl3 MFC set to  0.000000
8/1/2012	4:18:40 PM	PH3 MFC set to  0.000000
8/1/2012	4:18:40 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:18:40 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:18:40 PM	Tube furnace set to 150
8/1/2012	4:19:10 PM	Helium valve closed
8/1/2012	4:19:11 PM	H2 valve closed
8/1/2012	4:19:11 PM	BCl3 valve closed
8/1/2012	4:19:11 PM	PH3 valve closed
8/1/2012	4:19:11 PM	SiCl4 pre valve closed
8/1/2012	4:19:11 PM	SiCl4 post valve closed
8/1/2012	4:19:11 PM	Bypass valve closed
8/1/2012	4:19:11 PM	Bubbler valve closed
8/1/2012	4:19:11 PM	Main Vac valve opened
8/1/2012	4:19:11 PM	Helium MFC set to  0.000000
8/1/2012	4:19:11 PM	H2 MFC set to  0.000000
8/1/2012	4:19:11 PM	BCl3 MFC set to  0.000000
8/1/2012	4:19:11 PM	PH3 MFC set to  0.000000
8/1/2012	4:19:11 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:19:11 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:19:11 PM	Tube furnace set to 150
8/1/2012	4:19:41 PM	H2 valve closed
8/1/2012	4:19:41 PM	BCl3 valve closed
8/1/2012	4:19:41 PM	PH3 valve closed
8/1/2012	4:19:41 PM	SiCl4 pre valve closed
8/1/2012	4:19:41 PM	SiCl4 post valve closed
8/1/2012	4:19:41 PM	Bypass valve closed
8/1/2012	4:19:41 PM	Bubbler valve closed
8/1/2012	4:19:41 PM	Helium valve opened
8/1/2012	4:19:41 PM	Main Vac valve opened
8/1/2012	4:19:41 PM	Helium MFC set to  20.000000
8/1/2012	4:19:41 PM	H2 MFC set to  0.000000
8/1/2012	4:19:41 PM	BCl3 MFC set to  0.000000
8/1/2012	4:19:41 PM	PH3 MFC set to  0.000000
8/1/2012	4:19:41 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:19:41 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:19:41 PM	Tube furnace set to 150
8/1/2012	4:20:11 PM	Helium valve closed
8/1/2012	4:20:11 PM	H2 valve closed
8/1/2012	4:20:11 PM	BCl3 valve closed
8/1/2012	4:20:11 PM	PH3 valve closed
8/1/2012	4:20:11 PM	SiCl4 pre valve closed
8/1/2012	4:20:11 PM	SiCl4 post valve closed
8/1/2012	4:20:11 PM	Bypass valve closed
8/1/2012	4:20:11 PM	Bubbler valve closed
8/1/2012	4:20:11 PM	Main Vac valve opened
8/1/2012	4:20:11 PM	Helium MFC set to  0.000000
8/1/2012	4:20:11 PM	H2 MFC set to  0.000000
8/1/2012	4:20:11 PM	BCl3 MFC set to  0.000000
8/1/2012	4:20:11 PM	PH3 MFC set to  0.000000
8/1/2012	4:20:11 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:20:11 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:20:11 PM	Tube furnace set to 150
8/1/2012	4:20:41 PM	H2 valve closed
8/1/2012	4:20:41 PM	BCl3 valve closed
8/1/2012	4:20:41 PM	PH3 valve closed
8/1/2012	4:20:41 PM	SiCl4 pre valve closed
8/1/2012	4:20:41 PM	SiCl4 post valve closed
8/1/2012	4:20:41 PM	Bypass valve closed
8/1/2012	4:20:41 PM	Bubbler valve closed
8/1/2012	4:20:41 PM	Helium valve opened
8/1/2012	4:20:41 PM	Main Vac valve opened
8/1/2012	4:20:41 PM	Helium MFC set to  20.000000
8/1/2012	4:20:41 PM	H2 MFC set to  0.000000
8/1/2012	4:20:41 PM	BCl3 MFC set to  0.000000
8/1/2012	4:20:41 PM	PH3 MFC set to  0.000000
8/1/2012	4:20:41 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:20:41 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:20:41 PM	Tube furnace set to 150
8/1/2012	4:22:41 PM	Helium valve closed
8/1/2012	4:22:41 PM	H2 valve closed
8/1/2012	4:22:41 PM	BCl3 valve closed
8/1/2012	4:22:41 PM	PH3 valve closed
8/1/2012	4:22:41 PM	SiCl4 pre valve closed
8/1/2012	4:22:41 PM	SiCl4 post valve closed
8/1/2012	4:22:41 PM	Bypass valve closed
8/1/2012	4:22:41 PM	Bubbler valve closed
8/1/2012	4:22:41 PM	Main Vac valve opened
8/1/2012	4:22:41 PM	Helium MFC set to  0.000000
8/1/2012	4:22:41 PM	H2 MFC set to  0.000000
8/1/2012	4:22:41 PM	BCl3 MFC set to  0.000000
8/1/2012	4:22:41 PM	PH3 MFC set to  0.000000
8/1/2012	4:22:41 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:22:42 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:22:42 PM	Tube furnace set to 150
8/1/2012	4:23:12 PM	H2 valve closed
8/1/2012	4:23:12 PM	BCl3 valve closed
8/1/2012	4:23:12 PM	PH3 valve closed
8/1/2012	4:23:12 PM	SiCl4 pre valve closed
8/1/2012	4:23:12 PM	SiCl4 post valve closed
8/1/2012	4:23:12 PM	Bypass valve closed
8/1/2012	4:23:12 PM	Bubbler valve closed
8/1/2012	4:23:12 PM	Helium valve opened
8/1/2012	4:23:12 PM	Main Vac valve opened
8/1/2012	4:23:12 PM	Helium MFC set to  20.000000
8/1/2012	4:23:12 PM	H2 MFC set to  0.000000
8/1/2012	4:23:12 PM	BCl3 MFC set to  0.000000
8/1/2012	4:23:12 PM	PH3 MFC set to  0.000000
8/1/2012	4:23:12 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:23:12 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:23:12 PM	Tube furnace set to 150
8/1/2012	4:23:42 PM	Helium valve closed
8/1/2012	4:23:42 PM	H2 valve closed
8/1/2012	4:23:42 PM	BCl3 valve closed
8/1/2012	4:23:42 PM	PH3 valve closed
8/1/2012	4:23:42 PM	SiCl4 pre valve closed
8/1/2012	4:23:42 PM	SiCl4 post valve closed
8/1/2012	4:23:42 PM	Bypass valve closed
8/1/2012	4:23:42 PM	Bubbler valve closed
8/1/2012	4:23:42 PM	Main Vac valve opened
8/1/2012	4:23:42 PM	Helium MFC set to  0.000000
8/1/2012	4:23:42 PM	H2 MFC set to  0.000000
8/1/2012	4:23:42 PM	BCl3 MFC set to  0.000000
8/1/2012	4:23:42 PM	PH3 MFC set to  0.000000
8/1/2012	4:23:42 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:23:42 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:23:42 PM	Tube furnace set to 150
8/1/2012	4:24:12 PM	H2 valve closed
8/1/2012	4:24:12 PM	BCl3 valve closed
8/1/2012	4:24:12 PM	PH3 valve closed
8/1/2012	4:24:12 PM	SiCl4 pre valve closed
8/1/2012	4:24:12 PM	SiCl4 post valve closed
8/1/2012	4:24:12 PM	Bypass valve closed
8/1/2012	4:24:12 PM	Bubbler valve closed
8/1/2012	4:24:12 PM	Helium valve opened
8/1/2012	4:24:12 PM	Main Vac valve opened
8/1/2012	4:24:12 PM	Helium MFC set to  20.000000
8/1/2012	4:24:12 PM	H2 MFC set to  0.000000
8/1/2012	4:24:12 PM	BCl3 MFC set to  0.000000
8/1/2012	4:24:12 PM	PH3 MFC set to  0.000000
8/1/2012	4:24:12 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:24:12 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:24:12 PM	Tube furnace set to 150
8/1/2012	4:24:42 PM	Helium valve closed
8/1/2012	4:24:42 PM	H2 valve closed
8/1/2012	4:24:42 PM	BCl3 valve closed
8/1/2012	4:24:42 PM	PH3 valve closed
8/1/2012	4:24:42 PM	SiCl4 pre valve closed
8/1/2012	4:24:42 PM	SiCl4 post valve closed
8/1/2012	4:24:42 PM	Bypass valve closed
8/1/2012	4:24:42 PM	Bubbler valve closed
8/1/2012	4:24:42 PM	Main Vac valve opened
8/1/2012	4:24:42 PM	Helium MFC set to  0.000000
8/1/2012	4:24:42 PM	H2 MFC set to  0.000000
8/1/2012	4:24:42 PM	BCl3 MFC set to  0.000000
8/1/2012	4:24:42 PM	PH3 MFC set to  0.000000
8/1/2012	4:24:42 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:24:42 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:24:43 PM	Tube furnace set to 150
8/1/2012	4:25:13 PM	H2 valve closed
8/1/2012	4:25:13 PM	BCl3 valve closed
8/1/2012	4:25:13 PM	PH3 valve closed
8/1/2012	4:25:13 PM	SiCl4 pre valve closed
8/1/2012	4:25:13 PM	SiCl4 post valve closed
8/1/2012	4:25:13 PM	Bypass valve closed
8/1/2012	4:25:13 PM	Bubbler valve closed
8/1/2012	4:25:13 PM	Helium valve opened
8/1/2012	4:25:13 PM	Main Vac valve opened
8/1/2012	4:25:13 PM	Helium MFC set to  20.000000
8/1/2012	4:25:13 PM	H2 MFC set to  0.000000
8/1/2012	4:25:13 PM	BCl3 MFC set to  0.000000
8/1/2012	4:25:13 PM	PH3 MFC set to  0.000000
8/1/2012	4:25:13 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:25:13 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:25:13 PM	Tube furnace set to 150
8/1/2012	4:27:13 PM	Helium valve closed
8/1/2012	4:27:13 PM	H2 valve closed
8/1/2012	4:27:13 PM	BCl3 valve closed
8/1/2012	4:27:13 PM	PH3 valve closed
8/1/2012	4:27:13 PM	SiCl4 pre valve closed
8/1/2012	4:27:13 PM	SiCl4 post valve closed
8/1/2012	4:27:13 PM	Bypass valve closed
8/1/2012	4:27:13 PM	Bubbler valve closed
8/1/2012	4:27:13 PM	Main Vac valve opened
8/1/2012	4:27:13 PM	Helium MFC set to  0.000000
8/1/2012	4:27:13 PM	H2 MFC set to  0.000000
8/1/2012	4:27:13 PM	BCl3 MFC set to  0.000000
8/1/2012	4:27:13 PM	PH3 MFC set to  0.000000
8/1/2012	4:27:13 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:27:13 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:27:13 PM	Tube furnace set to 150
8/1/2012	4:27:43 PM	H2 valve closed
8/1/2012	4:27:43 PM	BCl3 valve closed
8/1/2012	4:27:43 PM	PH3 valve closed
8/1/2012	4:27:43 PM	SiCl4 pre valve closed
8/1/2012	4:27:43 PM	SiCl4 post valve closed
8/1/2012	4:27:43 PM	Bypass valve closed
8/1/2012	4:27:43 PM	Bubbler valve closed
8/1/2012	4:27:43 PM	Helium valve opened
8/1/2012	4:27:43 PM	Main Vac valve opened
8/1/2012	4:27:43 PM	Helium MFC set to  20.000000
8/1/2012	4:27:43 PM	H2 MFC set to  0.000000
8/1/2012	4:27:43 PM	BCl3 MFC set to  0.000000
8/1/2012	4:27:43 PM	PH3 MFC set to  0.000000
8/1/2012	4:27:43 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:27:43 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:27:43 PM	Tube furnace set to 150
8/1/2012	4:28:13 PM	Helium valve closed
8/1/2012	4:28:13 PM	H2 valve closed
8/1/2012	4:28:13 PM	BCl3 valve closed
8/1/2012	4:28:13 PM	PH3 valve closed
8/1/2012	4:28:13 PM	SiCl4 pre valve closed
8/1/2012	4:28:13 PM	SiCl4 post valve closed
8/1/2012	4:28:13 PM	Bypass valve closed
8/1/2012	4:28:13 PM	Bubbler valve closed
8/1/2012	4:28:13 PM	Main Vac valve opened
8/1/2012	4:28:13 PM	Helium MFC set to  0.000000
8/1/2012	4:28:13 PM	H2 MFC set to  0.000000
8/1/2012	4:28:13 PM	BCl3 MFC set to  0.000000
8/1/2012	4:28:13 PM	PH3 MFC set to  0.000000
8/1/2012	4:28:13 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:28:13 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:28:14 PM	Tube furnace set to 150
8/1/2012	4:28:44 PM	H2 valve closed
8/1/2012	4:28:44 PM	BCl3 valve closed
8/1/2012	4:28:44 PM	PH3 valve closed
8/1/2012	4:28:44 PM	SiCl4 pre valve closed
8/1/2012	4:28:44 PM	SiCl4 post valve closed
8/1/2012	4:28:44 PM	Bypass valve closed
8/1/2012	4:28:44 PM	Bubbler valve closed
8/1/2012	4:28:44 PM	Helium valve opened
8/1/2012	4:28:44 PM	Main Vac valve opened
8/1/2012	4:28:44 PM	Helium MFC set to  20.000000
8/1/2012	4:28:44 PM	H2 MFC set to  0.000000
8/1/2012	4:28:44 PM	BCl3 MFC set to  0.000000
8/1/2012	4:28:44 PM	PH3 MFC set to  0.000000
8/1/2012	4:28:44 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:28:44 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:28:44 PM	Tube furnace set to 150
8/1/2012	4:30:44 PM	Helium valve closed
8/1/2012	4:30:44 PM	H2 valve closed
8/1/2012	4:30:44 PM	BCl3 valve closed
8/1/2012	4:30:44 PM	PH3 valve closed
8/1/2012	4:30:44 PM	SiCl4 pre valve closed
8/1/2012	4:30:44 PM	SiCl4 post valve closed
8/1/2012	4:30:44 PM	Bypass valve closed
8/1/2012	4:30:44 PM	Bubbler valve closed
8/1/2012	4:30:44 PM	Main Vac valve opened
8/1/2012	4:30:44 PM	Helium MFC set to  0.000000
8/1/2012	4:30:44 PM	H2 MFC set to  0.000000
8/1/2012	4:30:44 PM	BCl3 MFC set to  0.000000
8/1/2012	4:30:44 PM	PH3 MFC set to  0.000000
8/1/2012	4:30:44 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:30:44 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:30:44 PM	Tube furnace set to 150
8/1/2012	4:31:14 PM	H2 valve closed
8/1/2012	4:31:14 PM	BCl3 valve closed
8/1/2012	4:31:14 PM	PH3 valve closed
8/1/2012	4:31:14 PM	SiCl4 pre valve closed
8/1/2012	4:31:14 PM	SiCl4 post valve closed
8/1/2012	4:31:14 PM	Bypass valve closed
8/1/2012	4:31:14 PM	Bubbler valve closed
8/1/2012	4:31:14 PM	Helium valve opened
8/1/2012	4:31:14 PM	Main Vac valve opened
8/1/2012	4:31:14 PM	Helium MFC set to  20.000000
8/1/2012	4:31:14 PM	H2 MFC set to  0.000000
8/1/2012	4:31:14 PM	BCl3 MFC set to  0.000000
8/1/2012	4:31:14 PM	PH3 MFC set to  0.000000
8/1/2012	4:31:14 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:31:14 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:31:14 PM	Tube furnace set to 150
8/1/2012	4:33:14 PM	Helium valve closed
8/1/2012	4:33:14 PM	H2 valve closed
8/1/2012	4:33:14 PM	BCl3 valve closed
8/1/2012	4:33:14 PM	PH3 valve closed
8/1/2012	4:33:14 PM	SiCl4 pre valve closed
8/1/2012	4:33:14 PM	SiCl4 post valve closed
8/1/2012	4:33:14 PM	Bypass valve closed
8/1/2012	4:33:14 PM	Bubbler valve closed
8/1/2012	4:33:14 PM	Main Vac valve opened
8/1/2012	4:33:14 PM	Helium MFC set to  0.000000
8/1/2012	4:33:14 PM	H2 MFC set to  0.000000
8/1/2012	4:33:14 PM	BCl3 MFC set to  0.000000
8/1/2012	4:33:14 PM	PH3 MFC set to  0.000000
8/1/2012	4:33:14 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:33:14 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:33:14 PM	Tube furnace set to 150
8/1/2012	4:33:44 PM	H2 valve closed
8/1/2012	4:33:45 PM	BCl3 valve closed
8/1/2012	4:33:45 PM	PH3 valve closed
8/1/2012	4:33:45 PM	SiCl4 pre valve closed
8/1/2012	4:33:45 PM	SiCl4 post valve closed
8/1/2012	4:33:45 PM	Bypass valve closed
8/1/2012	4:33:45 PM	Bubbler valve closed
8/1/2012	4:33:45 PM	Helium valve opened
8/1/2012	4:33:45 PM	Main Vac valve opened
8/1/2012	4:33:45 PM	Helium MFC set to  20.000000
8/1/2012	4:33:45 PM	H2 MFC set to  0.000000
8/1/2012	4:33:45 PM	BCl3 MFC set to  0.000000
8/1/2012	4:33:45 PM	PH3 MFC set to  0.000000
8/1/2012	4:33:45 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:33:45 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:33:45 PM	Tube furnace set to 150
8/1/2012	4:35:45 PM	Helium valve closed
8/1/2012	4:35:45 PM	H2 valve closed
8/1/2012	4:35:45 PM	BCl3 valve closed
8/1/2012	4:35:45 PM	PH3 valve closed
8/1/2012	4:35:45 PM	SiCl4 pre valve closed
8/1/2012	4:35:45 PM	SiCl4 post valve closed
8/1/2012	4:35:45 PM	Bypass valve closed
8/1/2012	4:35:45 PM	Bubbler valve closed
8/1/2012	4:35:45 PM	Main Vac valve opened
8/1/2012	4:35:45 PM	Helium MFC set to  0.000000
8/1/2012	4:35:45 PM	H2 MFC set to  0.000000
8/1/2012	4:35:45 PM	BCl3 MFC set to  0.000000
8/1/2012	4:35:45 PM	PH3 MFC set to  0.000000
8/1/2012	4:35:45 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:35:45 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:35:45 PM	Tube furnace set to 150
8/1/2012	4:35:46 PM	Run finished at 4:35 PM
8/1/2012	4:38:22 PM	Recipe started at 4:38 PM
8/1/2012	4:38:22 PM	Helium valve closed
8/1/2012	4:38:22 PM	H2 valve closed
8/1/2012	4:38:22 PM	BCl3 valve closed
8/1/2012	4:38:22 PM	PH3 valve closed
8/1/2012	4:38:22 PM	SiCl4 pre valve closed
8/1/2012	4:38:22 PM	SiCl4 post valve closed
8/1/2012	4:38:22 PM	Bypass valve closed
8/1/2012	4:38:22 PM	Bubbler valve closed
8/1/2012	4:38:22 PM	Main Vac valve opened
8/1/2012	4:38:22 PM	Helium MFC set to  0.000000
8/1/2012	4:38:22 PM	H2 MFC set to  0.000000
8/1/2012	4:38:22 PM	BCl3 MFC set to  0.000000
8/1/2012	4:38:22 PM	PH3 MFC set to  0.000000
8/1/2012	4:38:22 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:38:22 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:38:23 PM	Tube furnace set to 150
8/1/2012	4:38:53 PM	H2 valve closed
8/1/2012	4:38:53 PM	BCl3 valve closed
8/1/2012	4:38:53 PM	PH3 valve closed
8/1/2012	4:38:53 PM	SiCl4 pre valve closed
8/1/2012	4:38:53 PM	SiCl4 post valve closed
8/1/2012	4:38:53 PM	Bypass valve closed
8/1/2012	4:38:53 PM	Bubbler valve closed
8/1/2012	4:38:53 PM	Helium valve opened
8/1/2012	4:38:53 PM	Main Vac valve opened
8/1/2012	4:38:53 PM	Helium MFC set to  20.000000
8/1/2012	4:38:53 PM	H2 MFC set to  0.000000
8/1/2012	4:38:53 PM	BCl3 MFC set to  0.000000
8/1/2012	4:38:53 PM	PH3 MFC set to  0.000000
8/1/2012	4:38:53 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:38:53 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:38:53 PM	Tube furnace set to 150
8/1/2012	4:39:23 PM	Helium valve closed
8/1/2012	4:39:23 PM	H2 valve closed
8/1/2012	4:39:23 PM	BCl3 valve closed
8/1/2012	4:39:23 PM	PH3 valve closed
8/1/2012	4:39:23 PM	SiCl4 pre valve closed
8/1/2012	4:39:23 PM	SiCl4 post valve closed
8/1/2012	4:39:23 PM	Bypass valve closed
8/1/2012	4:39:23 PM	Bubbler valve closed
8/1/2012	4:39:23 PM	Main Vac valve opened
8/1/2012	4:39:23 PM	Helium MFC set to  0.000000
8/1/2012	4:39:23 PM	H2 MFC set to  0.000000
8/1/2012	4:39:23 PM	BCl3 MFC set to  0.000000
8/1/2012	4:39:23 PM	PH3 MFC set to  0.000000
8/1/2012	4:39:23 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:39:23 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:39:23 PM	Tube furnace set to 150
8/1/2012	4:39:53 PM	H2 valve closed
8/1/2012	4:39:53 PM	BCl3 valve closed
8/1/2012	4:39:53 PM	PH3 valve closed
8/1/2012	4:39:53 PM	SiCl4 pre valve closed
8/1/2012	4:39:53 PM	SiCl4 post valve closed
8/1/2012	4:39:53 PM	Bypass valve closed
8/1/2012	4:39:53 PM	Bubbler valve closed
8/1/2012	4:39:53 PM	Helium valve opened
8/1/2012	4:39:53 PM	Main Vac valve opened
8/1/2012	4:39:53 PM	Helium MFC set to  20.000000
8/1/2012	4:39:53 PM	H2 MFC set to  0.000000
8/1/2012	4:39:53 PM	BCl3 MFC set to  0.000000
8/1/2012	4:39:53 PM	PH3 MFC set to  0.000000
8/1/2012	4:39:53 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:39:53 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:39:53 PM	Tube furnace set to 150
8/1/2012	4:40:23 PM	Helium valve closed
8/1/2012	4:40:23 PM	H2 valve closed
8/1/2012	4:40:23 PM	BCl3 valve closed
8/1/2012	4:40:23 PM	PH3 valve closed
8/1/2012	4:40:23 PM	SiCl4 pre valve closed
8/1/2012	4:40:23 PM	SiCl4 post valve closed
8/1/2012	4:40:23 PM	Bypass valve closed
8/1/2012	4:40:23 PM	Bubbler valve closed
8/1/2012	4:40:23 PM	Main Vac valve opened
8/1/2012	4:40:23 PM	Helium MFC set to  0.000000
8/1/2012	4:40:23 PM	H2 MFC set to  0.000000
8/1/2012	4:40:23 PM	BCl3 MFC set to  0.000000
8/1/2012	4:40:23 PM	PH3 MFC set to  0.000000
8/1/2012	4:40:23 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:40:23 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:40:24 PM	Tube furnace set to 150
8/1/2012	4:40:54 PM	H2 valve closed
8/1/2012	4:40:54 PM	BCl3 valve closed
8/1/2012	4:40:54 PM	PH3 valve closed
8/1/2012	4:40:54 PM	SiCl4 pre valve closed
8/1/2012	4:40:54 PM	SiCl4 post valve closed
8/1/2012	4:40:54 PM	Bypass valve closed
8/1/2012	4:40:54 PM	Bubbler valve closed
8/1/2012	4:40:54 PM	Helium valve opened
8/1/2012	4:40:54 PM	Main Vac valve opened
8/1/2012	4:40:54 PM	Helium MFC set to  20.000000
8/1/2012	4:40:54 PM	H2 MFC set to  0.000000
8/1/2012	4:40:54 PM	BCl3 MFC set to  0.000000
8/1/2012	4:40:54 PM	PH3 MFC set to  0.000000
8/1/2012	4:40:54 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:40:54 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:40:54 PM	Tube furnace set to 150
8/1/2012	4:42:54 PM	Helium valve closed
8/1/2012	4:42:54 PM	H2 valve closed
8/1/2012	4:42:54 PM	BCl3 valve closed
8/1/2012	4:42:54 PM	PH3 valve closed
8/1/2012	4:42:54 PM	SiCl4 pre valve closed
8/1/2012	4:42:54 PM	SiCl4 post valve closed
8/1/2012	4:42:54 PM	Bypass valve closed
8/1/2012	4:42:54 PM	Bubbler valve closed
8/1/2012	4:42:54 PM	Main Vac valve opened
8/1/2012	4:42:54 PM	Helium MFC set to  0.000000
8/1/2012	4:42:54 PM	H2 MFC set to  0.000000
8/1/2012	4:42:54 PM	BCl3 MFC set to  0.000000
8/1/2012	4:42:54 PM	PH3 MFC set to  0.000000
8/1/2012	4:42:54 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:42:54 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:42:54 PM	Tube furnace set to 150
8/1/2012	4:43:24 PM	H2 valve closed
8/1/2012	4:43:24 PM	BCl3 valve closed
8/1/2012	4:43:24 PM	PH3 valve closed
8/1/2012	4:43:24 PM	SiCl4 pre valve closed
8/1/2012	4:43:24 PM	SiCl4 post valve closed
8/1/2012	4:43:24 PM	Bypass valve closed
8/1/2012	4:43:24 PM	Bubbler valve closed
8/1/2012	4:43:24 PM	Helium valve opened
8/1/2012	4:43:24 PM	Main Vac valve opened
8/1/2012	4:43:24 PM	Helium MFC set to  20.000000
8/1/2012	4:43:24 PM	H2 MFC set to  0.000000
8/1/2012	4:43:24 PM	BCl3 MFC set to  0.000000
8/1/2012	4:43:24 PM	PH3 MFC set to  0.000000
8/1/2012	4:43:24 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:43:24 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:43:24 PM	Tube furnace set to 150
8/1/2012	4:43:54 PM	Helium valve closed
8/1/2012	4:43:54 PM	H2 valve closed
8/1/2012	4:43:54 PM	BCl3 valve closed
8/1/2012	4:43:54 PM	PH3 valve closed
8/1/2012	4:43:54 PM	SiCl4 pre valve closed
8/1/2012	4:43:54 PM	SiCl4 post valve closed
8/1/2012	4:43:54 PM	Bypass valve closed
8/1/2012	4:43:54 PM	Bubbler valve closed
8/1/2012	4:43:54 PM	Main Vac valve opened
8/1/2012	4:43:54 PM	Helium MFC set to  0.000000
8/1/2012	4:43:54 PM	H2 MFC set to  0.000000
8/1/2012	4:43:54 PM	BCl3 MFC set to  0.000000
8/1/2012	4:43:54 PM	PH3 MFC set to  0.000000
8/1/2012	4:43:54 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:43:54 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:43:55 PM	Tube furnace set to 150
8/1/2012	4:44:25 PM	H2 valve closed
8/1/2012	4:44:25 PM	BCl3 valve closed
8/1/2012	4:44:25 PM	PH3 valve closed
8/1/2012	4:44:25 PM	SiCl4 pre valve closed
8/1/2012	4:44:25 PM	SiCl4 post valve closed
8/1/2012	4:44:25 PM	Bypass valve closed
8/1/2012	4:44:25 PM	Bubbler valve closed
8/1/2012	4:44:25 PM	Helium valve opened
8/1/2012	4:44:25 PM	Main Vac valve opened
8/1/2012	4:44:25 PM	Helium MFC set to  20.000000
8/1/2012	4:44:25 PM	H2 MFC set to  0.000000
8/1/2012	4:44:25 PM	BCl3 MFC set to  0.000000
8/1/2012	4:44:25 PM	PH3 MFC set to  0.000000
8/1/2012	4:44:25 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:44:25 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:44:25 PM	Tube furnace set to 150
8/1/2012	4:44:55 PM	Helium valve closed
8/1/2012	4:44:55 PM	H2 valve closed
8/1/2012	4:44:55 PM	BCl3 valve closed
8/1/2012	4:44:55 PM	PH3 valve closed
8/1/2012	4:44:55 PM	SiCl4 pre valve closed
8/1/2012	4:44:55 PM	SiCl4 post valve closed
8/1/2012	4:44:55 PM	Bypass valve closed
8/1/2012	4:44:55 PM	Bubbler valve closed
8/1/2012	4:44:55 PM	Main Vac valve opened
8/1/2012	4:44:55 PM	Helium MFC set to  0.000000
8/1/2012	4:44:55 PM	H2 MFC set to  0.000000
8/1/2012	4:44:55 PM	BCl3 MFC set to  0.000000
8/1/2012	4:44:55 PM	PH3 MFC set to  0.000000
8/1/2012	4:44:55 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:44:55 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:44:55 PM	Tube furnace set to 150
8/1/2012	4:45:25 PM	H2 valve closed
8/1/2012	4:45:25 PM	BCl3 valve closed
8/1/2012	4:45:25 PM	PH3 valve closed
8/1/2012	4:45:25 PM	SiCl4 pre valve closed
8/1/2012	4:45:25 PM	SiCl4 post valve closed
8/1/2012	4:45:25 PM	Bypass valve closed
8/1/2012	4:45:25 PM	Bubbler valve closed
8/1/2012	4:45:25 PM	Helium valve opened
8/1/2012	4:45:25 PM	Main Vac valve opened
8/1/2012	4:45:25 PM	Helium MFC set to  20.000000
8/1/2012	4:45:25 PM	H2 MFC set to  0.000000
8/1/2012	4:45:25 PM	BCl3 MFC set to  0.000000
8/1/2012	4:45:25 PM	PH3 MFC set to  0.000000
8/1/2012	4:45:25 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:45:25 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:45:25 PM	Tube furnace set to 150
8/1/2012	4:47:25 PM	Helium valve closed
8/1/2012	4:47:25 PM	H2 valve closed
8/1/2012	4:47:25 PM	BCl3 valve closed
8/1/2012	4:47:25 PM	PH3 valve closed
8/1/2012	4:47:25 PM	SiCl4 pre valve closed
8/1/2012	4:47:25 PM	SiCl4 post valve closed
8/1/2012	4:47:25 PM	Bypass valve closed
8/1/2012	4:47:25 PM	Bubbler valve closed
8/1/2012	4:47:25 PM	Main Vac valve opened
8/1/2012	4:47:25 PM	Helium MFC set to  0.000000
8/1/2012	4:47:25 PM	H2 MFC set to  0.000000
8/1/2012	4:47:25 PM	BCl3 MFC set to  0.000000
8/1/2012	4:47:25 PM	PH3 MFC set to  0.000000
8/1/2012	4:47:25 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:47:25 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:47:25 PM	Tube furnace set to 150
8/1/2012	4:47:43 PM	H2 valve closed
8/1/2012	4:47:43 PM	BCl3 valve closed
8/1/2012	4:47:43 PM	PH3 valve closed
8/1/2012	4:47:43 PM	SiCl4 pre valve closed
8/1/2012	4:47:43 PM	SiCl4 post valve closed
8/1/2012	4:47:43 PM	Bypass valve closed
8/1/2012	4:47:43 PM	Bubbler valve closed
8/1/2012	4:47:43 PM	Helium valve opened
8/1/2012	4:47:43 PM	Main Vac valve opened
8/1/2012	4:47:43 PM	Helium MFC set to  20.000000
8/1/2012	4:47:43 PM	H2 MFC set to  0.000000
8/1/2012	4:47:43 PM	BCl3 MFC set to  0.000000
8/1/2012	4:47:43 PM	PH3 MFC set to  0.000000
8/1/2012	4:47:43 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:47:43 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:47:43 PM	Tube furnace set to 150
8/1/2012	4:47:43 PM	Helium valve closed
8/1/2012	4:47:43 PM	H2 valve closed
8/1/2012	4:47:43 PM	BCl3 valve closed
8/1/2012	4:47:43 PM	PH3 valve closed
8/1/2012	4:47:43 PM	SiCl4 pre valve closed
8/1/2012	4:47:43 PM	SiCl4 post valve closed
8/1/2012	4:47:43 PM	Bypass valve closed
8/1/2012	4:47:43 PM	Bubbler valve closed
8/1/2012	4:47:43 PM	Main Vac valve opened
8/1/2012	4:47:43 PM	Helium MFC set to  0.000000
8/1/2012	4:47:43 PM	H2 MFC set to  0.000000
8/1/2012	4:47:44 PM	BCl3 MFC set to  0.000000
8/1/2012	4:47:44 PM	PH3 MFC set to  0.000000
8/1/2012	4:47:44 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:47:44 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:47:44 PM	Tube furnace set to 150
8/1/2012	4:47:44 PM	H2 valve closed
8/1/2012	4:47:44 PM	BCl3 valve closed
8/1/2012	4:47:44 PM	PH3 valve closed
8/1/2012	4:47:44 PM	SiCl4 pre valve closed
8/1/2012	4:47:44 PM	SiCl4 post valve closed
8/1/2012	4:47:44 PM	Bypass valve closed
8/1/2012	4:47:44 PM	Bubbler valve closed
8/1/2012	4:47:44 PM	Helium valve opened
8/1/2012	4:47:44 PM	Main Vac valve opened
8/1/2012	4:47:44 PM	Helium MFC set to  20.000000
8/1/2012	4:47:44 PM	H2 MFC set to  0.000000
8/1/2012	4:47:44 PM	BCl3 MFC set to  0.000000
8/1/2012	4:47:44 PM	PH3 MFC set to  0.000000
8/1/2012	4:47:44 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:47:44 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:47:44 PM	Tube furnace set to 150
8/1/2012	4:47:45 PM	Helium valve closed
8/1/2012	4:47:45 PM	H2 valve closed
8/1/2012	4:47:45 PM	BCl3 valve closed
8/1/2012	4:47:45 PM	PH3 valve closed
8/1/2012	4:47:45 PM	SiCl4 pre valve closed
8/1/2012	4:47:45 PM	SiCl4 post valve closed
8/1/2012	4:47:45 PM	Bypass valve closed
8/1/2012	4:47:45 PM	Bubbler valve closed
8/1/2012	4:47:45 PM	Main Vac valve opened
8/1/2012	4:47:45 PM	Helium MFC set to  0.000000
8/1/2012	4:47:45 PM	H2 MFC set to  0.000000
8/1/2012	4:47:45 PM	BCl3 MFC set to  0.000000
8/1/2012	4:47:45 PM	PH3 MFC set to  0.000000
8/1/2012	4:47:45 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:47:45 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:47:45 PM	Tube furnace set to 150
8/1/2012	4:47:47 PM	H2 valve closed
8/1/2012	4:47:47 PM	BCl3 valve closed
8/1/2012	4:47:47 PM	PH3 valve closed
8/1/2012	4:47:47 PM	SiCl4 pre valve closed
8/1/2012	4:47:47 PM	SiCl4 post valve closed
8/1/2012	4:47:47 PM	Bypass valve closed
8/1/2012	4:47:47 PM	Bubbler valve closed
8/1/2012	4:47:47 PM	Helium valve opened
8/1/2012	4:47:47 PM	Main Vac valve opened
8/1/2012	4:47:47 PM	Helium MFC set to  20.000000
8/1/2012	4:47:47 PM	H2 MFC set to  0.000000
8/1/2012	4:47:47 PM	BCl3 MFC set to  0.000000
8/1/2012	4:47:47 PM	PH3 MFC set to  0.000000
8/1/2012	4:47:47 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:47:47 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:47:47 PM	Tube furnace set to 150
8/1/2012	4:47:47 PM	Helium valve closed
8/1/2012	4:47:47 PM	H2 valve closed
8/1/2012	4:47:47 PM	BCl3 valve closed
8/1/2012	4:47:47 PM	PH3 valve closed
8/1/2012	4:47:47 PM	SiCl4 pre valve closed
8/1/2012	4:47:47 PM	SiCl4 post valve closed
8/1/2012	4:47:47 PM	Bypass valve closed
8/1/2012	4:47:47 PM	Bubbler valve closed
8/1/2012	4:47:47 PM	Main Vac valve opened
8/1/2012	4:47:47 PM	Helium MFC set to  0.000000
8/1/2012	4:47:47 PM	H2 MFC set to  0.000000
8/1/2012	4:47:47 PM	BCl3 MFC set to  0.000000
8/1/2012	4:47:47 PM	PH3 MFC set to  0.000000
8/1/2012	4:47:47 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:47:47 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:47:47 PM	Tube furnace set to 150
8/1/2012	4:48:02 PM	H2 valve closed
8/1/2012	4:48:02 PM	BCl3 valve closed
8/1/2012	4:48:02 PM	PH3 valve closed
8/1/2012	4:48:02 PM	SiCl4 pre valve closed
8/1/2012	4:48:02 PM	SiCl4 post valve closed
8/1/2012	4:48:02 PM	Bypass valve closed
8/1/2012	4:48:02 PM	Bubbler valve closed
8/1/2012	4:48:02 PM	Helium valve opened
8/1/2012	4:48:02 PM	Main Vac valve opened
8/1/2012	4:48:02 PM	Helium MFC set to  20.000000
8/1/2012	4:48:02 PM	H2 MFC set to  0.000000
8/1/2012	4:48:02 PM	BCl3 MFC set to  0.000000
8/1/2012	4:48:02 PM	PH3 MFC set to  0.000000
8/1/2012	4:48:02 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:48:02 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:48:02 PM	Tube furnace set to 150
8/1/2012	4:50:02 PM	Helium valve closed
8/1/2012	4:50:02 PM	H2 valve closed
8/1/2012	4:50:02 PM	BCl3 valve closed
8/1/2012	4:50:02 PM	PH3 valve closed
8/1/2012	4:50:02 PM	SiCl4 pre valve closed
8/1/2012	4:50:02 PM	SiCl4 post valve closed
8/1/2012	4:50:02 PM	Bypass valve closed
8/1/2012	4:50:02 PM	Bubbler valve closed
8/1/2012	4:50:02 PM	Main Vac valve opened
8/1/2012	4:50:02 PM	Helium MFC set to  0.000000
8/1/2012	4:50:02 PM	H2 MFC set to  0.000000
8/1/2012	4:50:02 PM	BCl3 MFC set to  0.000000
8/1/2012	4:50:02 PM	PH3 MFC set to  0.000000
8/1/2012	4:50:02 PM	SiCl4 MFC set to  0.000000
8/1/2012	4:50:02 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	4:50:02 PM	Tube furnace set to 150
8/1/2012	4:50:03 PM	Run finished at 4:50 PM
8/1/2012	5:04:10 PM	Recipe started at 5:04 PM
8/1/2012	5:04:10 PM	Helium valve closed
8/1/2012	5:04:10 PM	H2 valve closed
8/1/2012	5:04:10 PM	BCl3 valve closed
8/1/2012	5:04:10 PM	PH3 valve closed
8/1/2012	5:04:11 PM	SiCl4 pre valve closed
8/1/2012	5:04:11 PM	SiCl4 post valve closed
8/1/2012	5:04:11 PM	Main Vac valve closed
8/1/2012	5:04:11 PM	Bypass valve closed
8/1/2012	5:04:11 PM	Bubbler valve closed
8/1/2012	5:04:11 PM	Helium MFC set to  0.000000
8/1/2012	5:04:11 PM	H2 MFC set to  0.000000
8/1/2012	5:04:11 PM	BCl3 MFC set to  0.000000
8/1/2012	5:04:11 PM	PH3 MFC set to  0.000000
8/1/2012	5:04:11 PM	SiCl4 MFC set to  0.000000
8/1/2012	5:04:11 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	5:04:11 PM	Tube furnace set to 0
8/1/2012	5:04:14 PM	Helium valve closed
8/1/2012	5:04:14 PM	BCl3 valve closed
8/1/2012	5:04:14 PM	PH3 valve closed
8/1/2012	5:04:14 PM	SiCl4 pre valve closed
8/1/2012	5:04:14 PM	SiCl4 post valve closed
8/1/2012	5:04:14 PM	Main Vac valve closed
8/1/2012	5:04:14 PM	Bypass valve closed
8/1/2012	5:04:14 PM	Bubbler valve closed
8/1/2012	5:04:14 PM	H2 valve opened
8/1/2012	5:04:14 PM	Helium MFC set to  0.000000
8/1/2012	5:04:14 PM	H2 MFC set to  500.000000
8/1/2012	5:04:14 PM	BCl3 MFC set to  0.000000
8/1/2012	5:04:14 PM	PH3 MFC set to  0.000000
8/1/2012	5:04:14 PM	SiCl4 MFC set to  0.000000
8/1/2012	5:04:14 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	5:04:14 PM	Tube furnace set to 0
8/1/2012	5:05:25 PM	Helium valve closed
8/1/2012	5:05:25 PM	BCl3 valve closed
8/1/2012	5:05:25 PM	PH3 valve closed
8/1/2012	5:05:25 PM	SiCl4 pre valve closed
8/1/2012	5:05:25 PM	SiCl4 post valve closed
8/1/2012	5:05:25 PM	Main Vac valve closed
8/1/2012	5:05:25 PM	Bypass valve closed
8/1/2012	5:05:25 PM	H2 valve opened
8/1/2012	5:05:25 PM	Bubbler valve opened
8/1/2012	5:05:25 PM	Helium MFC set to  0.000000
8/1/2012	5:05:25 PM	H2 MFC set to  500.000000
8/1/2012	5:05:25 PM	BCl3 MFC set to  0.000000
8/1/2012	5:05:25 PM	PH3 MFC set to  0.000000
8/1/2012	5:05:25 PM	SiCl4 MFC set to  0.000000
8/1/2012	5:05:25 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	5:05:25 PM	Tube furnace set to 0
8/1/2012	5:05:26 PM	Helium valve closed
8/1/2012	5:05:26 PM	BCl3 valve closed
8/1/2012	5:05:26 PM	PH3 valve closed
8/1/2012	5:05:26 PM	SiCl4 pre valve closed
8/1/2012	5:05:26 PM	SiCl4 post valve closed
8/1/2012	5:05:26 PM	Main Vac valve closed
8/1/2012	5:05:26 PM	Bypass valve closed
8/1/2012	5:05:26 PM	H2 valve opened
8/1/2012	5:05:26 PM	Bubbler valve opened
8/1/2012	5:05:26 PM	Helium MFC set to  0.000000
8/1/2012	5:05:26 PM	H2 MFC set to  500.000000
8/1/2012	5:05:26 PM	BCl3 MFC set to  0.000000
8/1/2012	5:05:26 PM	PH3 MFC set to  0.000000
8/1/2012	5:05:26 PM	SiCl4 MFC set to  0.000000
8/1/2012	5:05:27 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	5:05:27 PM	Tube furnace set to 1000
8/1/2012	5:25:27 PM	Helium valve closed
8/1/2012	5:25:27 PM	BCl3 valve closed
8/1/2012	5:25:27 PM	Main Vac valve closed
8/1/2012	5:25:27 PM	Bypass valve closed
8/1/2012	5:25:27 PM	H2 valve opened
8/1/2012	5:25:27 PM	PH3 valve opened
8/1/2012	5:25:27 PM	SiCl4 pre valve opened
8/1/2012	5:25:27 PM	SiCl4 post valve opened
8/1/2012	5:25:27 PM	Bubbler valve opened
8/1/2012	5:25:27 PM	Helium MFC set to  0.000000
8/1/2012	5:25:27 PM	H2 MFC set to  500.000000
8/1/2012	5:25:27 PM	BCl3 MFC set to  0.000000
8/1/2012	5:25:27 PM	PH3 MFC set to  0.300000
8/1/2012	5:25:27 PM	SiCl4 MFC set to  25.000000
8/1/2012	5:25:27 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	5:25:27 PM	Tube furnace set to 1000
8/1/2012	5:37:27 PM	Helium valve closed
8/1/2012	5:37:27 PM	BCl3 valve closed
8/1/2012	5:37:27 PM	PH3 valve closed
8/1/2012	5:37:27 PM	SiCl4 pre valve closed
8/1/2012	5:37:27 PM	SiCl4 post valve closed
8/1/2012	5:37:27 PM	Main Vac valve closed
8/1/2012	5:37:27 PM	Bypass valve closed
8/1/2012	5:37:27 PM	H2 valve opened
8/1/2012	5:37:27 PM	Bubbler valve opened
8/1/2012	5:37:27 PM	Helium MFC set to  0.000000
8/1/2012	5:37:27 PM	H2 MFC set to  500.000000
8/1/2012	5:37:27 PM	BCl3 MFC set to  0.000000
8/1/2012	5:37:27 PM	PH3 MFC set to  0.000000
8/1/2012	5:37:27 PM	SiCl4 MFC set to  0.000000
8/1/2012	5:37:27 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	5:37:27 PM	Tube furnace set to 750
8/1/2012	5:42:27 PM	H2 valve closed
8/1/2012	5:42:27 PM	BCl3 valve closed
8/1/2012	5:42:27 PM	PH3 valve closed
8/1/2012	5:42:27 PM	SiCl4 pre valve closed
8/1/2012	5:42:27 PM	SiCl4 post valve closed
8/1/2012	5:42:27 PM	Main Vac valve closed
8/1/2012	5:42:27 PM	Bypass valve closed
8/1/2012	5:42:27 PM	Helium valve opened
8/1/2012	5:42:27 PM	Bubbler valve opened
8/1/2012	5:42:27 PM	Helium MFC set to  500.000000
8/1/2012	5:42:27 PM	H2 MFC set to  0.000000
8/1/2012	5:42:27 PM	BCl3 MFC set to  0.000000
8/1/2012	5:42:27 PM	PH3 MFC set to  0.000000
8/1/2012	5:42:27 PM	SiCl4 MFC set to  0.000000
8/1/2012	5:42:27 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	5:42:27 PM	Tube furnace set to 0
8/1/2012	5:49:47 PM	Run aborted at 5:49 PM
8/1/2012	5:49:47 PM	Helium valve closed
8/1/2012	5:49:47 PM	H2 valve closed
8/1/2012	5:49:47 PM	BCl3 valve closed
8/1/2012	5:49:48 PM	PH3 valve closed
8/1/2012	5:49:48 PM	SiCl4 pre valve closed
8/1/2012	5:49:48 PM	SiCl4 post valve closed
8/1/2012	5:49:48 PM	Bypass valve closed
8/1/2012	5:49:48 PM	Main Vac valve closed
8/1/2012	5:49:48 PM	Bubbler valve closed
8/1/2012	5:49:48 PM	Helium MFC set to  0.000000
8/1/2012	5:49:48 PM	H2 MFC set to  0.000000
8/1/2012	5:49:48 PM	BCl3 MFC set to  0.000000
8/1/2012	5:49:48 PM	PH3 MFC set to  0.000000
8/1/2012	5:49:48 PM	SiCl4 MFC set to  0.000000
8/1/2012	5:49:48 PM	Tube furnace set to 0
8/1/2012	5:49:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/1/2012	5:49:50 PM	Recipe started at 5:49 PM
8/1/2012	5:49:50 PM	Helium valve closed
8/1/2012	5:49:50 PM	H2 valve closed
8/1/2012	5:49:50 PM	BCl3 valve closed
8/1/2012	5:49:50 PM	PH3 valve closed
8/1/2012	5:49:50 PM	SiCl4 pre valve closed
8/1/2012	5:49:50 PM	SiCl4 post valve closed
8/1/2012	5:49:50 PM	Main Vac valve closed
8/1/2012	5:49:50 PM	Bypass valve closed
8/1/2012	5:49:50 PM	Bubbler valve closed
8/1/2012	5:49:50 PM	Helium MFC set to  0.000000
8/1/2012	5:49:50 PM	H2 MFC set to  0.000000
8/1/2012	5:49:50 PM	BCl3 MFC set to  0.000000
8/1/2012	5:49:50 PM	PH3 MFC set to  0.000000
8/1/2012	5:49:50 PM	SiCl4 MFC set to  0.000000
8/1/2012	5:49:50 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	5:49:50 PM	Tube furnace set to 0
8/1/2012	5:49:53 PM	H2 valve closed
8/1/2012	5:49:53 PM	BCl3 valve closed
8/1/2012	5:49:53 PM	PH3 valve closed
8/1/2012	5:49:53 PM	SiCl4 pre valve closed
8/1/2012	5:49:53 PM	SiCl4 post valve closed
8/1/2012	5:49:53 PM	Main Vac valve closed
8/1/2012	5:49:53 PM	Bypass valve closed
8/1/2012	5:49:53 PM	Bubbler valve closed
8/1/2012	5:49:53 PM	Helium valve opened
8/1/2012	5:49:53 PM	Helium MFC set to  500.000000
8/1/2012	5:49:53 PM	H2 MFC set to  0.000000
8/1/2012	5:49:53 PM	BCl3 MFC set to  0.000000
8/1/2012	5:49:53 PM	PH3 MFC set to  0.000000
8/1/2012	5:49:53 PM	SiCl4 MFC set to  0.000000
8/1/2012	5:49:53 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	5:49:53 PM	Tube furnace set to 0
8/1/2012	5:49:53 PM	Helium valve closed
8/1/2012	5:49:53 PM	H2 valve closed
8/1/2012	5:49:53 PM	BCl3 valve closed
8/1/2012	5:49:53 PM	PH3 valve closed
8/1/2012	5:49:53 PM	SiCl4 pre valve closed
8/1/2012	5:49:53 PM	SiCl4 post valve closed
8/1/2012	5:49:53 PM	Main Vac valve closed
8/1/2012	5:49:53 PM	Bypass valve closed
8/1/2012	5:49:53 PM	Bubbler valve closed
8/1/2012	5:49:53 PM	Helium MFC set to  0.000000
8/1/2012	5:49:53 PM	H2 MFC set to  0.000000
8/1/2012	5:49:53 PM	BCl3 MFC set to  0.000000
8/1/2012	5:49:53 PM	PH3 MFC set to  0.000000
8/1/2012	5:49:53 PM	SiCl4 MFC set to  0.000000
8/1/2012	5:49:53 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	5:49:54 PM	Tube furnace set to 0
8/1/2012	5:49:55 PM	Run finished at 5:49 PM
8/1/2012	5:49:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/1/2012	5:56:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/1/2012	5:56:20 PM	Recipe started at 5:56 PM
8/1/2012	5:56:20 PM	Helium valve closed
8/1/2012	5:56:20 PM	H2 valve closed
8/1/2012	5:56:20 PM	BCl3 valve closed
8/1/2012	5:56:20 PM	PH3 valve closed
8/1/2012	5:56:20 PM	SiCl4 pre valve closed
8/1/2012	5:56:20 PM	SiCl4 post valve closed
8/1/2012	5:56:20 PM	Main Vac valve closed
8/1/2012	5:56:20 PM	Bubbler valve closed
8/1/2012	5:56:20 PM	Bypass valve opened
8/1/2012	5:56:20 PM	Helium MFC set to  0.000000
8/1/2012	5:56:20 PM	H2 MFC set to  0.000000
8/1/2012	5:56:20 PM	BCl3 MFC set to  0.000000
8/1/2012	5:56:20 PM	PH3 MFC set to  0.000000
8/1/2012	5:56:20 PM	SiCl4 MFC set to  0.000000
8/1/2012	5:56:20 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	5:56:20 PM	Tube furnace set to 0
8/1/2012	5:57:25 PM	Helium valve closed
8/1/2012	5:57:25 PM	H2 valve closed
8/1/2012	5:57:25 PM	BCl3 valve closed
8/1/2012	5:57:25 PM	PH3 valve closed
8/1/2012	5:57:25 PM	SiCl4 pre valve closed
8/1/2012	5:57:25 PM	SiCl4 post valve closed
8/1/2012	5:57:25 PM	Main Vac valve closed
8/1/2012	5:57:25 PM	Bubbler valve closed
8/1/2012	5:57:25 PM	Bypass valve opened
8/1/2012	5:57:25 PM	Helium MFC set to  0.000000
8/1/2012	5:57:25 PM	H2 MFC set to  0.000000
8/1/2012	5:57:25 PM	BCl3 MFC set to  0.000000
8/1/2012	5:57:25 PM	PH3 MFC set to  0.000000
8/1/2012	5:57:25 PM	SiCl4 MFC set to  0.000000
8/1/2012	5:57:25 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	5:57:25 PM	Tube furnace set to 0
8/1/2012	5:58:25 PM	Helium valve closed
8/1/2012	5:58:25 PM	H2 valve closed
8/1/2012	5:58:25 PM	BCl3 valve closed
8/1/2012	5:58:25 PM	PH3 valve closed
8/1/2012	5:58:25 PM	SiCl4 pre valve closed
8/1/2012	5:58:25 PM	SiCl4 post valve closed
8/1/2012	5:58:25 PM	Bypass valve closed
8/1/2012	5:58:25 PM	Bubbler valve closed
8/1/2012	5:58:25 PM	Main Vac valve opened
8/1/2012	5:58:25 PM	Helium MFC set to  0.000000
8/1/2012	5:58:25 PM	H2 MFC set to  0.000000
8/1/2012	5:58:25 PM	BCl3 MFC set to  0.000000
8/1/2012	5:58:25 PM	PH3 MFC set to  0.000000
8/1/2012	5:58:25 PM	SiCl4 MFC set to  0.000000
8/1/2012	5:58:25 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	5:58:26 PM	Tube furnace set to 0
8/1/2012	5:58:27 PM	Run finished at 5:58 PM
8/1/2012	5:58:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/1/2012	5:59:41 PM	Recipe started at 5:59 PM
8/1/2012	5:59:41 PM	Helium valve closed
8/1/2012	5:59:41 PM	H2 valve closed
8/1/2012	5:59:41 PM	BCl3 valve closed
8/1/2012	5:59:41 PM	PH3 valve closed
8/1/2012	5:59:41 PM	SiCl4 pre valve closed
8/1/2012	5:59:41 PM	SiCl4 post valve closed
8/1/2012	5:59:41 PM	Bypass valve closed
8/1/2012	5:59:41 PM	Bubbler valve closed
8/1/2012	5:59:41 PM	Main Vac valve opened
8/1/2012	5:59:41 PM	Helium MFC set to  0.000000
8/1/2012	5:59:41 PM	H2 MFC set to  0.000000
8/1/2012	5:59:41 PM	BCl3 MFC set to  0.000000
8/1/2012	5:59:41 PM	PH3 MFC set to  0.000000
8/1/2012	5:59:41 PM	SiCl4 MFC set to  0.000000
8/1/2012	5:59:41 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	5:59:41 PM	Tube furnace set to 150
8/1/2012	6:00:12 PM	H2 valve closed
8/1/2012	6:00:12 PM	BCl3 valve closed
8/1/2012	6:00:12 PM	PH3 valve closed
8/1/2012	6:00:12 PM	SiCl4 pre valve closed
8/1/2012	6:00:12 PM	SiCl4 post valve closed
8/1/2012	6:00:12 PM	Bypass valve closed
8/1/2012	6:00:12 PM	Bubbler valve closed
8/1/2012	6:00:12 PM	Helium valve opened
8/1/2012	6:00:12 PM	Main Vac valve opened
8/1/2012	6:00:12 PM	Helium MFC set to  20.000000
8/1/2012	6:00:12 PM	H2 MFC set to  0.000000
8/1/2012	6:00:12 PM	BCl3 MFC set to  0.000000
8/1/2012	6:00:12 PM	PH3 MFC set to  0.000000
8/1/2012	6:00:12 PM	SiCl4 MFC set to  0.000000
8/1/2012	6:00:12 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	6:00:12 PM	Tube furnace set to 150
8/1/2012	6:00:42 PM	Helium valve closed
8/1/2012	6:00:42 PM	H2 valve closed
8/1/2012	6:00:42 PM	BCl3 valve closed
8/1/2012	6:00:42 PM	PH3 valve closed
8/1/2012	6:00:42 PM	SiCl4 pre valve closed
8/1/2012	6:00:42 PM	SiCl4 post valve closed
8/1/2012	6:00:42 PM	Bypass valve closed
8/1/2012	6:00:42 PM	Bubbler valve closed
8/1/2012	6:00:42 PM	Main Vac valve opened
8/1/2012	6:00:42 PM	Helium MFC set to  0.000000
8/1/2012	6:00:42 PM	H2 MFC set to  0.000000
8/1/2012	6:00:42 PM	BCl3 MFC set to  0.000000
8/1/2012	6:00:42 PM	PH3 MFC set to  0.000000
8/1/2012	6:00:42 PM	SiCl4 MFC set to  0.000000
8/1/2012	6:00:42 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	6:00:42 PM	Tube furnace set to 150
8/1/2012	6:01:12 PM	H2 valve closed
8/1/2012	6:01:12 PM	BCl3 valve closed
8/1/2012	6:01:12 PM	PH3 valve closed
8/1/2012	6:01:12 PM	SiCl4 pre valve closed
8/1/2012	6:01:12 PM	SiCl4 post valve closed
8/1/2012	6:01:12 PM	Bypass valve closed
8/1/2012	6:01:12 PM	Bubbler valve closed
8/1/2012	6:01:12 PM	Helium valve opened
8/1/2012	6:01:12 PM	Main Vac valve opened
8/1/2012	6:01:12 PM	Helium MFC set to  20.000000
8/1/2012	6:01:12 PM	H2 MFC set to  0.000000
8/1/2012	6:01:12 PM	BCl3 MFC set to  0.000000
8/1/2012	6:01:12 PM	PH3 MFC set to  0.000000
8/1/2012	6:01:12 PM	SiCl4 MFC set to  0.000000
8/1/2012	6:01:12 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	6:01:12 PM	Tube furnace set to 150
8/1/2012	6:01:42 PM	Helium valve closed
8/1/2012	6:01:42 PM	H2 valve closed
8/1/2012	6:01:42 PM	BCl3 valve closed
8/1/2012	6:01:42 PM	PH3 valve closed
8/1/2012	6:01:42 PM	SiCl4 pre valve closed
8/1/2012	6:01:42 PM	SiCl4 post valve closed
8/1/2012	6:01:42 PM	Bypass valve closed
8/1/2012	6:01:42 PM	Bubbler valve closed
8/1/2012	6:01:42 PM	Main Vac valve opened
8/1/2012	6:01:42 PM	Helium MFC set to  0.000000
8/1/2012	6:01:42 PM	H2 MFC set to  0.000000
8/1/2012	6:01:42 PM	BCl3 MFC set to  0.000000
8/1/2012	6:01:42 PM	PH3 MFC set to  0.000000
8/1/2012	6:01:42 PM	SiCl4 MFC set to  0.000000
8/1/2012	6:01:42 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	6:01:42 PM	Tube furnace set to 150
8/1/2012	6:02:12 PM	H2 valve closed
8/1/2012	6:02:12 PM	BCl3 valve closed
8/1/2012	6:02:12 PM	PH3 valve closed
8/1/2012	6:02:12 PM	SiCl4 pre valve closed
8/1/2012	6:02:12 PM	SiCl4 post valve closed
8/1/2012	6:02:12 PM	Bypass valve closed
8/1/2012	6:02:12 PM	Bubbler valve closed
8/1/2012	6:02:13 PM	Helium valve opened
8/1/2012	6:02:13 PM	Main Vac valve opened
8/1/2012	6:02:13 PM	Helium MFC set to  20.000000
8/1/2012	6:02:13 PM	H2 MFC set to  0.000000
8/1/2012	6:02:13 PM	BCl3 MFC set to  0.000000
8/1/2012	6:02:13 PM	PH3 MFC set to  0.000000
8/1/2012	6:02:13 PM	SiCl4 MFC set to  0.000000
8/1/2012	6:02:13 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	6:02:13 PM	Tube furnace set to 150
8/1/2012	6:04:13 PM	Helium valve closed
8/1/2012	6:04:13 PM	H2 valve closed
8/1/2012	6:04:13 PM	BCl3 valve closed
8/1/2012	6:04:13 PM	PH3 valve closed
8/1/2012	6:04:13 PM	SiCl4 pre valve closed
8/1/2012	6:04:13 PM	SiCl4 post valve closed
8/1/2012	6:04:13 PM	Bypass valve closed
8/1/2012	6:04:13 PM	Bubbler valve closed
8/1/2012	6:04:13 PM	Main Vac valve opened
8/1/2012	6:04:13 PM	Helium MFC set to  0.000000
8/1/2012	6:04:13 PM	H2 MFC set to  0.000000
8/1/2012	6:04:13 PM	BCl3 MFC set to  0.000000
8/1/2012	6:04:13 PM	PH3 MFC set to  0.000000
8/1/2012	6:04:13 PM	SiCl4 MFC set to  0.000000
8/1/2012	6:04:13 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	6:04:13 PM	Tube furnace set to 150
8/1/2012	6:04:43 PM	H2 valve closed
8/1/2012	6:04:43 PM	BCl3 valve closed
8/1/2012	6:04:43 PM	PH3 valve closed
8/1/2012	6:04:43 PM	SiCl4 pre valve closed
8/1/2012	6:04:43 PM	SiCl4 post valve closed
8/1/2012	6:04:43 PM	Bypass valve closed
8/1/2012	6:04:43 PM	Bubbler valve closed
8/1/2012	6:04:43 PM	Helium valve opened
8/1/2012	6:04:43 PM	Main Vac valve opened
8/1/2012	6:04:43 PM	Helium MFC set to  20.000000
8/1/2012	6:04:43 PM	H2 MFC set to  0.000000
8/1/2012	6:04:43 PM	BCl3 MFC set to  0.000000
8/1/2012	6:04:43 PM	PH3 MFC set to  0.000000
8/1/2012	6:04:43 PM	SiCl4 MFC set to  0.000000
8/1/2012	6:04:43 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	6:04:43 PM	Tube furnace set to 150
8/1/2012	6:05:13 PM	Helium valve closed
8/1/2012	6:05:13 PM	H2 valve closed
8/1/2012	6:05:13 PM	BCl3 valve closed
8/1/2012	6:05:13 PM	PH3 valve closed
8/1/2012	6:05:13 PM	SiCl4 pre valve closed
8/1/2012	6:05:13 PM	SiCl4 post valve closed
8/1/2012	6:05:13 PM	Bypass valve closed
8/1/2012	6:05:13 PM	Bubbler valve closed
8/1/2012	6:05:13 PM	Main Vac valve opened
8/1/2012	6:05:13 PM	Helium MFC set to  0.000000
8/1/2012	6:05:13 PM	H2 MFC set to  0.000000
8/1/2012	6:05:13 PM	BCl3 MFC set to  0.000000
8/1/2012	6:05:13 PM	PH3 MFC set to  0.000000
8/1/2012	6:05:13 PM	SiCl4 MFC set to  0.000000
8/1/2012	6:05:13 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	6:05:13 PM	Tube furnace set to 150
8/1/2012	6:05:43 PM	H2 valve closed
8/1/2012	6:05:43 PM	BCl3 valve closed
8/1/2012	6:05:43 PM	PH3 valve closed
8/1/2012	6:05:43 PM	SiCl4 pre valve closed
8/1/2012	6:05:43 PM	SiCl4 post valve closed
8/1/2012	6:05:43 PM	Bypass valve closed
8/1/2012	6:05:43 PM	Bubbler valve closed
8/1/2012	6:05:43 PM	Helium valve opened
8/1/2012	6:05:43 PM	Main Vac valve opened
8/1/2012	6:05:43 PM	Helium MFC set to  20.000000
8/1/2012	6:05:43 PM	H2 MFC set to  0.000000
8/1/2012	6:05:43 PM	BCl3 MFC set to  0.000000
8/1/2012	6:05:43 PM	PH3 MFC set to  0.000000
8/1/2012	6:05:43 PM	SiCl4 MFC set to  0.000000
8/1/2012	6:05:43 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	6:05:44 PM	Tube furnace set to 150
8/1/2012	6:06:14 PM	Helium valve closed
8/1/2012	6:06:14 PM	H2 valve closed
8/1/2012	6:06:14 PM	BCl3 valve closed
8/1/2012	6:06:14 PM	PH3 valve closed
8/1/2012	6:06:14 PM	SiCl4 pre valve closed
8/1/2012	6:06:14 PM	SiCl4 post valve closed
8/1/2012	6:06:14 PM	Bypass valve closed
8/1/2012	6:06:14 PM	Bubbler valve closed
8/1/2012	6:06:14 PM	Main Vac valve opened
8/1/2012	6:06:14 PM	Helium MFC set to  0.000000
8/1/2012	6:06:14 PM	H2 MFC set to  0.000000
8/1/2012	6:06:14 PM	BCl3 MFC set to  0.000000
8/1/2012	6:06:14 PM	PH3 MFC set to  0.000000
8/1/2012	6:06:14 PM	SiCl4 MFC set to  0.000000
8/1/2012	6:06:14 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	6:06:14 PM	Tube furnace set to 150
8/1/2012	6:06:44 PM	H2 valve closed
8/1/2012	6:06:44 PM	BCl3 valve closed
8/1/2012	6:06:44 PM	PH3 valve closed
8/1/2012	6:06:44 PM	SiCl4 pre valve closed
8/1/2012	6:06:44 PM	SiCl4 post valve closed
8/1/2012	6:06:44 PM	Bypass valve closed
8/1/2012	6:06:44 PM	Bubbler valve closed
8/1/2012	6:06:44 PM	Helium valve opened
8/1/2012	6:06:44 PM	Main Vac valve opened
8/1/2012	6:06:44 PM	Helium MFC set to  20.000000
8/1/2012	6:06:44 PM	H2 MFC set to  0.000000
8/1/2012	6:06:44 PM	BCl3 MFC set to  0.000000
8/1/2012	6:06:44 PM	PH3 MFC set to  0.000000
8/1/2012	6:06:44 PM	SiCl4 MFC set to  0.000000
8/1/2012	6:06:44 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	6:06:44 PM	Tube furnace set to 150
8/1/2012	6:08:44 PM	Helium valve closed
8/1/2012	6:08:44 PM	H2 valve closed
8/1/2012	6:08:44 PM	BCl3 valve closed
8/1/2012	6:08:44 PM	PH3 valve closed
8/1/2012	6:08:44 PM	SiCl4 pre valve closed
8/1/2012	6:08:44 PM	SiCl4 post valve closed
8/1/2012	6:08:44 PM	Bypass valve closed
8/1/2012	6:08:44 PM	Bubbler valve closed
8/1/2012	6:08:44 PM	Main Vac valve opened
8/1/2012	6:08:44 PM	Helium MFC set to  0.000000
8/1/2012	6:08:44 PM	H2 MFC set to  0.000000
8/1/2012	6:08:44 PM	BCl3 MFC set to  0.000000
8/1/2012	6:08:44 PM	PH3 MFC set to  0.000000
8/1/2012	6:08:44 PM	SiCl4 MFC set to  0.000000
8/1/2012	6:08:44 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	6:08:44 PM	Tube furnace set to 150
8/1/2012	6:09:14 PM	H2 valve closed
8/1/2012	6:09:14 PM	BCl3 valve closed
8/1/2012	6:09:14 PM	PH3 valve closed
8/1/2012	6:09:14 PM	SiCl4 pre valve closed
8/1/2012	6:09:14 PM	SiCl4 post valve closed
8/1/2012	6:09:14 PM	Bypass valve closed
8/1/2012	6:09:14 PM	Bubbler valve closed
8/1/2012	6:09:14 PM	Helium valve opened
8/1/2012	6:09:14 PM	Main Vac valve opened
8/1/2012	6:09:14 PM	Helium MFC set to  20.000000
8/1/2012	6:09:14 PM	H2 MFC set to  0.000000
8/1/2012	6:09:14 PM	BCl3 MFC set to  0.000000
8/1/2012	6:09:14 PM	PH3 MFC set to  0.000000
8/1/2012	6:09:14 PM	SiCl4 MFC set to  0.000000
8/1/2012	6:09:14 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	6:09:15 PM	Tube furnace set to 150
8/1/2012	6:09:45 PM	Helium valve closed
8/1/2012	6:09:45 PM	H2 valve closed
8/1/2012	6:09:45 PM	BCl3 valve closed
8/1/2012	6:09:45 PM	PH3 valve closed
8/1/2012	6:09:45 PM	SiCl4 pre valve closed
8/1/2012	6:09:45 PM	SiCl4 post valve closed
8/1/2012	6:09:45 PM	Bypass valve closed
8/1/2012	6:09:45 PM	Bubbler valve closed
8/1/2012	6:09:45 PM	Main Vac valve opened
8/1/2012	6:09:45 PM	Helium MFC set to  0.000000
8/1/2012	6:09:45 PM	H2 MFC set to  0.000000
8/1/2012	6:09:45 PM	BCl3 MFC set to  0.000000
8/1/2012	6:09:45 PM	PH3 MFC set to  0.000000
8/1/2012	6:09:45 PM	SiCl4 MFC set to  0.000000
8/1/2012	6:09:45 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	6:09:45 PM	Tube furnace set to 150
8/1/2012	6:10:15 PM	H2 valve closed
8/1/2012	6:10:15 PM	BCl3 valve closed
8/1/2012	6:10:15 PM	PH3 valve closed
8/1/2012	6:10:15 PM	SiCl4 pre valve closed
8/1/2012	6:10:15 PM	SiCl4 post valve closed
8/1/2012	6:10:15 PM	Bypass valve closed
8/1/2012	6:10:15 PM	Bubbler valve closed
8/1/2012	6:10:15 PM	Helium valve opened
8/1/2012	6:10:15 PM	Main Vac valve opened
8/1/2012	6:10:15 PM	Helium MFC set to  20.000000
8/1/2012	6:10:15 PM	H2 MFC set to  0.000000
8/1/2012	6:10:15 PM	BCl3 MFC set to  0.000000
8/1/2012	6:10:15 PM	PH3 MFC set to  0.000000
8/1/2012	6:10:15 PM	SiCl4 MFC set to  0.000000
8/1/2012	6:10:15 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	6:10:15 PM	Tube furnace set to 150
8/1/2012	6:12:15 PM	Helium valve closed
8/1/2012	6:12:15 PM	H2 valve closed
8/1/2012	6:12:15 PM	BCl3 valve closed
8/1/2012	6:12:15 PM	PH3 valve closed
8/1/2012	6:12:15 PM	SiCl4 pre valve closed
8/1/2012	6:12:15 PM	SiCl4 post valve closed
8/1/2012	6:12:15 PM	Bypass valve closed
8/1/2012	6:12:15 PM	Bubbler valve closed
8/1/2012	6:12:15 PM	Main Vac valve opened
8/1/2012	6:12:15 PM	Helium MFC set to  0.000000
8/1/2012	6:12:15 PM	H2 MFC set to  0.000000
8/1/2012	6:12:15 PM	BCl3 MFC set to  0.000000
8/1/2012	6:12:15 PM	PH3 MFC set to  0.000000
8/1/2012	6:12:15 PM	SiCl4 MFC set to  0.000000
8/1/2012	6:12:15 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	6:12:15 PM	Tube furnace set to 150
8/1/2012	6:12:45 PM	H2 valve closed
8/1/2012	6:12:45 PM	BCl3 valve closed
8/1/2012	6:12:45 PM	PH3 valve closed
8/1/2012	6:12:45 PM	SiCl4 pre valve closed
8/1/2012	6:12:45 PM	SiCl4 post valve closed
8/1/2012	6:12:45 PM	Bypass valve closed
8/1/2012	6:12:45 PM	Bubbler valve closed
8/1/2012	6:12:45 PM	Helium valve opened
8/1/2012	6:12:45 PM	Main Vac valve opened
8/1/2012	6:12:45 PM	Helium MFC set to  20.000000
8/1/2012	6:12:45 PM	H2 MFC set to  0.000000
8/1/2012	6:12:45 PM	BCl3 MFC set to  0.000000
8/1/2012	6:12:45 PM	PH3 MFC set to  0.000000
8/1/2012	6:12:45 PM	SiCl4 MFC set to  0.000000
8/1/2012	6:12:45 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	6:12:46 PM	Tube furnace set to 150
8/1/2012	6:13:16 PM	Helium valve closed
8/1/2012	6:13:16 PM	H2 valve closed
8/1/2012	6:13:16 PM	BCl3 valve closed
8/1/2012	6:13:16 PM	PH3 valve closed
8/1/2012	6:13:16 PM	SiCl4 pre valve closed
8/1/2012	6:13:16 PM	SiCl4 post valve closed
8/1/2012	6:13:16 PM	Bypass valve closed
8/1/2012	6:13:16 PM	Bubbler valve closed
8/1/2012	6:13:16 PM	Main Vac valve opened
8/1/2012	6:13:16 PM	Helium MFC set to  0.000000
8/1/2012	6:13:16 PM	H2 MFC set to  0.000000
8/1/2012	6:13:16 PM	BCl3 MFC set to  0.000000
8/1/2012	6:13:16 PM	PH3 MFC set to  0.000000
8/1/2012	6:13:16 PM	SiCl4 MFC set to  0.000000
8/1/2012	6:13:16 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	6:13:16 PM	Tube furnace set to 150
8/1/2012	6:13:46 PM	H2 valve closed
8/1/2012	6:13:46 PM	BCl3 valve closed
8/1/2012	6:13:46 PM	PH3 valve closed
8/1/2012	6:13:46 PM	SiCl4 pre valve closed
8/1/2012	6:13:46 PM	SiCl4 post valve closed
8/1/2012	6:13:46 PM	Bypass valve closed
8/1/2012	6:13:46 PM	Bubbler valve closed
8/1/2012	6:13:46 PM	Helium valve opened
8/1/2012	6:13:46 PM	Main Vac valve opened
8/1/2012	6:13:46 PM	Helium MFC set to  20.000000
8/1/2012	6:13:46 PM	H2 MFC set to  0.000000
8/1/2012	6:13:46 PM	BCl3 MFC set to  0.000000
8/1/2012	6:13:46 PM	PH3 MFC set to  0.000000
8/1/2012	6:13:46 PM	SiCl4 MFC set to  0.000000
8/1/2012	6:13:46 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	6:13:46 PM	Tube furnace set to 150
8/1/2012	6:15:46 PM	Helium valve closed
8/1/2012	6:15:46 PM	H2 valve closed
8/1/2012	6:15:46 PM	BCl3 valve closed
8/1/2012	6:15:46 PM	PH3 valve closed
8/1/2012	6:15:46 PM	SiCl4 pre valve closed
8/1/2012	6:15:46 PM	SiCl4 post valve closed
8/1/2012	6:15:46 PM	Bypass valve closed
8/1/2012	6:15:46 PM	Bubbler valve closed
8/1/2012	6:15:46 PM	Main Vac valve opened
8/1/2012	6:15:46 PM	Helium MFC set to  0.000000
8/1/2012	6:15:46 PM	H2 MFC set to  0.000000
8/1/2012	6:15:46 PM	BCl3 MFC set to  0.000000
8/1/2012	6:15:46 PM	PH3 MFC set to  0.000000
8/1/2012	6:15:46 PM	SiCl4 MFC set to  0.000000
8/1/2012	6:15:46 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	6:15:46 PM	Tube furnace set to 150
8/1/2012	6:15:47 PM	Run finished at 6:15 PM
8/1/2012	7:18:23 PM	Recipe started at 7:18 PM
8/1/2012	7:18:23 PM	Helium valve closed
8/1/2012	7:18:23 PM	H2 valve closed
8/1/2012	7:18:23 PM	BCl3 valve closed
8/1/2012	7:18:23 PM	PH3 valve closed
8/1/2012	7:18:23 PM	SiCl4 pre valve closed
8/1/2012	7:18:23 PM	SiCl4 post valve closed
8/1/2012	7:18:23 PM	Main Vac valve closed
8/1/2012	7:18:23 PM	Bypass valve closed
8/1/2012	7:18:23 PM	Bubbler valve closed
8/1/2012	7:18:23 PM	Helium MFC set to  0.000000
8/1/2012	7:18:23 PM	H2 MFC set to  0.000000
8/1/2012	7:18:23 PM	BCl3 MFC set to  0.000000
8/1/2012	7:18:23 PM	PH3 MFC set to  0.000000
8/1/2012	7:18:23 PM	SiCl4 MFC set to  0.000000
8/1/2012	7:18:23 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	7:18:23 PM	Tube furnace set to 0
8/1/2012	7:18:26 PM	Helium valve closed
8/1/2012	7:18:26 PM	BCl3 valve closed
8/1/2012	7:18:26 PM	PH3 valve closed
8/1/2012	7:18:26 PM	SiCl4 pre valve closed
8/1/2012	7:18:26 PM	SiCl4 post valve closed
8/1/2012	7:18:26 PM	Main Vac valve closed
8/1/2012	7:18:26 PM	Bypass valve closed
8/1/2012	7:18:26 PM	Bubbler valve closed
8/1/2012	7:18:26 PM	H2 valve opened
8/1/2012	7:18:26 PM	Helium MFC set to  0.000000
8/1/2012	7:18:26 PM	H2 MFC set to  500.000000
8/1/2012	7:18:26 PM	BCl3 MFC set to  0.000000
8/1/2012	7:18:26 PM	PH3 MFC set to  0.000000
8/1/2012	7:18:26 PM	SiCl4 MFC set to  0.000000
8/1/2012	7:18:26 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	7:18:26 PM	Tube furnace set to 0
8/1/2012	7:19:38 PM	Helium valve closed
8/1/2012	7:19:38 PM	BCl3 valve closed
8/1/2012	7:19:38 PM	PH3 valve closed
8/1/2012	7:19:38 PM	SiCl4 pre valve closed
8/1/2012	7:19:38 PM	SiCl4 post valve closed
8/1/2012	7:19:38 PM	Main Vac valve closed
8/1/2012	7:19:38 PM	Bypass valve closed
8/1/2012	7:19:38 PM	H2 valve opened
8/1/2012	7:19:38 PM	Bubbler valve opened
8/1/2012	7:19:38 PM	Helium MFC set to  0.000000
8/1/2012	7:19:38 PM	H2 MFC set to  500.000000
8/1/2012	7:19:38 PM	BCl3 MFC set to  0.000000
8/1/2012	7:19:38 PM	PH3 MFC set to  0.000000
8/1/2012	7:19:38 PM	SiCl4 MFC set to  0.000000
8/1/2012	7:19:38 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	7:19:38 PM	Tube furnace set to 0
8/1/2012	7:19:39 PM	Helium valve closed
8/1/2012	7:19:39 PM	BCl3 valve closed
8/1/2012	7:19:39 PM	PH3 valve closed
8/1/2012	7:19:39 PM	SiCl4 pre valve closed
8/1/2012	7:19:39 PM	SiCl4 post valve closed
8/1/2012	7:19:39 PM	Main Vac valve closed
8/1/2012	7:19:39 PM	Bypass valve closed
8/1/2012	7:19:39 PM	H2 valve opened
8/1/2012	7:19:39 PM	Bubbler valve opened
8/1/2012	7:19:39 PM	Helium MFC set to  0.000000
8/1/2012	7:19:39 PM	H2 MFC set to  500.000000
8/1/2012	7:19:39 PM	BCl3 MFC set to  0.000000
8/1/2012	7:19:39 PM	PH3 MFC set to  0.000000
8/1/2012	7:19:39 PM	SiCl4 MFC set to  0.000000
8/1/2012	7:19:39 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	7:19:39 PM	Tube furnace set to 1000
8/1/2012	7:39:39 PM	Helium valve closed
8/1/2012	7:39:39 PM	BCl3 valve closed
8/1/2012	7:39:39 PM	Main Vac valve closed
8/1/2012	7:39:39 PM	Bypass valve closed
8/1/2012	7:39:39 PM	H2 valve opened
8/1/2012	7:39:39 PM	PH3 valve opened
8/1/2012	7:39:39 PM	SiCl4 pre valve opened
8/1/2012	7:39:39 PM	SiCl4 post valve opened
8/1/2012	7:39:39 PM	Bubbler valve opened
8/1/2012	7:39:39 PM	Helium MFC set to  0.000000
8/1/2012	7:39:39 PM	H2 MFC set to  500.000000
8/1/2012	7:39:39 PM	BCl3 MFC set to  0.000000
8/1/2012	7:39:39 PM	PH3 MFC set to  0.300000
8/1/2012	7:39:39 PM	SiCl4 MFC set to  25.000000
8/1/2012	7:39:39 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	7:39:39 PM	Tube furnace set to 1000
8/1/2012	7:51:39 PM	Helium valve closed
8/1/2012	7:51:39 PM	BCl3 valve closed
8/1/2012	7:51:39 PM	PH3 valve closed
8/1/2012	7:51:39 PM	SiCl4 pre valve closed
8/1/2012	7:51:39 PM	SiCl4 post valve closed
8/1/2012	7:51:39 PM	Main Vac valve closed
8/1/2012	7:51:39 PM	Bypass valve closed
8/1/2012	7:51:39 PM	H2 valve opened
8/1/2012	7:51:39 PM	Bubbler valve opened
8/1/2012	7:51:39 PM	Helium MFC set to  0.000000
8/1/2012	7:51:39 PM	H2 MFC set to  500.000000
8/1/2012	7:51:39 PM	BCl3 MFC set to  0.000000
8/1/2012	7:51:39 PM	PH3 MFC set to  0.000000
8/1/2012	7:51:39 PM	SiCl4 MFC set to  0.000000
8/1/2012	7:51:39 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	7:51:40 PM	Tube furnace set to 750
8/1/2012	7:56:40 PM	H2 valve closed
8/1/2012	7:56:40 PM	BCl3 valve closed
8/1/2012	7:56:40 PM	PH3 valve closed
8/1/2012	7:56:40 PM	SiCl4 pre valve closed
8/1/2012	7:56:40 PM	SiCl4 post valve closed
8/1/2012	7:56:40 PM	Main Vac valve closed
8/1/2012	7:56:40 PM	Bypass valve closed
8/1/2012	7:56:40 PM	Helium valve opened
8/1/2012	7:56:40 PM	Bubbler valve opened
8/1/2012	7:56:40 PM	Helium MFC set to  500.000000
8/1/2012	7:56:40 PM	H2 MFC set to  0.000000
8/1/2012	7:56:40 PM	BCl3 MFC set to  0.000000
8/1/2012	7:56:40 PM	PH3 MFC set to  0.000000
8/1/2012	7:56:40 PM	SiCl4 MFC set to  0.000000
8/1/2012	7:56:40 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	7:56:40 PM	Tube furnace set to 0
8/1/2012	8:10:38 PM	Run aborted at 8:10 PM
8/1/2012	8:10:38 PM	Helium valve closed
8/1/2012	8:10:38 PM	H2 valve closed
8/1/2012	8:10:38 PM	BCl3 valve closed
8/1/2012	8:10:38 PM	PH3 valve closed
8/1/2012	8:10:38 PM	SiCl4 pre valve closed
8/1/2012	8:10:38 PM	SiCl4 post valve closed
8/1/2012	8:10:38 PM	Bypass valve closed
8/1/2012	8:10:38 PM	Main Vac valve closed
8/1/2012	8:10:38 PM	Bubbler valve closed
8/1/2012	8:10:38 PM	Helium MFC set to  0.000000
8/1/2012	8:10:38 PM	H2 MFC set to  0.000000
8/1/2012	8:10:38 PM	BCl3 MFC set to  0.000000
8/1/2012	8:10:38 PM	PH3 MFC set to  0.000000
8/1/2012	8:10:38 PM	SiCl4 MFC set to  0.000000
8/1/2012	8:10:38 PM	Tube furnace set to 0
8/1/2012	8:10:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/1/2012	8:10:40 PM	Recipe started at 8:10 PM
8/1/2012	8:10:40 PM	Helium valve closed
8/1/2012	8:10:40 PM	H2 valve closed
8/1/2012	8:10:41 PM	BCl3 valve closed
8/1/2012	8:10:41 PM	PH3 valve closed
8/1/2012	8:10:41 PM	SiCl4 pre valve closed
8/1/2012	8:10:41 PM	SiCl4 post valve closed
8/1/2012	8:10:41 PM	Main Vac valve closed
8/1/2012	8:10:41 PM	Bypass valve closed
8/1/2012	8:10:41 PM	Bubbler valve closed
8/1/2012	8:10:41 PM	Helium MFC set to  0.000000
8/1/2012	8:10:41 PM	H2 MFC set to  0.000000
8/1/2012	8:10:41 PM	BCl3 MFC set to  0.000000
8/1/2012	8:10:41 PM	PH3 MFC set to  0.000000
8/1/2012	8:10:41 PM	SiCl4 MFC set to  0.000000
8/1/2012	8:10:41 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	8:10:41 PM	Tube furnace set to 0
8/1/2012	8:10:44 PM	H2 valve closed
8/1/2012	8:10:44 PM	BCl3 valve closed
8/1/2012	8:10:44 PM	PH3 valve closed
8/1/2012	8:10:44 PM	SiCl4 pre valve closed
8/1/2012	8:10:44 PM	SiCl4 post valve closed
8/1/2012	8:10:44 PM	Main Vac valve closed
8/1/2012	8:10:44 PM	Bypass valve closed
8/1/2012	8:10:44 PM	Bubbler valve closed
8/1/2012	8:10:44 PM	Helium valve opened
8/1/2012	8:10:44 PM	Helium MFC set to  500.000000
8/1/2012	8:10:44 PM	H2 MFC set to  0.000000
8/1/2012	8:10:44 PM	BCl3 MFC set to  0.000000
8/1/2012	8:10:44 PM	PH3 MFC set to  0.000000
8/1/2012	8:10:44 PM	SiCl4 MFC set to  0.000000
8/1/2012	8:10:44 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	8:10:44 PM	Tube furnace set to 0
8/1/2012	8:10:44 PM	Helium valve closed
8/1/2012	8:10:44 PM	H2 valve closed
8/1/2012	8:10:44 PM	BCl3 valve closed
8/1/2012	8:10:44 PM	PH3 valve closed
8/1/2012	8:10:44 PM	SiCl4 pre valve closed
8/1/2012	8:10:44 PM	SiCl4 post valve closed
8/1/2012	8:10:44 PM	Main Vac valve closed
8/1/2012	8:10:44 PM	Bypass valve closed
8/1/2012	8:10:44 PM	Bubbler valve closed
8/1/2012	8:10:44 PM	Helium MFC set to  0.000000
8/1/2012	8:10:44 PM	H2 MFC set to  0.000000
8/1/2012	8:10:44 PM	BCl3 MFC set to  0.000000
8/1/2012	8:10:44 PM	PH3 MFC set to  0.000000
8/1/2012	8:10:44 PM	SiCl4 MFC set to  0.000000
8/1/2012	8:10:44 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	8:10:44 PM	Tube furnace set to 0
8/1/2012	8:10:45 PM	Run finished at 8:10 PM
8/1/2012	8:10:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/1/2012	8:12:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/1/2012	8:12:48 PM	Recipe started at 8:12 PM
8/1/2012	8:12:48 PM	Helium valve closed
8/1/2012	8:12:48 PM	H2 valve closed
8/1/2012	8:12:48 PM	BCl3 valve closed
8/1/2012	8:12:48 PM	PH3 valve closed
8/1/2012	8:12:48 PM	SiCl4 pre valve closed
8/1/2012	8:12:48 PM	SiCl4 post valve closed
8/1/2012	8:12:48 PM	Main Vac valve closed
8/1/2012	8:12:48 PM	Bubbler valve closed
8/1/2012	8:12:48 PM	Bypass valve opened
8/1/2012	8:12:48 PM	Helium MFC set to  0.000000
8/1/2012	8:12:48 PM	H2 MFC set to  0.000000
8/1/2012	8:12:48 PM	BCl3 MFC set to  0.000000
8/1/2012	8:12:48 PM	PH3 MFC set to  0.000000
8/1/2012	8:12:48 PM	SiCl4 MFC set to  0.000000
8/1/2012	8:12:48 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	8:12:48 PM	Tube furnace set to 0
8/1/2012	8:13:53 PM	Helium valve closed
8/1/2012	8:13:53 PM	H2 valve closed
8/1/2012	8:13:53 PM	BCl3 valve closed
8/1/2012	8:13:53 PM	PH3 valve closed
8/1/2012	8:13:53 PM	SiCl4 pre valve closed
8/1/2012	8:13:53 PM	SiCl4 post valve closed
8/1/2012	8:13:53 PM	Main Vac valve closed
8/1/2012	8:13:53 PM	Bubbler valve closed
8/1/2012	8:13:53 PM	Bypass valve opened
8/1/2012	8:13:53 PM	Helium MFC set to  0.000000
8/1/2012	8:13:53 PM	H2 MFC set to  0.000000
8/1/2012	8:13:53 PM	BCl3 MFC set to  0.000000
8/1/2012	8:13:53 PM	PH3 MFC set to  0.000000
8/1/2012	8:13:53 PM	SiCl4 MFC set to  0.000000
8/1/2012	8:13:53 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	8:13:53 PM	Tube furnace set to 0
8/1/2012	8:14:53 PM	Helium valve closed
8/1/2012	8:14:53 PM	H2 valve closed
8/1/2012	8:14:53 PM	BCl3 valve closed
8/1/2012	8:14:53 PM	PH3 valve closed
8/1/2012	8:14:53 PM	SiCl4 pre valve closed
8/1/2012	8:14:53 PM	SiCl4 post valve closed
8/1/2012	8:14:53 PM	Bypass valve closed
8/1/2012	8:14:53 PM	Bubbler valve closed
8/1/2012	8:14:53 PM	Main Vac valve opened
8/1/2012	8:14:53 PM	Helium MFC set to  0.000000
8/1/2012	8:14:53 PM	H2 MFC set to  0.000000
8/1/2012	8:14:53 PM	BCl3 MFC set to  0.000000
8/1/2012	8:14:53 PM	PH3 MFC set to  0.000000
8/1/2012	8:14:53 PM	SiCl4 MFC set to  0.000000
8/1/2012	8:14:53 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	8:14:54 PM	Tube furnace set to 0
8/1/2012	8:14:55 PM	Run finished at 8:14 PM
8/1/2012	8:14:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/1/2012	8:15:52 PM	Recipe started at 8:15 PM
8/1/2012	8:15:52 PM	Helium valve closed
8/1/2012	8:15:52 PM	H2 valve closed
8/1/2012	8:15:52 PM	BCl3 valve closed
8/1/2012	8:15:52 PM	PH3 valve closed
8/1/2012	8:15:52 PM	SiCl4 pre valve closed
8/1/2012	8:15:52 PM	SiCl4 post valve closed
8/1/2012	8:15:52 PM	Bypass valve closed
8/1/2012	8:15:52 PM	Bubbler valve closed
8/1/2012	8:15:52 PM	Main Vac valve opened
8/1/2012	8:15:52 PM	Helium MFC set to  0.000000
8/1/2012	8:15:52 PM	H2 MFC set to  0.000000
8/1/2012	8:15:52 PM	BCl3 MFC set to  0.000000
8/1/2012	8:15:52 PM	PH3 MFC set to  0.000000
8/1/2012	8:15:52 PM	SiCl4 MFC set to  0.000000
8/1/2012	8:15:52 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	8:15:52 PM	Tube furnace set to 150
8/1/2012	8:16:22 PM	H2 valve closed
8/1/2012	8:16:22 PM	BCl3 valve closed
8/1/2012	8:16:22 PM	PH3 valve closed
8/1/2012	8:16:22 PM	SiCl4 pre valve closed
8/1/2012	8:16:22 PM	SiCl4 post valve closed
8/1/2012	8:16:22 PM	Bypass valve closed
8/1/2012	8:16:22 PM	Bubbler valve closed
8/1/2012	8:16:22 PM	Helium valve opened
8/1/2012	8:16:22 PM	Main Vac valve opened
8/1/2012	8:16:22 PM	Helium MFC set to  20.000000
8/1/2012	8:16:22 PM	H2 MFC set to  0.000000
8/1/2012	8:16:22 PM	BCl3 MFC set to  0.000000
8/1/2012	8:16:22 PM	PH3 MFC set to  0.000000
8/1/2012	8:16:22 PM	SiCl4 MFC set to  0.000000
8/1/2012	8:16:22 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	8:16:22 PM	Tube furnace set to 150
8/1/2012	8:16:53 PM	Helium valve closed
8/1/2012	8:16:53 PM	H2 valve closed
8/1/2012	8:16:53 PM	BCl3 valve closed
8/1/2012	8:16:53 PM	PH3 valve closed
8/1/2012	8:16:53 PM	SiCl4 pre valve closed
8/1/2012	8:16:53 PM	SiCl4 post valve closed
8/1/2012	8:16:53 PM	Bypass valve closed
8/1/2012	8:16:53 PM	Bubbler valve closed
8/1/2012	8:16:53 PM	Main Vac valve opened
8/1/2012	8:16:53 PM	Helium MFC set to  0.000000
8/1/2012	8:16:53 PM	H2 MFC set to  0.000000
8/1/2012	8:16:53 PM	BCl3 MFC set to  0.000000
8/1/2012	8:16:53 PM	PH3 MFC set to  0.000000
8/1/2012	8:16:53 PM	SiCl4 MFC set to  0.000000
8/1/2012	8:16:53 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	8:16:53 PM	Tube furnace set to 150
8/1/2012	8:17:23 PM	H2 valve closed
8/1/2012	8:17:23 PM	BCl3 valve closed
8/1/2012	8:17:23 PM	PH3 valve closed
8/1/2012	8:17:23 PM	SiCl4 pre valve closed
8/1/2012	8:17:23 PM	SiCl4 post valve closed
8/1/2012	8:17:23 PM	Bypass valve closed
8/1/2012	8:17:23 PM	Bubbler valve closed
8/1/2012	8:17:23 PM	Helium valve opened
8/1/2012	8:17:23 PM	Main Vac valve opened
8/1/2012	8:17:23 PM	Helium MFC set to  20.000000
8/1/2012	8:17:23 PM	H2 MFC set to  0.000000
8/1/2012	8:17:23 PM	BCl3 MFC set to  0.000000
8/1/2012	8:17:23 PM	PH3 MFC set to  0.000000
8/1/2012	8:17:23 PM	SiCl4 MFC set to  0.000000
8/1/2012	8:17:23 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	8:17:23 PM	Tube furnace set to 150
8/1/2012	8:17:53 PM	Helium valve closed
8/1/2012	8:17:53 PM	H2 valve closed
8/1/2012	8:17:53 PM	BCl3 valve closed
8/1/2012	8:17:53 PM	PH3 valve closed
8/1/2012	8:17:53 PM	SiCl4 pre valve closed
8/1/2012	8:17:53 PM	SiCl4 post valve closed
8/1/2012	8:17:53 PM	Bypass valve closed
8/1/2012	8:17:53 PM	Bubbler valve closed
8/1/2012	8:17:53 PM	Main Vac valve opened
8/1/2012	8:17:53 PM	Helium MFC set to  0.000000
8/1/2012	8:17:53 PM	H2 MFC set to  0.000000
8/1/2012	8:17:53 PM	BCl3 MFC set to  0.000000
8/1/2012	8:17:53 PM	PH3 MFC set to  0.000000
8/1/2012	8:17:53 PM	SiCl4 MFC set to  0.000000
8/1/2012	8:17:53 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	8:17:53 PM	Tube furnace set to 150
8/1/2012	8:18:23 PM	H2 valve closed
8/1/2012	8:18:23 PM	BCl3 valve closed
8/1/2012	8:18:23 PM	PH3 valve closed
8/1/2012	8:18:23 PM	SiCl4 pre valve closed
8/1/2012	8:18:23 PM	SiCl4 post valve closed
8/1/2012	8:18:23 PM	Bypass valve closed
8/1/2012	8:18:23 PM	Bubbler valve closed
8/1/2012	8:18:23 PM	Helium valve opened
8/1/2012	8:18:23 PM	Main Vac valve opened
8/1/2012	8:18:23 PM	Helium MFC set to  20.000000
8/1/2012	8:18:23 PM	H2 MFC set to  0.000000
8/1/2012	8:18:23 PM	BCl3 MFC set to  0.000000
8/1/2012	8:18:23 PM	PH3 MFC set to  0.000000
8/1/2012	8:18:23 PM	SiCl4 MFC set to  0.000000
8/1/2012	8:18:23 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	8:18:23 PM	Tube furnace set to 150
8/1/2012	8:20:23 PM	Helium valve closed
8/1/2012	8:20:23 PM	H2 valve closed
8/1/2012	8:20:23 PM	BCl3 valve closed
8/1/2012	8:20:23 PM	PH3 valve closed
8/1/2012	8:20:23 PM	SiCl4 pre valve closed
8/1/2012	8:20:23 PM	SiCl4 post valve closed
8/1/2012	8:20:23 PM	Bypass valve closed
8/1/2012	8:20:23 PM	Bubbler valve closed
8/1/2012	8:20:23 PM	Main Vac valve opened
8/1/2012	8:20:23 PM	Helium MFC set to  0.000000
8/1/2012	8:20:23 PM	H2 MFC set to  0.000000
8/1/2012	8:20:23 PM	BCl3 MFC set to  0.000000
8/1/2012	8:20:24 PM	PH3 MFC set to  0.000000
8/1/2012	8:20:24 PM	SiCl4 MFC set to  0.000000
8/1/2012	8:20:24 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	8:20:24 PM	Tube furnace set to 150
8/1/2012	8:20:54 PM	H2 valve closed
8/1/2012	8:20:54 PM	BCl3 valve closed
8/1/2012	8:20:54 PM	PH3 valve closed
8/1/2012	8:20:54 PM	SiCl4 pre valve closed
8/1/2012	8:20:54 PM	SiCl4 post valve closed
8/1/2012	8:20:54 PM	Bypass valve closed
8/1/2012	8:20:54 PM	Bubbler valve closed
8/1/2012	8:20:54 PM	Helium valve opened
8/1/2012	8:20:54 PM	Main Vac valve opened
8/1/2012	8:20:54 PM	Helium MFC set to  20.000000
8/1/2012	8:20:54 PM	H2 MFC set to  0.000000
8/1/2012	8:20:54 PM	BCl3 MFC set to  0.000000
8/1/2012	8:20:54 PM	PH3 MFC set to  0.000000
8/1/2012	8:20:54 PM	SiCl4 MFC set to  0.000000
8/1/2012	8:20:54 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	8:20:54 PM	Tube furnace set to 150
8/1/2012	8:21:24 PM	Helium valve closed
8/1/2012	8:21:24 PM	H2 valve closed
8/1/2012	8:21:24 PM	BCl3 valve closed
8/1/2012	8:21:24 PM	PH3 valve closed
8/1/2012	8:21:24 PM	SiCl4 pre valve closed
8/1/2012	8:21:24 PM	SiCl4 post valve closed
8/1/2012	8:21:24 PM	Bypass valve closed
8/1/2012	8:21:24 PM	Bubbler valve closed
8/1/2012	8:21:24 PM	Main Vac valve opened
8/1/2012	8:21:24 PM	Helium MFC set to  0.000000
8/1/2012	8:21:24 PM	H2 MFC set to  0.000000
8/1/2012	8:21:24 PM	BCl3 MFC set to  0.000000
8/1/2012	8:21:24 PM	PH3 MFC set to  0.000000
8/1/2012	8:21:24 PM	SiCl4 MFC set to  0.000000
8/1/2012	8:21:24 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	8:21:24 PM	Tube furnace set to 150
8/1/2012	8:21:54 PM	H2 valve closed
8/1/2012	8:21:54 PM	BCl3 valve closed
8/1/2012	8:21:54 PM	PH3 valve closed
8/1/2012	8:21:54 PM	SiCl4 pre valve closed
8/1/2012	8:21:54 PM	SiCl4 post valve closed
8/1/2012	8:21:54 PM	Bypass valve closed
8/1/2012	8:21:54 PM	Bubbler valve closed
8/1/2012	8:21:54 PM	Helium valve opened
8/1/2012	8:21:54 PM	Main Vac valve opened
8/1/2012	8:21:54 PM	Helium MFC set to  20.000000
8/1/2012	8:21:54 PM	H2 MFC set to  0.000000
8/1/2012	8:21:54 PM	BCl3 MFC set to  0.000000
8/1/2012	8:21:54 PM	PH3 MFC set to  0.000000
8/1/2012	8:21:54 PM	SiCl4 MFC set to  0.000000
8/1/2012	8:21:54 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	8:21:54 PM	Tube furnace set to 150
8/1/2012	8:22:24 PM	Helium valve closed
8/1/2012	8:22:24 PM	H2 valve closed
8/1/2012	8:22:24 PM	BCl3 valve closed
8/1/2012	8:22:24 PM	PH3 valve closed
8/1/2012	8:22:24 PM	SiCl4 pre valve closed
8/1/2012	8:22:24 PM	SiCl4 post valve closed
8/1/2012	8:22:24 PM	Bypass valve closed
8/1/2012	8:22:24 PM	Bubbler valve closed
8/1/2012	8:22:24 PM	Main Vac valve opened
8/1/2012	8:22:24 PM	Helium MFC set to  0.000000
8/1/2012	8:22:24 PM	H2 MFC set to  0.000000
8/1/2012	8:22:24 PM	BCl3 MFC set to  0.000000
8/1/2012	8:22:24 PM	PH3 MFC set to  0.000000
8/1/2012	8:22:24 PM	SiCl4 MFC set to  0.000000
8/1/2012	8:22:24 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	8:22:25 PM	Tube furnace set to 150
8/1/2012	8:22:55 PM	H2 valve closed
8/1/2012	8:22:55 PM	BCl3 valve closed
8/1/2012	8:22:55 PM	PH3 valve closed
8/1/2012	8:22:55 PM	SiCl4 pre valve closed
8/1/2012	8:22:55 PM	SiCl4 post valve closed
8/1/2012	8:22:55 PM	Bypass valve closed
8/1/2012	8:22:55 PM	Bubbler valve closed
8/1/2012	8:22:55 PM	Helium valve opened
8/1/2012	8:22:55 PM	Main Vac valve opened
8/1/2012	8:22:55 PM	Helium MFC set to  20.000000
8/1/2012	8:22:55 PM	H2 MFC set to  0.000000
8/1/2012	8:22:55 PM	BCl3 MFC set to  0.000000
8/1/2012	8:22:55 PM	PH3 MFC set to  0.000000
8/1/2012	8:22:55 PM	SiCl4 MFC set to  0.000000
8/1/2012	8:22:55 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	8:22:55 PM	Tube furnace set to 150
8/1/2012	8:24:55 PM	Helium valve closed
8/1/2012	8:24:55 PM	H2 valve closed
8/1/2012	8:24:55 PM	BCl3 valve closed
8/1/2012	8:24:55 PM	PH3 valve closed
8/1/2012	8:24:55 PM	SiCl4 pre valve closed
8/1/2012	8:24:55 PM	SiCl4 post valve closed
8/1/2012	8:24:55 PM	Bypass valve closed
8/1/2012	8:24:55 PM	Bubbler valve closed
8/1/2012	8:24:55 PM	Main Vac valve opened
8/1/2012	8:24:55 PM	Helium MFC set to  0.000000
8/1/2012	8:24:55 PM	H2 MFC set to  0.000000
8/1/2012	8:24:55 PM	BCl3 MFC set to  0.000000
8/1/2012	8:24:55 PM	PH3 MFC set to  0.000000
8/1/2012	8:24:55 PM	SiCl4 MFC set to  0.000000
8/1/2012	8:24:55 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	8:24:55 PM	Tube furnace set to 150
8/1/2012	8:25:25 PM	H2 valve closed
8/1/2012	8:25:25 PM	BCl3 valve closed
8/1/2012	8:25:25 PM	PH3 valve closed
8/1/2012	8:25:25 PM	SiCl4 pre valve closed
8/1/2012	8:25:25 PM	SiCl4 post valve closed
8/1/2012	8:25:25 PM	Bypass valve closed
8/1/2012	8:25:25 PM	Bubbler valve closed
8/1/2012	8:25:25 PM	Helium valve opened
8/1/2012	8:25:25 PM	Main Vac valve opened
8/1/2012	8:25:25 PM	Helium MFC set to  20.000000
8/1/2012	8:25:25 PM	H2 MFC set to  0.000000
8/1/2012	8:25:25 PM	BCl3 MFC set to  0.000000
8/1/2012	8:25:25 PM	PH3 MFC set to  0.000000
8/1/2012	8:25:25 PM	SiCl4 MFC set to  0.000000
8/1/2012	8:25:25 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	8:25:25 PM	Tube furnace set to 150
8/1/2012	8:25:55 PM	Helium valve closed
8/1/2012	8:25:55 PM	H2 valve closed
8/1/2012	8:25:55 PM	BCl3 valve closed
8/1/2012	8:25:55 PM	PH3 valve closed
8/1/2012	8:25:55 PM	SiCl4 pre valve closed
8/1/2012	8:25:55 PM	SiCl4 post valve closed
8/1/2012	8:25:55 PM	Bypass valve closed
8/1/2012	8:25:55 PM	Bubbler valve closed
8/1/2012	8:25:55 PM	Main Vac valve opened
8/1/2012	8:25:55 PM	Helium MFC set to  0.000000
8/1/2012	8:25:55 PM	H2 MFC set to  0.000000
8/1/2012	8:25:55 PM	BCl3 MFC set to  0.000000
8/1/2012	8:25:55 PM	PH3 MFC set to  0.000000
8/1/2012	8:25:55 PM	SiCl4 MFC set to  0.000000
8/1/2012	8:25:55 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	8:25:56 PM	Tube furnace set to 150
8/1/2012	8:26:26 PM	H2 valve closed
8/1/2012	8:26:26 PM	BCl3 valve closed
8/1/2012	8:26:26 PM	PH3 valve closed
8/1/2012	8:26:26 PM	SiCl4 pre valve closed
8/1/2012	8:26:26 PM	SiCl4 post valve closed
8/1/2012	8:26:26 PM	Bypass valve closed
8/1/2012	8:26:26 PM	Bubbler valve closed
8/1/2012	8:26:26 PM	Helium valve opened
8/1/2012	8:26:26 PM	Main Vac valve opened
8/1/2012	8:26:26 PM	Helium MFC set to  20.000000
8/1/2012	8:26:26 PM	H2 MFC set to  0.000000
8/1/2012	8:26:26 PM	BCl3 MFC set to  0.000000
8/1/2012	8:26:26 PM	PH3 MFC set to  0.000000
8/1/2012	8:26:26 PM	SiCl4 MFC set to  0.000000
8/1/2012	8:26:26 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	8:26:26 PM	Tube furnace set to 150
8/1/2012	8:28:26 PM	Helium valve closed
8/1/2012	8:28:26 PM	H2 valve closed
8/1/2012	8:28:26 PM	BCl3 valve closed
8/1/2012	8:28:26 PM	PH3 valve closed
8/1/2012	8:28:26 PM	SiCl4 pre valve closed
8/1/2012	8:28:26 PM	SiCl4 post valve closed
8/1/2012	8:28:26 PM	Bypass valve closed
8/1/2012	8:28:26 PM	Bubbler valve closed
8/1/2012	8:28:26 PM	Main Vac valve opened
8/1/2012	8:28:26 PM	Helium MFC set to  0.000000
8/1/2012	8:28:26 PM	H2 MFC set to  0.000000
8/1/2012	8:28:26 PM	BCl3 MFC set to  0.000000
8/1/2012	8:28:26 PM	PH3 MFC set to  0.000000
8/1/2012	8:28:26 PM	SiCl4 MFC set to  0.000000
8/1/2012	8:28:26 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	8:28:26 PM	Tube furnace set to 150
8/1/2012	8:28:56 PM	H2 valve closed
8/1/2012	8:28:56 PM	BCl3 valve closed
8/1/2012	8:28:56 PM	PH3 valve closed
8/1/2012	8:28:56 PM	SiCl4 pre valve closed
8/1/2012	8:28:56 PM	SiCl4 post valve closed
8/1/2012	8:28:56 PM	Bypass valve closed
8/1/2012	8:28:56 PM	Bubbler valve closed
8/1/2012	8:28:56 PM	Helium valve opened
8/1/2012	8:28:56 PM	Main Vac valve opened
8/1/2012	8:28:56 PM	Helium MFC set to  20.000000
8/1/2012	8:28:56 PM	H2 MFC set to  0.000000
8/1/2012	8:28:56 PM	BCl3 MFC set to  0.000000
8/1/2012	8:28:56 PM	PH3 MFC set to  0.000000
8/1/2012	8:28:56 PM	SiCl4 MFC set to  0.000000
8/1/2012	8:28:56 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	8:28:56 PM	Tube furnace set to 150
8/1/2012	8:29:26 PM	Helium valve closed
8/1/2012	8:29:26 PM	H2 valve closed
8/1/2012	8:29:26 PM	BCl3 valve closed
8/1/2012	8:29:26 PM	PH3 valve closed
8/1/2012	8:29:26 PM	SiCl4 pre valve closed
8/1/2012	8:29:26 PM	SiCl4 post valve closed
8/1/2012	8:29:26 PM	Bypass valve closed
8/1/2012	8:29:26 PM	Bubbler valve closed
8/1/2012	8:29:26 PM	Main Vac valve opened
8/1/2012	8:29:26 PM	Helium MFC set to  0.000000
8/1/2012	8:29:26 PM	H2 MFC set to  0.000000
8/1/2012	8:29:26 PM	BCl3 MFC set to  0.000000
8/1/2012	8:29:26 PM	PH3 MFC set to  0.000000
8/1/2012	8:29:26 PM	SiCl4 MFC set to  0.000000
8/1/2012	8:29:26 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	8:29:26 PM	Tube furnace set to 150
8/1/2012	8:29:56 PM	H2 valve closed
8/1/2012	8:29:56 PM	BCl3 valve closed
8/1/2012	8:29:57 PM	PH3 valve closed
8/1/2012	8:29:57 PM	SiCl4 pre valve closed
8/1/2012	8:29:57 PM	SiCl4 post valve closed
8/1/2012	8:29:57 PM	Bypass valve closed
8/1/2012	8:29:57 PM	Bubbler valve closed
8/1/2012	8:29:57 PM	Helium valve opened
8/1/2012	8:29:57 PM	Main Vac valve opened
8/1/2012	8:29:57 PM	Helium MFC set to  20.000000
8/1/2012	8:29:57 PM	H2 MFC set to  0.000000
8/1/2012	8:29:57 PM	BCl3 MFC set to  0.000000
8/1/2012	8:29:57 PM	PH3 MFC set to  0.000000
8/1/2012	8:29:57 PM	SiCl4 MFC set to  0.000000
8/1/2012	8:29:57 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	8:29:57 PM	Tube furnace set to 150
8/1/2012	8:31:57 PM	Helium valve closed
8/1/2012	8:31:57 PM	H2 valve closed
8/1/2012	8:31:57 PM	BCl3 valve closed
8/1/2012	8:31:57 PM	PH3 valve closed
8/1/2012	8:31:57 PM	SiCl4 pre valve closed
8/1/2012	8:31:57 PM	SiCl4 post valve closed
8/1/2012	8:31:57 PM	Bypass valve closed
8/1/2012	8:31:57 PM	Bubbler valve closed
8/1/2012	8:31:57 PM	Main Vac valve opened
8/1/2012	8:31:57 PM	Helium MFC set to  0.000000
8/1/2012	8:31:57 PM	H2 MFC set to  0.000000
8/1/2012	8:31:57 PM	BCl3 MFC set to  0.000000
8/1/2012	8:31:57 PM	PH3 MFC set to  0.000000
8/1/2012	8:31:57 PM	SiCl4 MFC set to  0.000000
8/1/2012	8:31:57 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	8:31:57 PM	Tube furnace set to 150
8/1/2012	8:31:58 PM	Run finished at 8:31 PM
8/1/2012	8:46:10 PM	Recipe started at 8:46 PM
8/1/2012	8:46:10 PM	Helium valve closed
8/1/2012	8:46:10 PM	H2 valve closed
8/1/2012	8:46:10 PM	BCl3 valve closed
8/1/2012	8:46:10 PM	PH3 valve closed
8/1/2012	8:46:10 PM	SiCl4 pre valve closed
8/1/2012	8:46:10 PM	SiCl4 post valve closed
8/1/2012	8:46:10 PM	Bypass valve closed
8/1/2012	8:46:10 PM	Bubbler valve closed
8/1/2012	8:46:10 PM	Main Vac valve opened
8/1/2012	8:46:10 PM	Helium MFC set to  0.000000
8/1/2012	8:46:10 PM	H2 MFC set to  0.000000
8/1/2012	8:46:10 PM	BCl3 MFC set to  0.000000
8/1/2012	8:46:10 PM	PH3 MFC set to  0.000000
8/1/2012	8:46:10 PM	SiCl4 MFC set to  0.000000
8/1/2012	8:46:10 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	8:46:10 PM	Tube furnace set to 150
8/1/2012	8:46:40 PM	H2 valve closed
8/1/2012	8:46:40 PM	BCl3 valve closed
8/1/2012	8:46:40 PM	PH3 valve closed
8/1/2012	8:46:40 PM	SiCl4 pre valve closed
8/1/2012	8:46:40 PM	SiCl4 post valve closed
8/1/2012	8:46:40 PM	Bypass valve closed
8/1/2012	8:46:40 PM	Bubbler valve closed
8/1/2012	8:46:40 PM	Helium valve opened
8/1/2012	8:46:40 PM	Main Vac valve opened
8/1/2012	8:46:40 PM	Helium MFC set to  20.000000
8/1/2012	8:46:40 PM	H2 MFC set to  0.000000
8/1/2012	8:46:40 PM	BCl3 MFC set to  0.000000
8/1/2012	8:46:40 PM	PH3 MFC set to  0.000000
8/1/2012	8:46:40 PM	SiCl4 MFC set to  0.000000
8/1/2012	8:46:40 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	8:46:40 PM	Tube furnace set to 150
8/1/2012	8:47:10 PM	Helium valve closed
8/1/2012	8:47:10 PM	H2 valve closed
8/1/2012	8:47:10 PM	BCl3 valve closed
8/1/2012	8:47:10 PM	PH3 valve closed
8/1/2012	8:47:10 PM	SiCl4 pre valve closed
8/1/2012	8:47:10 PM	SiCl4 post valve closed
8/1/2012	8:47:10 PM	Bypass valve closed
8/1/2012	8:47:10 PM	Bubbler valve closed
8/1/2012	8:47:10 PM	Main Vac valve opened
8/1/2012	8:47:10 PM	Helium MFC set to  0.000000
8/1/2012	8:47:10 PM	H2 MFC set to  0.000000
8/1/2012	8:47:10 PM	BCl3 MFC set to  0.000000
8/1/2012	8:47:10 PM	PH3 MFC set to  0.000000
8/1/2012	8:47:10 PM	SiCl4 MFC set to  0.000000
8/1/2012	8:47:10 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	8:47:10 PM	Tube furnace set to 150
8/1/2012	8:47:40 PM	H2 valve closed
8/1/2012	8:47:40 PM	BCl3 valve closed
8/1/2012	8:47:40 PM	PH3 valve closed
8/1/2012	8:47:40 PM	SiCl4 pre valve closed
8/1/2012	8:47:40 PM	SiCl4 post valve closed
8/1/2012	8:47:40 PM	Bypass valve closed
8/1/2012	8:47:40 PM	Bubbler valve closed
8/1/2012	8:47:40 PM	Helium valve opened
8/1/2012	8:47:40 PM	Main Vac valve opened
8/1/2012	8:47:40 PM	Helium MFC set to  20.000000
8/1/2012	8:47:40 PM	H2 MFC set to  0.000000
8/1/2012	8:47:40 PM	BCl3 MFC set to  0.000000
8/1/2012	8:47:40 PM	PH3 MFC set to  0.000000
8/1/2012	8:47:40 PM	SiCl4 MFC set to  0.000000
8/1/2012	8:47:40 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	8:47:40 PM	Tube furnace set to 150
8/1/2012	8:48:10 PM	Helium valve closed
8/1/2012	8:48:11 PM	H2 valve closed
8/1/2012	8:48:11 PM	BCl3 valve closed
8/1/2012	8:48:11 PM	PH3 valve closed
8/1/2012	8:48:11 PM	SiCl4 pre valve closed
8/1/2012	8:48:11 PM	SiCl4 post valve closed
8/1/2012	8:48:11 PM	Bypass valve closed
8/1/2012	8:48:11 PM	Bubbler valve closed
8/1/2012	8:48:11 PM	Main Vac valve opened
8/1/2012	8:48:11 PM	Helium MFC set to  0.000000
8/1/2012	8:48:11 PM	H2 MFC set to  0.000000
8/1/2012	8:48:11 PM	BCl3 MFC set to  0.000000
8/1/2012	8:48:11 PM	PH3 MFC set to  0.000000
8/1/2012	8:48:11 PM	SiCl4 MFC set to  0.000000
8/1/2012	8:48:11 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	8:48:11 PM	Tube furnace set to 150
8/1/2012	8:48:41 PM	H2 valve closed
8/1/2012	8:48:41 PM	BCl3 valve closed
8/1/2012	8:48:41 PM	PH3 valve closed
8/1/2012	8:48:41 PM	SiCl4 pre valve closed
8/1/2012	8:48:41 PM	SiCl4 post valve closed
8/1/2012	8:48:41 PM	Bypass valve closed
8/1/2012	8:48:41 PM	Bubbler valve closed
8/1/2012	8:48:41 PM	Helium valve opened
8/1/2012	8:48:41 PM	Main Vac valve opened
8/1/2012	8:48:41 PM	Helium MFC set to  20.000000
8/1/2012	8:48:41 PM	H2 MFC set to  0.000000
8/1/2012	8:48:41 PM	BCl3 MFC set to  0.000000
8/1/2012	8:48:41 PM	PH3 MFC set to  0.000000
8/1/2012	8:48:41 PM	SiCl4 MFC set to  0.000000
8/1/2012	8:48:41 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	8:48:41 PM	Tube furnace set to 150
8/1/2012	8:50:41 PM	Helium valve closed
8/1/2012	8:50:41 PM	H2 valve closed
8/1/2012	8:50:41 PM	BCl3 valve closed
8/1/2012	8:50:41 PM	PH3 valve closed
8/1/2012	8:50:41 PM	SiCl4 pre valve closed
8/1/2012	8:50:41 PM	SiCl4 post valve closed
8/1/2012	8:50:41 PM	Bypass valve closed
8/1/2012	8:50:41 PM	Bubbler valve closed
8/1/2012	8:50:41 PM	Main Vac valve opened
8/1/2012	8:50:41 PM	Helium MFC set to  0.000000
8/1/2012	8:50:41 PM	H2 MFC set to  0.000000
8/1/2012	8:50:41 PM	BCl3 MFC set to  0.000000
8/1/2012	8:50:41 PM	PH3 MFC set to  0.000000
8/1/2012	8:50:41 PM	SiCl4 MFC set to  0.000000
8/1/2012	8:50:41 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	8:50:41 PM	Tube furnace set to 150
8/1/2012	8:51:11 PM	H2 valve closed
8/1/2012	8:51:11 PM	BCl3 valve closed
8/1/2012	8:51:11 PM	PH3 valve closed
8/1/2012	8:51:11 PM	SiCl4 pre valve closed
8/1/2012	8:51:11 PM	SiCl4 post valve closed
8/1/2012	8:51:11 PM	Bypass valve closed
8/1/2012	8:51:11 PM	Bubbler valve closed
8/1/2012	8:51:11 PM	Helium valve opened
8/1/2012	8:51:11 PM	Main Vac valve opened
8/1/2012	8:51:11 PM	Helium MFC set to  20.000000
8/1/2012	8:51:11 PM	H2 MFC set to  0.000000
8/1/2012	8:51:11 PM	BCl3 MFC set to  0.000000
8/1/2012	8:51:11 PM	PH3 MFC set to  0.000000
8/1/2012	8:51:11 PM	SiCl4 MFC set to  0.000000
8/1/2012	8:51:11 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	8:51:11 PM	Tube furnace set to 150
8/1/2012	8:51:41 PM	Helium valve closed
8/1/2012	8:51:41 PM	H2 valve closed
8/1/2012	8:51:41 PM	BCl3 valve closed
8/1/2012	8:51:41 PM	PH3 valve closed
8/1/2012	8:51:41 PM	SiCl4 pre valve closed
8/1/2012	8:51:41 PM	SiCl4 post valve closed
8/1/2012	8:51:41 PM	Bypass valve closed
8/1/2012	8:51:41 PM	Bubbler valve closed
8/1/2012	8:51:41 PM	Main Vac valve opened
8/1/2012	8:51:41 PM	Helium MFC set to  0.000000
8/1/2012	8:51:41 PM	H2 MFC set to  0.000000
8/1/2012	8:51:41 PM	BCl3 MFC set to  0.000000
8/1/2012	8:51:41 PM	PH3 MFC set to  0.000000
8/1/2012	8:51:41 PM	SiCl4 MFC set to  0.000000
8/1/2012	8:51:41 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	8:51:42 PM	Tube furnace set to 150
8/1/2012	8:52:12 PM	H2 valve closed
8/1/2012	8:52:12 PM	BCl3 valve closed
8/1/2012	8:52:12 PM	PH3 valve closed
8/1/2012	8:52:12 PM	SiCl4 pre valve closed
8/1/2012	8:52:12 PM	SiCl4 post valve closed
8/1/2012	8:52:12 PM	Bypass valve closed
8/1/2012	8:52:12 PM	Bubbler valve closed
8/1/2012	8:52:12 PM	Helium valve opened
8/1/2012	8:52:12 PM	Main Vac valve opened
8/1/2012	8:52:12 PM	Helium MFC set to  20.000000
8/1/2012	8:52:12 PM	H2 MFC set to  0.000000
8/1/2012	8:52:12 PM	BCl3 MFC set to  0.000000
8/1/2012	8:52:12 PM	PH3 MFC set to  0.000000
8/1/2012	8:52:12 PM	SiCl4 MFC set to  0.000000
8/1/2012	8:52:12 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	8:52:12 PM	Tube furnace set to 150
8/1/2012	8:52:42 PM	Helium valve closed
8/1/2012	8:52:42 PM	H2 valve closed
8/1/2012	8:52:42 PM	BCl3 valve closed
8/1/2012	8:52:42 PM	PH3 valve closed
8/1/2012	8:52:42 PM	SiCl4 pre valve closed
8/1/2012	8:52:42 PM	SiCl4 post valve closed
8/1/2012	8:52:42 PM	Bypass valve closed
8/1/2012	8:52:42 PM	Bubbler valve closed
8/1/2012	8:52:42 PM	Main Vac valve opened
8/1/2012	8:52:42 PM	Helium MFC set to  0.000000
8/1/2012	8:52:42 PM	H2 MFC set to  0.000000
8/1/2012	8:52:42 PM	BCl3 MFC set to  0.000000
8/1/2012	8:52:42 PM	PH3 MFC set to  0.000000
8/1/2012	8:52:42 PM	SiCl4 MFC set to  0.000000
8/1/2012	8:52:42 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	8:52:42 PM	Tube furnace set to 150
8/1/2012	8:53:12 PM	H2 valve closed
8/1/2012	8:53:12 PM	BCl3 valve closed
8/1/2012	8:53:12 PM	PH3 valve closed
8/1/2012	8:53:12 PM	SiCl4 pre valve closed
8/1/2012	8:53:12 PM	SiCl4 post valve closed
8/1/2012	8:53:12 PM	Bypass valve closed
8/1/2012	8:53:12 PM	Bubbler valve closed
8/1/2012	8:53:12 PM	Helium valve opened
8/1/2012	8:53:12 PM	Main Vac valve opened
8/1/2012	8:53:12 PM	Helium MFC set to  20.000000
8/1/2012	8:53:12 PM	H2 MFC set to  0.000000
8/1/2012	8:53:12 PM	BCl3 MFC set to  0.000000
8/1/2012	8:53:12 PM	PH3 MFC set to  0.000000
8/1/2012	8:53:12 PM	SiCl4 MFC set to  0.000000
8/1/2012	8:53:12 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	8:53:12 PM	Tube furnace set to 150
8/1/2012	8:55:12 PM	Helium valve closed
8/1/2012	8:55:12 PM	H2 valve closed
8/1/2012	8:55:12 PM	BCl3 valve closed
8/1/2012	8:55:12 PM	PH3 valve closed
8/1/2012	8:55:12 PM	SiCl4 pre valve closed
8/1/2012	8:55:12 PM	SiCl4 post valve closed
8/1/2012	8:55:12 PM	Bypass valve closed
8/1/2012	8:55:12 PM	Bubbler valve closed
8/1/2012	8:55:12 PM	Main Vac valve opened
8/1/2012	8:55:12 PM	Helium MFC set to  0.000000
8/1/2012	8:55:12 PM	H2 MFC set to  0.000000
8/1/2012	8:55:12 PM	BCl3 MFC set to  0.000000
8/1/2012	8:55:12 PM	PH3 MFC set to  0.000000
8/1/2012	8:55:12 PM	SiCl4 MFC set to  0.000000
8/1/2012	8:55:12 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	8:55:13 PM	Tube furnace set to 150
8/1/2012	8:55:43 PM	H2 valve closed
8/1/2012	8:55:43 PM	BCl3 valve closed
8/1/2012	8:55:43 PM	PH3 valve closed
8/1/2012	8:55:43 PM	SiCl4 pre valve closed
8/1/2012	8:55:43 PM	SiCl4 post valve closed
8/1/2012	8:55:43 PM	Bypass valve closed
8/1/2012	8:55:43 PM	Bubbler valve closed
8/1/2012	8:55:43 PM	Helium valve opened
8/1/2012	8:55:43 PM	Main Vac valve opened
8/1/2012	8:55:43 PM	Helium MFC set to  20.000000
8/1/2012	8:55:43 PM	H2 MFC set to  0.000000
8/1/2012	8:55:43 PM	BCl3 MFC set to  0.000000
8/1/2012	8:55:43 PM	PH3 MFC set to  0.000000
8/1/2012	8:55:43 PM	SiCl4 MFC set to  0.000000
8/1/2012	8:55:43 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	8:55:43 PM	Tube furnace set to 150
8/1/2012	8:56:13 PM	Helium valve closed
8/1/2012	8:56:13 PM	H2 valve closed
8/1/2012	8:56:13 PM	BCl3 valve closed
8/1/2012	8:56:13 PM	PH3 valve closed
8/1/2012	8:56:13 PM	SiCl4 pre valve closed
8/1/2012	8:56:13 PM	SiCl4 post valve closed
8/1/2012	8:56:13 PM	Bypass valve closed
8/1/2012	8:56:13 PM	Bubbler valve closed
8/1/2012	8:56:13 PM	Main Vac valve opened
8/1/2012	8:56:13 PM	Helium MFC set to  0.000000
8/1/2012	8:56:13 PM	H2 MFC set to  0.000000
8/1/2012	8:56:13 PM	BCl3 MFC set to  0.000000
8/1/2012	8:56:13 PM	PH3 MFC set to  0.000000
8/1/2012	8:56:13 PM	SiCl4 MFC set to  0.000000
8/1/2012	8:56:13 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	8:56:13 PM	Tube furnace set to 150
8/1/2012	8:56:43 PM	H2 valve closed
8/1/2012	8:56:43 PM	BCl3 valve closed
8/1/2012	8:56:43 PM	PH3 valve closed
8/1/2012	8:56:43 PM	SiCl4 pre valve closed
8/1/2012	8:56:43 PM	SiCl4 post valve closed
8/1/2012	8:56:43 PM	Bypass valve closed
8/1/2012	8:56:43 PM	Bubbler valve closed
8/1/2012	8:56:43 PM	Helium valve opened
8/1/2012	8:56:43 PM	Main Vac valve opened
8/1/2012	8:56:43 PM	Helium MFC set to  20.000000
8/1/2012	8:56:43 PM	H2 MFC set to  0.000000
8/1/2012	8:56:43 PM	BCl3 MFC set to  0.000000
8/1/2012	8:56:43 PM	PH3 MFC set to  0.000000
8/1/2012	8:56:43 PM	SiCl4 MFC set to  0.000000
8/1/2012	8:56:43 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	8:56:43 PM	Tube furnace set to 150
8/1/2012	8:58:43 PM	Helium valve closed
8/1/2012	8:58:43 PM	H2 valve closed
8/1/2012	8:58:43 PM	BCl3 valve closed
8/1/2012	8:58:43 PM	PH3 valve closed
8/1/2012	8:58:43 PM	SiCl4 pre valve closed
8/1/2012	8:58:43 PM	SiCl4 post valve closed
8/1/2012	8:58:43 PM	Bypass valve closed
8/1/2012	8:58:43 PM	Bubbler valve closed
8/1/2012	8:58:43 PM	Main Vac valve opened
8/1/2012	8:58:43 PM	Helium MFC set to  0.000000
8/1/2012	8:58:43 PM	H2 MFC set to  0.000000
8/1/2012	8:58:43 PM	BCl3 MFC set to  0.000000
8/1/2012	8:58:43 PM	PH3 MFC set to  0.000000
8/1/2012	8:58:43 PM	SiCl4 MFC set to  0.000000
8/1/2012	8:58:43 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	8:58:44 PM	Tube furnace set to 150
8/1/2012	8:59:14 PM	H2 valve closed
8/1/2012	8:59:14 PM	BCl3 valve closed
8/1/2012	8:59:14 PM	PH3 valve closed
8/1/2012	8:59:14 PM	SiCl4 pre valve closed
8/1/2012	8:59:14 PM	SiCl4 post valve closed
8/1/2012	8:59:14 PM	Bypass valve closed
8/1/2012	8:59:14 PM	Bubbler valve closed
8/1/2012	8:59:14 PM	Helium valve opened
8/1/2012	8:59:14 PM	Main Vac valve opened
8/1/2012	8:59:14 PM	Helium MFC set to  20.000000
8/1/2012	8:59:14 PM	H2 MFC set to  0.000000
8/1/2012	8:59:14 PM	BCl3 MFC set to  0.000000
8/1/2012	8:59:14 PM	PH3 MFC set to  0.000000
8/1/2012	8:59:14 PM	SiCl4 MFC set to  0.000000
8/1/2012	8:59:14 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	8:59:14 PM	Tube furnace set to 150
8/1/2012	8:59:44 PM	Helium valve closed
8/1/2012	8:59:44 PM	H2 valve closed
8/1/2012	8:59:44 PM	BCl3 valve closed
8/1/2012	8:59:44 PM	PH3 valve closed
8/1/2012	8:59:44 PM	SiCl4 pre valve closed
8/1/2012	8:59:44 PM	SiCl4 post valve closed
8/1/2012	8:59:44 PM	Bypass valve closed
8/1/2012	8:59:44 PM	Bubbler valve closed
8/1/2012	8:59:44 PM	Main Vac valve opened
8/1/2012	8:59:44 PM	Helium MFC set to  0.000000
8/1/2012	8:59:44 PM	H2 MFC set to  0.000000
8/1/2012	8:59:44 PM	BCl3 MFC set to  0.000000
8/1/2012	8:59:44 PM	PH3 MFC set to  0.000000
8/1/2012	8:59:44 PM	SiCl4 MFC set to  0.000000
8/1/2012	8:59:44 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	8:59:44 PM	Tube furnace set to 150
8/1/2012	9:00:14 PM	H2 valve closed
8/1/2012	9:00:14 PM	BCl3 valve closed
8/1/2012	9:00:14 PM	PH3 valve closed
8/1/2012	9:00:14 PM	SiCl4 pre valve closed
8/1/2012	9:00:14 PM	SiCl4 post valve closed
8/1/2012	9:00:14 PM	Bypass valve closed
8/1/2012	9:00:14 PM	Bubbler valve closed
8/1/2012	9:00:14 PM	Helium valve opened
8/1/2012	9:00:14 PM	Main Vac valve opened
8/1/2012	9:00:14 PM	Helium MFC set to  20.000000
8/1/2012	9:00:14 PM	H2 MFC set to  0.000000
8/1/2012	9:00:14 PM	BCl3 MFC set to  0.000000
8/1/2012	9:00:14 PM	PH3 MFC set to  0.000000
8/1/2012	9:00:14 PM	SiCl4 MFC set to  0.000000
8/1/2012	9:00:14 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	9:00:14 PM	Tube furnace set to 150
8/1/2012	9:02:14 PM	Helium valve closed
8/1/2012	9:02:14 PM	H2 valve closed
8/1/2012	9:02:14 PM	BCl3 valve closed
8/1/2012	9:02:14 PM	PH3 valve closed
8/1/2012	9:02:14 PM	SiCl4 pre valve closed
8/1/2012	9:02:14 PM	SiCl4 post valve closed
8/1/2012	9:02:14 PM	Bypass valve closed
8/1/2012	9:02:14 PM	Bubbler valve closed
8/1/2012	9:02:14 PM	Main Vac valve opened
8/1/2012	9:02:14 PM	Helium MFC set to  0.000000
8/1/2012	9:02:14 PM	H2 MFC set to  0.000000
8/1/2012	9:02:14 PM	BCl3 MFC set to  0.000000
8/1/2012	9:02:14 PM	PH3 MFC set to  0.000000
8/1/2012	9:02:14 PM	SiCl4 MFC set to  0.000000
8/1/2012	9:02:14 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	9:02:14 PM	Tube furnace set to 150
8/1/2012	9:02:15 PM	Run finished at 9:02 PM
8/1/2012	9:06:22 PM	Recipe started at 9:06 PM
8/1/2012	9:06:22 PM	Helium valve closed
8/1/2012	9:06:22 PM	H2 valve closed
8/1/2012	9:06:22 PM	BCl3 valve closed
8/1/2012	9:06:22 PM	PH3 valve closed
8/1/2012	9:06:22 PM	SiCl4 pre valve closed
8/1/2012	9:06:22 PM	SiCl4 post valve closed
8/1/2012	9:06:22 PM	Main Vac valve closed
8/1/2012	9:06:22 PM	Bypass valve closed
8/1/2012	9:06:22 PM	Bubbler valve closed
8/1/2012	9:06:22 PM	Helium MFC set to  0.000000
8/1/2012	9:06:22 PM	H2 MFC set to  0.000000
8/1/2012	9:06:22 PM	BCl3 MFC set to  0.000000
8/1/2012	9:06:22 PM	PH3 MFC set to  0.000000
8/1/2012	9:06:22 PM	SiCl4 MFC set to  0.000000
8/1/2012	9:06:22 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	9:06:22 PM	Tube furnace set to 0
8/1/2012	9:06:25 PM	Helium valve closed
8/1/2012	9:06:25 PM	BCl3 valve closed
8/1/2012	9:06:25 PM	PH3 valve closed
8/1/2012	9:06:25 PM	SiCl4 pre valve closed
8/1/2012	9:06:25 PM	SiCl4 post valve closed
8/1/2012	9:06:25 PM	Main Vac valve closed
8/1/2012	9:06:25 PM	Bypass valve closed
8/1/2012	9:06:25 PM	Bubbler valve closed
8/1/2012	9:06:25 PM	H2 valve opened
8/1/2012	9:06:25 PM	Helium MFC set to  0.000000
8/1/2012	9:06:25 PM	H2 MFC set to  500.000000
8/1/2012	9:06:25 PM	BCl3 MFC set to  0.000000
8/1/2012	9:06:25 PM	PH3 MFC set to  0.000000
8/1/2012	9:06:25 PM	SiCl4 MFC set to  0.000000
8/1/2012	9:06:25 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	9:06:25 PM	Tube furnace set to 0
8/1/2012	9:07:36 PM	Helium valve closed
8/1/2012	9:07:36 PM	BCl3 valve closed
8/1/2012	9:07:36 PM	PH3 valve closed
8/1/2012	9:07:36 PM	SiCl4 pre valve closed
8/1/2012	9:07:36 PM	SiCl4 post valve closed
8/1/2012	9:07:36 PM	Main Vac valve closed
8/1/2012	9:07:36 PM	Bypass valve closed
8/1/2012	9:07:36 PM	H2 valve opened
8/1/2012	9:07:36 PM	Bubbler valve opened
8/1/2012	9:07:36 PM	Helium MFC set to  0.000000
8/1/2012	9:07:36 PM	H2 MFC set to  500.000000
8/1/2012	9:07:36 PM	BCl3 MFC set to  0.000000
8/1/2012	9:07:36 PM	PH3 MFC set to  0.000000
8/1/2012	9:07:36 PM	SiCl4 MFC set to  0.000000
8/1/2012	9:07:36 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	9:07:36 PM	Tube furnace set to 0
8/1/2012	9:07:37 PM	Helium valve closed
8/1/2012	9:07:37 PM	BCl3 valve closed
8/1/2012	9:07:37 PM	PH3 valve closed
8/1/2012	9:07:37 PM	SiCl4 pre valve closed
8/1/2012	9:07:37 PM	SiCl4 post valve closed
8/1/2012	9:07:37 PM	Main Vac valve closed
8/1/2012	9:07:37 PM	Bypass valve closed
8/1/2012	9:07:37 PM	H2 valve opened
8/1/2012	9:07:37 PM	Bubbler valve opened
8/1/2012	9:07:37 PM	Helium MFC set to  0.000000
8/1/2012	9:07:37 PM	H2 MFC set to  500.000000
8/1/2012	9:07:37 PM	BCl3 MFC set to  0.000000
8/1/2012	9:07:37 PM	PH3 MFC set to  0.000000
8/1/2012	9:07:37 PM	SiCl4 MFC set to  0.000000
8/1/2012	9:07:37 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	9:07:37 PM	Tube furnace set to 1000
8/1/2012	9:27:37 PM	Helium valve closed
8/1/2012	9:27:37 PM	BCl3 valve closed
8/1/2012	9:27:37 PM	Main Vac valve closed
8/1/2012	9:27:37 PM	Bypass valve closed
8/1/2012	9:27:37 PM	H2 valve opened
8/1/2012	9:27:37 PM	PH3 valve opened
8/1/2012	9:27:37 PM	SiCl4 pre valve opened
8/1/2012	9:27:37 PM	SiCl4 post valve opened
8/1/2012	9:27:37 PM	Bubbler valve opened
8/1/2012	9:27:37 PM	Helium MFC set to  0.000000
8/1/2012	9:27:37 PM	H2 MFC set to  500.000000
8/1/2012	9:27:37 PM	BCl3 MFC set to  0.000000
8/1/2012	9:27:37 PM	PH3 MFC set to  0.300000
8/1/2012	9:27:37 PM	SiCl4 MFC set to  25.000000
8/1/2012	9:27:37 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	9:27:38 PM	Tube furnace set to 1000
8/1/2012	9:39:38 PM	Helium valve closed
8/1/2012	9:39:38 PM	BCl3 valve closed
8/1/2012	9:39:38 PM	PH3 valve closed
8/1/2012	9:39:38 PM	SiCl4 pre valve closed
8/1/2012	9:39:38 PM	SiCl4 post valve closed
8/1/2012	9:39:38 PM	Main Vac valve closed
8/1/2012	9:39:38 PM	Bypass valve closed
8/1/2012	9:39:38 PM	H2 valve opened
8/1/2012	9:39:38 PM	Bubbler valve opened
8/1/2012	9:39:38 PM	Helium MFC set to  0.000000
8/1/2012	9:39:38 PM	H2 MFC set to  500.000000
8/1/2012	9:39:38 PM	BCl3 MFC set to  0.000000
8/1/2012	9:39:38 PM	PH3 MFC set to  0.000000
8/1/2012	9:39:38 PM	SiCl4 MFC set to  0.000000
8/1/2012	9:39:38 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	9:39:38 PM	Tube furnace set to 750
8/1/2012	9:44:38 PM	H2 valve closed
8/1/2012	9:44:38 PM	BCl3 valve closed
8/1/2012	9:44:38 PM	PH3 valve closed
8/1/2012	9:44:38 PM	SiCl4 pre valve closed
8/1/2012	9:44:38 PM	SiCl4 post valve closed
8/1/2012	9:44:38 PM	Main Vac valve closed
8/1/2012	9:44:38 PM	Bypass valve closed
8/1/2012	9:44:38 PM	Helium valve opened
8/1/2012	9:44:38 PM	Bubbler valve opened
8/1/2012	9:44:38 PM	Helium MFC set to  500.000000
8/1/2012	9:44:38 PM	H2 MFC set to  0.000000
8/1/2012	9:44:38 PM	BCl3 MFC set to  0.000000
8/1/2012	9:44:38 PM	PH3 MFC set to  0.000000
8/1/2012	9:44:38 PM	SiCl4 MFC set to  0.000000
8/1/2012	9:44:38 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	9:44:38 PM	Tube furnace set to 0
8/1/2012	9:57:44 PM	Run aborted at 9:57 PM
8/1/2012	9:57:44 PM	Helium valve closed
8/1/2012	9:57:44 PM	H2 valve closed
8/1/2012	9:57:44 PM	BCl3 valve closed
8/1/2012	9:57:44 PM	PH3 valve closed
8/1/2012	9:57:44 PM	SiCl4 pre valve closed
8/1/2012	9:57:44 PM	SiCl4 post valve closed
8/1/2012	9:57:44 PM	Bypass valve closed
8/1/2012	9:57:44 PM	Main Vac valve closed
8/1/2012	9:57:44 PM	Bubbler valve closed
8/1/2012	9:57:44 PM	Helium MFC set to  0.000000
8/1/2012	9:57:44 PM	H2 MFC set to  0.000000
8/1/2012	9:57:44 PM	BCl3 MFC set to  0.000000
8/1/2012	9:57:44 PM	PH3 MFC set to  0.000000
8/1/2012	9:57:44 PM	SiCl4 MFC set to  0.000000
8/1/2012	9:57:44 PM	Tube furnace set to 0
8/1/2012	9:57:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/1/2012	9:57:46 PM	Recipe started at 9:57 PM
8/1/2012	9:57:46 PM	Helium valve closed
8/1/2012	9:57:46 PM	H2 valve closed
8/1/2012	9:57:46 PM	BCl3 valve closed
8/1/2012	9:57:46 PM	PH3 valve closed
8/1/2012	9:57:46 PM	SiCl4 pre valve closed
8/1/2012	9:57:46 PM	SiCl4 post valve closed
8/1/2012	9:57:46 PM	Main Vac valve closed
8/1/2012	9:57:46 PM	Bypass valve closed
8/1/2012	9:57:46 PM	Bubbler valve closed
8/1/2012	9:57:46 PM	Helium MFC set to  0.000000
8/1/2012	9:57:46 PM	H2 MFC set to  0.000000
8/1/2012	9:57:46 PM	BCl3 MFC set to  0.000000
8/1/2012	9:57:46 PM	PH3 MFC set to  0.000000
8/1/2012	9:57:46 PM	SiCl4 MFC set to  0.000000
8/1/2012	9:57:46 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	9:57:46 PM	Tube furnace set to 0
8/1/2012	9:57:49 PM	H2 valve closed
8/1/2012	9:57:49 PM	BCl3 valve closed
8/1/2012	9:57:49 PM	PH3 valve closed
8/1/2012	9:57:49 PM	SiCl4 pre valve closed
8/1/2012	9:57:49 PM	SiCl4 post valve closed
8/1/2012	9:57:49 PM	Main Vac valve closed
8/1/2012	9:57:49 PM	Bypass valve closed
8/1/2012	9:57:49 PM	Bubbler valve closed
8/1/2012	9:57:49 PM	Helium valve opened
8/1/2012	9:57:49 PM	Helium MFC set to  500.000000
8/1/2012	9:57:49 PM	H2 MFC set to  0.000000
8/1/2012	9:57:49 PM	BCl3 MFC set to  0.000000
8/1/2012	9:57:49 PM	PH3 MFC set to  0.000000
8/1/2012	9:57:49 PM	SiCl4 MFC set to  0.000000
8/1/2012	9:57:49 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	9:57:49 PM	Tube furnace set to 0
8/1/2012	9:57:49 PM	Helium valve closed
8/1/2012	9:57:49 PM	H2 valve closed
8/1/2012	9:57:50 PM	BCl3 valve closed
8/1/2012	9:57:50 PM	PH3 valve closed
8/1/2012	9:57:50 PM	SiCl4 pre valve closed
8/1/2012	9:57:50 PM	SiCl4 post valve closed
8/1/2012	9:57:50 PM	Main Vac valve closed
8/1/2012	9:57:50 PM	Bypass valve closed
8/1/2012	9:57:50 PM	Bubbler valve closed
8/1/2012	9:57:50 PM	Helium MFC set to  0.000000
8/1/2012	9:57:50 PM	H2 MFC set to  0.000000
8/1/2012	9:57:50 PM	BCl3 MFC set to  0.000000
8/1/2012	9:57:50 PM	PH3 MFC set to  0.000000
8/1/2012	9:57:50 PM	SiCl4 MFC set to  0.000000
8/1/2012	9:57:50 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	9:57:50 PM	Tube furnace set to 0
8/1/2012	9:57:51 PM	Run finished at 9:57 PM
8/1/2012	9:57:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/1/2012	10:00:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/1/2012	10:00:13 PM	Recipe started at 10:00 PM
8/1/2012	10:00:13 PM	Helium valve closed
8/1/2012	10:00:13 PM	H2 valve closed
8/1/2012	10:00:13 PM	BCl3 valve closed
8/1/2012	10:00:13 PM	PH3 valve closed
8/1/2012	10:00:13 PM	SiCl4 pre valve closed
8/1/2012	10:00:13 PM	SiCl4 post valve closed
8/1/2012	10:00:13 PM	Main Vac valve closed
8/1/2012	10:00:13 PM	Bubbler valve closed
8/1/2012	10:00:13 PM	Bypass valve opened
8/1/2012	10:00:13 PM	Helium MFC set to  0.000000
8/1/2012	10:00:13 PM	H2 MFC set to  0.000000
8/1/2012	10:00:13 PM	BCl3 MFC set to  0.000000
8/1/2012	10:00:13 PM	PH3 MFC set to  0.000000
8/1/2012	10:00:13 PM	SiCl4 MFC set to  0.000000
8/1/2012	10:00:13 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	10:00:13 PM	Tube furnace set to 0
8/1/2012	10:01:19 PM	Helium valve closed
8/1/2012	10:01:19 PM	H2 valve closed
8/1/2012	10:01:19 PM	BCl3 valve closed
8/1/2012	10:01:19 PM	PH3 valve closed
8/1/2012	10:01:19 PM	SiCl4 pre valve closed
8/1/2012	10:01:19 PM	SiCl4 post valve closed
8/1/2012	10:01:19 PM	Main Vac valve closed
8/1/2012	10:01:19 PM	Bubbler valve closed
8/1/2012	10:01:19 PM	Bypass valve opened
8/1/2012	10:01:19 PM	Helium MFC set to  0.000000
8/1/2012	10:01:19 PM	H2 MFC set to  0.000000
8/1/2012	10:01:19 PM	BCl3 MFC set to  0.000000
8/1/2012	10:01:19 PM	PH3 MFC set to  0.000000
8/1/2012	10:01:19 PM	SiCl4 MFC set to  0.000000
8/1/2012	10:01:19 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	10:01:19 PM	Tube furnace set to 0
8/1/2012	10:02:19 PM	Helium valve closed
8/1/2012	10:02:19 PM	H2 valve closed
8/1/2012	10:02:19 PM	BCl3 valve closed
8/1/2012	10:02:19 PM	PH3 valve closed
8/1/2012	10:02:19 PM	SiCl4 pre valve closed
8/1/2012	10:02:19 PM	SiCl4 post valve closed
8/1/2012	10:02:19 PM	Bypass valve closed
8/1/2012	10:02:19 PM	Bubbler valve closed
8/1/2012	10:02:19 PM	Main Vac valve opened
8/1/2012	10:02:19 PM	Helium MFC set to  0.000000
8/1/2012	10:02:19 PM	H2 MFC set to  0.000000
8/1/2012	10:02:19 PM	BCl3 MFC set to  0.000000
8/1/2012	10:02:19 PM	PH3 MFC set to  0.000000
8/1/2012	10:02:19 PM	SiCl4 MFC set to  0.000000
8/1/2012	10:02:19 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	10:02:19 PM	Tube furnace set to 0
8/1/2012	10:02:20 PM	Run finished at 10:02 PM
8/1/2012	10:02:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/1/2012	10:03:01 PM	Recipe started at 10:02 PM
8/1/2012	10:03:01 PM	Helium valve closed
8/1/2012	10:03:01 PM	H2 valve closed
8/1/2012	10:03:01 PM	BCl3 valve closed
8/1/2012	10:03:01 PM	PH3 valve closed
8/1/2012	10:03:01 PM	SiCl4 pre valve closed
8/1/2012	10:03:01 PM	SiCl4 post valve closed
8/1/2012	10:03:01 PM	Bypass valve closed
8/1/2012	10:03:01 PM	Bubbler valve closed
8/1/2012	10:03:01 PM	Main Vac valve opened
8/1/2012	10:03:01 PM	Helium MFC set to  0.000000
8/1/2012	10:03:01 PM	H2 MFC set to  0.000000
8/1/2012	10:03:01 PM	BCl3 MFC set to  0.000000
8/1/2012	10:03:01 PM	PH3 MFC set to  0.000000
8/1/2012	10:03:01 PM	SiCl4 MFC set to  0.000000
8/1/2012	10:03:01 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	10:03:01 PM	Tube furnace set to 150
8/1/2012	10:03:31 PM	H2 valve closed
8/1/2012	10:03:31 PM	BCl3 valve closed
8/1/2012	10:03:31 PM	PH3 valve closed
8/1/2012	10:03:31 PM	SiCl4 pre valve closed
8/1/2012	10:03:31 PM	SiCl4 post valve closed
8/1/2012	10:03:31 PM	Bypass valve closed
8/1/2012	10:03:31 PM	Bubbler valve closed
8/1/2012	10:03:31 PM	Helium valve opened
8/1/2012	10:03:31 PM	Main Vac valve opened
8/1/2012	10:03:31 PM	Helium MFC set to  20.000000
8/1/2012	10:03:31 PM	H2 MFC set to  0.000000
8/1/2012	10:03:31 PM	BCl3 MFC set to  0.000000
8/1/2012	10:03:31 PM	PH3 MFC set to  0.000000
8/1/2012	10:03:31 PM	SiCl4 MFC set to  0.000000
8/1/2012	10:03:31 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	10:03:31 PM	Tube furnace set to 150
8/1/2012	10:04:01 PM	Helium valve closed
8/1/2012	10:04:01 PM	H2 valve closed
8/1/2012	10:04:01 PM	BCl3 valve closed
8/1/2012	10:04:01 PM	PH3 valve closed
8/1/2012	10:04:01 PM	SiCl4 pre valve closed
8/1/2012	10:04:01 PM	SiCl4 post valve closed
8/1/2012	10:04:01 PM	Bypass valve closed
8/1/2012	10:04:01 PM	Bubbler valve closed
8/1/2012	10:04:01 PM	Main Vac valve opened
8/1/2012	10:04:01 PM	Helium MFC set to  0.000000
8/1/2012	10:04:01 PM	H2 MFC set to  0.000000
8/1/2012	10:04:01 PM	BCl3 MFC set to  0.000000
8/1/2012	10:04:01 PM	PH3 MFC set to  0.000000
8/1/2012	10:04:01 PM	SiCl4 MFC set to  0.000000
8/1/2012	10:04:01 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	10:04:01 PM	Tube furnace set to 150
8/1/2012	10:04:31 PM	H2 valve closed
8/1/2012	10:04:31 PM	BCl3 valve closed
8/1/2012	10:04:31 PM	PH3 valve closed
8/1/2012	10:04:31 PM	SiCl4 pre valve closed
8/1/2012	10:04:31 PM	SiCl4 post valve closed
8/1/2012	10:04:31 PM	Bypass valve closed
8/1/2012	10:04:31 PM	Bubbler valve closed
8/1/2012	10:04:31 PM	Helium valve opened
8/1/2012	10:04:31 PM	Main Vac valve opened
8/1/2012	10:04:31 PM	Helium MFC set to  20.000000
8/1/2012	10:04:31 PM	H2 MFC set to  0.000000
8/1/2012	10:04:31 PM	BCl3 MFC set to  0.000000
8/1/2012	10:04:31 PM	PH3 MFC set to  0.000000
8/1/2012	10:04:31 PM	SiCl4 MFC set to  0.000000
8/1/2012	10:04:31 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	10:04:31 PM	Tube furnace set to 150
8/1/2012	10:05:01 PM	Helium valve closed
8/1/2012	10:05:01 PM	H2 valve closed
8/1/2012	10:05:01 PM	BCl3 valve closed
8/1/2012	10:05:01 PM	PH3 valve closed
8/1/2012	10:05:01 PM	SiCl4 pre valve closed
8/1/2012	10:05:02 PM	SiCl4 post valve closed
8/1/2012	10:05:02 PM	Bypass valve closed
8/1/2012	10:05:02 PM	Bubbler valve closed
8/1/2012	10:05:02 PM	Main Vac valve opened
8/1/2012	10:05:02 PM	Helium MFC set to  0.000000
8/1/2012	10:05:02 PM	H2 MFC set to  0.000000
8/1/2012	10:05:02 PM	BCl3 MFC set to  0.000000
8/1/2012	10:05:02 PM	PH3 MFC set to  0.000000
8/1/2012	10:05:02 PM	SiCl4 MFC set to  0.000000
8/1/2012	10:05:02 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	10:05:02 PM	Tube furnace set to 150
8/1/2012	10:05:32 PM	H2 valve closed
8/1/2012	10:05:32 PM	BCl3 valve closed
8/1/2012	10:05:32 PM	PH3 valve closed
8/1/2012	10:05:32 PM	SiCl4 pre valve closed
8/1/2012	10:05:32 PM	SiCl4 post valve closed
8/1/2012	10:05:32 PM	Bypass valve closed
8/1/2012	10:05:32 PM	Bubbler valve closed
8/1/2012	10:05:32 PM	Helium valve opened
8/1/2012	10:05:32 PM	Main Vac valve opened
8/1/2012	10:05:32 PM	Helium MFC set to  20.000000
8/1/2012	10:05:32 PM	H2 MFC set to  0.000000
8/1/2012	10:05:32 PM	BCl3 MFC set to  0.000000
8/1/2012	10:05:32 PM	PH3 MFC set to  0.000000
8/1/2012	10:05:32 PM	SiCl4 MFC set to  0.000000
8/1/2012	10:05:32 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	10:05:32 PM	Tube furnace set to 150
8/1/2012	10:07:32 PM	Helium valve closed
8/1/2012	10:07:32 PM	H2 valve closed
8/1/2012	10:07:32 PM	BCl3 valve closed
8/1/2012	10:07:32 PM	PH3 valve closed
8/1/2012	10:07:32 PM	SiCl4 pre valve closed
8/1/2012	10:07:32 PM	SiCl4 post valve closed
8/1/2012	10:07:32 PM	Bypass valve closed
8/1/2012	10:07:32 PM	Bubbler valve closed
8/1/2012	10:07:32 PM	Main Vac valve opened
8/1/2012	10:07:32 PM	Helium MFC set to  0.000000
8/1/2012	10:07:32 PM	H2 MFC set to  0.000000
8/1/2012	10:07:32 PM	BCl3 MFC set to  0.000000
8/1/2012	10:07:32 PM	PH3 MFC set to  0.000000
8/1/2012	10:07:32 PM	SiCl4 MFC set to  0.000000
8/1/2012	10:07:32 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	10:07:32 PM	Tube furnace set to 150
8/1/2012	10:08:02 PM	H2 valve closed
8/1/2012	10:08:02 PM	BCl3 valve closed
8/1/2012	10:08:02 PM	PH3 valve closed
8/1/2012	10:08:02 PM	SiCl4 pre valve closed
8/1/2012	10:08:02 PM	SiCl4 post valve closed
8/1/2012	10:08:02 PM	Bypass valve closed
8/1/2012	10:08:02 PM	Bubbler valve closed
8/1/2012	10:08:02 PM	Helium valve opened
8/1/2012	10:08:02 PM	Main Vac valve opened
8/1/2012	10:08:02 PM	Helium MFC set to  20.000000
8/1/2012	10:08:02 PM	H2 MFC set to  0.000000
8/1/2012	10:08:02 PM	BCl3 MFC set to  0.000000
8/1/2012	10:08:02 PM	PH3 MFC set to  0.000000
8/1/2012	10:08:02 PM	SiCl4 MFC set to  0.000000
8/1/2012	10:08:02 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	10:08:02 PM	Tube furnace set to 150
8/1/2012	10:08:32 PM	Helium valve closed
8/1/2012	10:08:32 PM	H2 valve closed
8/1/2012	10:08:32 PM	BCl3 valve closed
8/1/2012	10:08:32 PM	PH3 valve closed
8/1/2012	10:08:32 PM	SiCl4 pre valve closed
8/1/2012	10:08:32 PM	SiCl4 post valve closed
8/1/2012	10:08:32 PM	Bypass valve closed
8/1/2012	10:08:32 PM	Bubbler valve closed
8/1/2012	10:08:32 PM	Main Vac valve opened
8/1/2012	10:08:32 PM	Helium MFC set to  0.000000
8/1/2012	10:08:32 PM	H2 MFC set to  0.000000
8/1/2012	10:08:32 PM	BCl3 MFC set to  0.000000
8/1/2012	10:08:32 PM	PH3 MFC set to  0.000000
8/1/2012	10:08:32 PM	SiCl4 MFC set to  0.000000
8/1/2012	10:08:32 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	10:08:33 PM	Tube furnace set to 150
8/1/2012	10:09:03 PM	H2 valve closed
8/1/2012	10:09:03 PM	BCl3 valve closed
8/1/2012	10:09:03 PM	PH3 valve closed
8/1/2012	10:09:03 PM	SiCl4 pre valve closed
8/1/2012	10:09:03 PM	SiCl4 post valve closed
8/1/2012	10:09:03 PM	Bypass valve closed
8/1/2012	10:09:03 PM	Bubbler valve closed
8/1/2012	10:09:03 PM	Helium valve opened
8/1/2012	10:09:03 PM	Main Vac valve opened
8/1/2012	10:09:03 PM	Helium MFC set to  20.000000
8/1/2012	10:09:03 PM	H2 MFC set to  0.000000
8/1/2012	10:09:03 PM	BCl3 MFC set to  0.000000
8/1/2012	10:09:03 PM	PH3 MFC set to  0.000000
8/1/2012	10:09:03 PM	SiCl4 MFC set to  0.000000
8/1/2012	10:09:03 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	10:09:03 PM	Tube furnace set to 150
8/1/2012	10:09:33 PM	Helium valve closed
8/1/2012	10:09:33 PM	H2 valve closed
8/1/2012	10:09:33 PM	BCl3 valve closed
8/1/2012	10:09:33 PM	PH3 valve closed
8/1/2012	10:09:33 PM	SiCl4 pre valve closed
8/1/2012	10:09:33 PM	SiCl4 post valve closed
8/1/2012	10:09:33 PM	Bypass valve closed
8/1/2012	10:09:33 PM	Bubbler valve closed
8/1/2012	10:09:33 PM	Main Vac valve opened
8/1/2012	10:09:33 PM	Helium MFC set to  0.000000
8/1/2012	10:09:33 PM	H2 MFC set to  0.000000
8/1/2012	10:09:33 PM	BCl3 MFC set to  0.000000
8/1/2012	10:09:33 PM	PH3 MFC set to  0.000000
8/1/2012	10:09:33 PM	SiCl4 MFC set to  0.000000
8/1/2012	10:09:33 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	10:09:33 PM	Tube furnace set to 150
8/1/2012	10:10:03 PM	H2 valve closed
8/1/2012	10:10:03 PM	BCl3 valve closed
8/1/2012	10:10:03 PM	PH3 valve closed
8/1/2012	10:10:03 PM	SiCl4 pre valve closed
8/1/2012	10:10:03 PM	SiCl4 post valve closed
8/1/2012	10:10:03 PM	Bypass valve closed
8/1/2012	10:10:03 PM	Bubbler valve closed
8/1/2012	10:10:03 PM	Helium valve opened
8/1/2012	10:10:03 PM	Main Vac valve opened
8/1/2012	10:10:03 PM	Helium MFC set to  20.000000
8/1/2012	10:10:03 PM	H2 MFC set to  0.000000
8/1/2012	10:10:03 PM	BCl3 MFC set to  0.000000
8/1/2012	10:10:03 PM	PH3 MFC set to  0.000000
8/1/2012	10:10:03 PM	SiCl4 MFC set to  0.000000
8/1/2012	10:10:03 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	10:10:03 PM	Tube furnace set to 150
8/1/2012	10:12:03 PM	Helium valve closed
8/1/2012	10:12:03 PM	H2 valve closed
8/1/2012	10:12:03 PM	BCl3 valve closed
8/1/2012	10:12:03 PM	PH3 valve closed
8/1/2012	10:12:03 PM	SiCl4 pre valve closed
8/1/2012	10:12:03 PM	SiCl4 post valve closed
8/1/2012	10:12:03 PM	Bypass valve closed
8/1/2012	10:12:03 PM	Bubbler valve closed
8/1/2012	10:12:03 PM	Main Vac valve opened
8/1/2012	10:12:03 PM	Helium MFC set to  0.000000
8/1/2012	10:12:03 PM	H2 MFC set to  0.000000
8/1/2012	10:12:03 PM	BCl3 MFC set to  0.000000
8/1/2012	10:12:03 PM	PH3 MFC set to  0.000000
8/1/2012	10:12:03 PM	SiCl4 MFC set to  0.000000
8/1/2012	10:12:03 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	10:12:04 PM	Tube furnace set to 150
8/1/2012	10:12:34 PM	H2 valve closed
8/1/2012	10:12:34 PM	BCl3 valve closed
8/1/2012	10:12:34 PM	PH3 valve closed
8/1/2012	10:12:34 PM	SiCl4 pre valve closed
8/1/2012	10:12:34 PM	SiCl4 post valve closed
8/1/2012	10:12:34 PM	Bypass valve closed
8/1/2012	10:12:34 PM	Bubbler valve closed
8/1/2012	10:12:34 PM	Helium valve opened
8/1/2012	10:12:34 PM	Main Vac valve opened
8/1/2012	10:12:34 PM	Helium MFC set to  20.000000
8/1/2012	10:12:34 PM	H2 MFC set to  0.000000
8/1/2012	10:12:34 PM	BCl3 MFC set to  0.000000
8/1/2012	10:12:34 PM	PH3 MFC set to  0.000000
8/1/2012	10:12:34 PM	SiCl4 MFC set to  0.000000
8/1/2012	10:12:34 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	10:12:34 PM	Tube furnace set to 150
8/1/2012	10:13:04 PM	Helium valve closed
8/1/2012	10:13:04 PM	H2 valve closed
8/1/2012	10:13:04 PM	BCl3 valve closed
8/1/2012	10:13:04 PM	PH3 valve closed
8/1/2012	10:13:04 PM	SiCl4 pre valve closed
8/1/2012	10:13:04 PM	SiCl4 post valve closed
8/1/2012	10:13:04 PM	Bypass valve closed
8/1/2012	10:13:04 PM	Bubbler valve closed
8/1/2012	10:13:04 PM	Main Vac valve opened
8/1/2012	10:13:04 PM	Helium MFC set to  0.000000
8/1/2012	10:13:04 PM	H2 MFC set to  0.000000
8/1/2012	10:13:04 PM	BCl3 MFC set to  0.000000
8/1/2012	10:13:04 PM	PH3 MFC set to  0.000000
8/1/2012	10:13:04 PM	SiCl4 MFC set to  0.000000
8/1/2012	10:13:04 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	10:13:04 PM	Tube furnace set to 150
8/1/2012	10:13:34 PM	H2 valve closed
8/1/2012	10:13:34 PM	BCl3 valve closed
8/1/2012	10:13:34 PM	PH3 valve closed
8/1/2012	10:13:34 PM	SiCl4 pre valve closed
8/1/2012	10:13:34 PM	SiCl4 post valve closed
8/1/2012	10:13:34 PM	Bypass valve closed
8/1/2012	10:13:34 PM	Bubbler valve closed
8/1/2012	10:13:34 PM	Helium valve opened
8/1/2012	10:13:34 PM	Main Vac valve opened
8/1/2012	10:13:34 PM	Helium MFC set to  20.000000
8/1/2012	10:13:34 PM	H2 MFC set to  0.000000
8/1/2012	10:13:34 PM	BCl3 MFC set to  0.000000
8/1/2012	10:13:34 PM	PH3 MFC set to  0.000000
8/1/2012	10:13:34 PM	SiCl4 MFC set to  0.000000
8/1/2012	10:13:34 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	10:13:34 PM	Tube furnace set to 150
8/1/2012	10:15:34 PM	Helium valve closed
8/1/2012	10:15:34 PM	H2 valve closed
8/1/2012	10:15:34 PM	BCl3 valve closed
8/1/2012	10:15:34 PM	PH3 valve closed
8/1/2012	10:15:34 PM	SiCl4 pre valve closed
8/1/2012	10:15:34 PM	SiCl4 post valve closed
8/1/2012	10:15:34 PM	Bypass valve closed
8/1/2012	10:15:34 PM	Bubbler valve closed
8/1/2012	10:15:34 PM	Main Vac valve opened
8/1/2012	10:15:34 PM	Helium MFC set to  0.000000
8/1/2012	10:15:34 PM	H2 MFC set to  0.000000
8/1/2012	10:15:34 PM	BCl3 MFC set to  0.000000
8/1/2012	10:15:34 PM	PH3 MFC set to  0.000000
8/1/2012	10:15:34 PM	SiCl4 MFC set to  0.000000
8/1/2012	10:15:34 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	10:15:34 PM	Tube furnace set to 150
8/1/2012	10:16:05 PM	H2 valve closed
8/1/2012	10:16:05 PM	BCl3 valve closed
8/1/2012	10:16:05 PM	PH3 valve closed
8/1/2012	10:16:05 PM	SiCl4 pre valve closed
8/1/2012	10:16:05 PM	SiCl4 post valve closed
8/1/2012	10:16:05 PM	Bypass valve closed
8/1/2012	10:16:05 PM	Bubbler valve closed
8/1/2012	10:16:05 PM	Helium valve opened
8/1/2012	10:16:05 PM	Main Vac valve opened
8/1/2012	10:16:05 PM	Helium MFC set to  20.000000
8/1/2012	10:16:05 PM	H2 MFC set to  0.000000
8/1/2012	10:16:05 PM	BCl3 MFC set to  0.000000
8/1/2012	10:16:05 PM	PH3 MFC set to  0.000000
8/1/2012	10:16:05 PM	SiCl4 MFC set to  0.000000
8/1/2012	10:16:05 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	10:16:05 PM	Tube furnace set to 150
8/1/2012	10:16:35 PM	Helium valve closed
8/1/2012	10:16:35 PM	H2 valve closed
8/1/2012	10:16:35 PM	BCl3 valve closed
8/1/2012	10:16:35 PM	PH3 valve closed
8/1/2012	10:16:35 PM	SiCl4 pre valve closed
8/1/2012	10:16:35 PM	SiCl4 post valve closed
8/1/2012	10:16:35 PM	Bypass valve closed
8/1/2012	10:16:35 PM	Bubbler valve closed
8/1/2012	10:16:35 PM	Main Vac valve opened
8/1/2012	10:16:35 PM	Helium MFC set to  0.000000
8/1/2012	10:16:35 PM	H2 MFC set to  0.000000
8/1/2012	10:16:35 PM	BCl3 MFC set to  0.000000
8/1/2012	10:16:35 PM	PH3 MFC set to  0.000000
8/1/2012	10:16:35 PM	SiCl4 MFC set to  0.000000
8/1/2012	10:16:35 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	10:16:35 PM	Tube furnace set to 150
8/1/2012	10:17:05 PM	H2 valve closed
8/1/2012	10:17:05 PM	BCl3 valve closed
8/1/2012	10:17:05 PM	PH3 valve closed
8/1/2012	10:17:05 PM	SiCl4 pre valve closed
8/1/2012	10:17:05 PM	SiCl4 post valve closed
8/1/2012	10:17:05 PM	Bypass valve closed
8/1/2012	10:17:05 PM	Bubbler valve closed
8/1/2012	10:17:05 PM	Helium valve opened
8/1/2012	10:17:05 PM	Main Vac valve opened
8/1/2012	10:17:05 PM	Helium MFC set to  20.000000
8/1/2012	10:17:05 PM	H2 MFC set to  0.000000
8/1/2012	10:17:05 PM	BCl3 MFC set to  0.000000
8/1/2012	10:17:05 PM	PH3 MFC set to  0.000000
8/1/2012	10:17:05 PM	SiCl4 MFC set to  0.000000
8/1/2012	10:17:05 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	10:17:05 PM	Tube furnace set to 150
8/1/2012	10:19:05 PM	Helium valve closed
8/1/2012	10:19:05 PM	H2 valve closed
8/1/2012	10:19:05 PM	BCl3 valve closed
8/1/2012	10:19:05 PM	PH3 valve closed
8/1/2012	10:19:05 PM	SiCl4 pre valve closed
8/1/2012	10:19:05 PM	SiCl4 post valve closed
8/1/2012	10:19:05 PM	Bypass valve closed
8/1/2012	10:19:05 PM	Bubbler valve closed
8/1/2012	10:19:05 PM	Main Vac valve opened
8/1/2012	10:19:05 PM	Helium MFC set to  0.000000
8/1/2012	10:19:05 PM	H2 MFC set to  0.000000
8/1/2012	10:19:05 PM	BCl3 MFC set to  0.000000
8/1/2012	10:19:05 PM	PH3 MFC set to  0.000000
8/1/2012	10:19:05 PM	SiCl4 MFC set to  0.000000
8/1/2012	10:19:05 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	10:19:05 PM	Tube furnace set to 150
8/1/2012	10:19:06 PM	Run finished at 10:19 PM
8/1/2012	10:24:11 PM	Recipe started at 10:24 PM
8/1/2012	10:24:11 PM	Helium valve closed
8/1/2012	10:24:11 PM	H2 valve closed
8/1/2012	10:24:11 PM	BCl3 valve closed
8/1/2012	10:24:11 PM	PH3 valve closed
8/1/2012	10:24:11 PM	SiCl4 pre valve closed
8/1/2012	10:24:11 PM	SiCl4 post valve closed
8/1/2012	10:24:11 PM	Bypass valve closed
8/1/2012	10:24:11 PM	Bubbler valve closed
8/1/2012	10:24:11 PM	Main Vac valve opened
8/1/2012	10:24:11 PM	Helium MFC set to  0.000000
8/1/2012	10:24:11 PM	H2 MFC set to  0.000000
8/1/2012	10:24:11 PM	BCl3 MFC set to  0.000000
8/1/2012	10:24:11 PM	PH3 MFC set to  0.000000
8/1/2012	10:24:11 PM	SiCl4 MFC set to  0.000000
8/1/2012	10:24:11 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	10:24:11 PM	Tube furnace set to 150
8/1/2012	10:24:41 PM	H2 valve closed
8/1/2012	10:24:41 PM	BCl3 valve closed
8/1/2012	10:24:41 PM	PH3 valve closed
8/1/2012	10:24:41 PM	SiCl4 pre valve closed
8/1/2012	10:24:41 PM	SiCl4 post valve closed
8/1/2012	10:24:41 PM	Bypass valve closed
8/1/2012	10:24:41 PM	Bubbler valve closed
8/1/2012	10:24:41 PM	Helium valve opened
8/1/2012	10:24:41 PM	Main Vac valve opened
8/1/2012	10:24:41 PM	Helium MFC set to  20.000000
8/1/2012	10:24:41 PM	H2 MFC set to  0.000000
8/1/2012	10:24:41 PM	BCl3 MFC set to  0.000000
8/1/2012	10:24:41 PM	PH3 MFC set to  0.000000
8/1/2012	10:24:41 PM	SiCl4 MFC set to  0.000000
8/1/2012	10:24:41 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	10:24:41 PM	Tube furnace set to 150
8/1/2012	10:25:12 PM	Helium valve closed
8/1/2012	10:25:12 PM	H2 valve closed
8/1/2012	10:25:12 PM	BCl3 valve closed
8/1/2012	10:25:12 PM	PH3 valve closed
8/1/2012	10:25:12 PM	SiCl4 pre valve closed
8/1/2012	10:25:12 PM	SiCl4 post valve closed
8/1/2012	10:25:12 PM	Bypass valve closed
8/1/2012	10:25:12 PM	Bubbler valve closed
8/1/2012	10:25:12 PM	Main Vac valve opened
8/1/2012	10:25:12 PM	Helium MFC set to  0.000000
8/1/2012	10:25:12 PM	H2 MFC set to  0.000000
8/1/2012	10:25:12 PM	BCl3 MFC set to  0.000000
8/1/2012	10:25:12 PM	PH3 MFC set to  0.000000
8/1/2012	10:25:12 PM	SiCl4 MFC set to  0.000000
8/1/2012	10:25:12 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	10:25:12 PM	Tube furnace set to 150
8/1/2012	10:25:42 PM	H2 valve closed
8/1/2012	10:25:42 PM	BCl3 valve closed
8/1/2012	10:25:42 PM	PH3 valve closed
8/1/2012	10:25:42 PM	SiCl4 pre valve closed
8/1/2012	10:25:42 PM	SiCl4 post valve closed
8/1/2012	10:25:42 PM	Bypass valve closed
8/1/2012	10:25:42 PM	Bubbler valve closed
8/1/2012	10:25:42 PM	Helium valve opened
8/1/2012	10:25:42 PM	Main Vac valve opened
8/1/2012	10:25:42 PM	Helium MFC set to  20.000000
8/1/2012	10:25:42 PM	H2 MFC set to  0.000000
8/1/2012	10:25:42 PM	BCl3 MFC set to  0.000000
8/1/2012	10:25:42 PM	PH3 MFC set to  0.000000
8/1/2012	10:25:42 PM	SiCl4 MFC set to  0.000000
8/1/2012	10:25:42 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	10:25:42 PM	Tube furnace set to 150
8/1/2012	10:26:12 PM	Helium valve closed
8/1/2012	10:26:12 PM	H2 valve closed
8/1/2012	10:26:12 PM	BCl3 valve closed
8/1/2012	10:26:12 PM	PH3 valve closed
8/1/2012	10:26:12 PM	SiCl4 pre valve closed
8/1/2012	10:26:12 PM	SiCl4 post valve closed
8/1/2012	10:26:12 PM	Bypass valve closed
8/1/2012	10:26:12 PM	Bubbler valve closed
8/1/2012	10:26:12 PM	Main Vac valve opened
8/1/2012	10:26:12 PM	Helium MFC set to  0.000000
8/1/2012	10:26:12 PM	H2 MFC set to  0.000000
8/1/2012	10:26:12 PM	BCl3 MFC set to  0.000000
8/1/2012	10:26:12 PM	PH3 MFC set to  0.000000
8/1/2012	10:26:12 PM	SiCl4 MFC set to  0.000000
8/1/2012	10:26:12 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	10:26:12 PM	Tube furnace set to 150
8/1/2012	10:26:42 PM	H2 valve closed
8/1/2012	10:26:42 PM	BCl3 valve closed
8/1/2012	10:26:42 PM	PH3 valve closed
8/1/2012	10:26:42 PM	SiCl4 pre valve closed
8/1/2012	10:26:42 PM	SiCl4 post valve closed
8/1/2012	10:26:42 PM	Bypass valve closed
8/1/2012	10:26:42 PM	Bubbler valve closed
8/1/2012	10:26:42 PM	Helium valve opened
8/1/2012	10:26:42 PM	Main Vac valve opened
8/1/2012	10:26:42 PM	Helium MFC set to  20.000000
8/1/2012	10:26:42 PM	H2 MFC set to  0.000000
8/1/2012	10:26:42 PM	BCl3 MFC set to  0.000000
8/1/2012	10:26:42 PM	PH3 MFC set to  0.000000
8/1/2012	10:26:42 PM	SiCl4 MFC set to  0.000000
8/1/2012	10:26:42 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	10:26:42 PM	Tube furnace set to 150
8/1/2012	10:28:42 PM	Helium valve closed
8/1/2012	10:28:42 PM	H2 valve closed
8/1/2012	10:28:42 PM	BCl3 valve closed
8/1/2012	10:28:42 PM	PH3 valve closed
8/1/2012	10:28:42 PM	SiCl4 pre valve closed
8/1/2012	10:28:42 PM	SiCl4 post valve closed
8/1/2012	10:28:42 PM	Bypass valve closed
8/1/2012	10:28:42 PM	Bubbler valve closed
8/1/2012	10:28:42 PM	Main Vac valve opened
8/1/2012	10:28:42 PM	Helium MFC set to  0.000000
8/1/2012	10:28:42 PM	H2 MFC set to  0.000000
8/1/2012	10:28:42 PM	BCl3 MFC set to  0.000000
8/1/2012	10:28:43 PM	PH3 MFC set to  0.000000
8/1/2012	10:28:43 PM	SiCl4 MFC set to  0.000000
8/1/2012	10:28:43 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	10:28:43 PM	Tube furnace set to 150
8/1/2012	10:29:13 PM	H2 valve closed
8/1/2012	10:29:13 PM	BCl3 valve closed
8/1/2012	10:29:13 PM	PH3 valve closed
8/1/2012	10:29:13 PM	SiCl4 pre valve closed
8/1/2012	10:29:13 PM	SiCl4 post valve closed
8/1/2012	10:29:13 PM	Bypass valve closed
8/1/2012	10:29:13 PM	Bubbler valve closed
8/1/2012	10:29:13 PM	Helium valve opened
8/1/2012	10:29:13 PM	Main Vac valve opened
8/1/2012	10:29:13 PM	Helium MFC set to  20.000000
8/1/2012	10:29:13 PM	H2 MFC set to  0.000000
8/1/2012	10:29:13 PM	BCl3 MFC set to  0.000000
8/1/2012	10:29:13 PM	PH3 MFC set to  0.000000
8/1/2012	10:29:13 PM	SiCl4 MFC set to  0.000000
8/1/2012	10:29:13 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	10:29:13 PM	Tube furnace set to 150
8/1/2012	10:29:43 PM	Helium valve closed
8/1/2012	10:29:43 PM	H2 valve closed
8/1/2012	10:29:43 PM	BCl3 valve closed
8/1/2012	10:29:43 PM	PH3 valve closed
8/1/2012	10:29:43 PM	SiCl4 pre valve closed
8/1/2012	10:29:43 PM	SiCl4 post valve closed
8/1/2012	10:29:43 PM	Bypass valve closed
8/1/2012	10:29:43 PM	Bubbler valve closed
8/1/2012	10:29:43 PM	Main Vac valve opened
8/1/2012	10:29:43 PM	Helium MFC set to  0.000000
8/1/2012	10:29:43 PM	H2 MFC set to  0.000000
8/1/2012	10:29:43 PM	BCl3 MFC set to  0.000000
8/1/2012	10:29:43 PM	PH3 MFC set to  0.000000
8/1/2012	10:29:43 PM	SiCl4 MFC set to  0.000000
8/1/2012	10:29:43 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	10:29:43 PM	Tube furnace set to 150
8/1/2012	10:30:13 PM	H2 valve closed
8/1/2012	10:30:13 PM	BCl3 valve closed
8/1/2012	10:30:13 PM	PH3 valve closed
8/1/2012	10:30:13 PM	SiCl4 pre valve closed
8/1/2012	10:30:13 PM	SiCl4 post valve closed
8/1/2012	10:30:13 PM	Bypass valve closed
8/1/2012	10:30:13 PM	Bubbler valve closed
8/1/2012	10:30:13 PM	Helium valve opened
8/1/2012	10:30:13 PM	Main Vac valve opened
8/1/2012	10:30:13 PM	Helium MFC set to  20.000000
8/1/2012	10:30:13 PM	H2 MFC set to  0.000000
8/1/2012	10:30:13 PM	BCl3 MFC set to  0.000000
8/1/2012	10:30:13 PM	PH3 MFC set to  0.000000
8/1/2012	10:30:13 PM	SiCl4 MFC set to  0.000000
8/1/2012	10:30:13 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	10:30:13 PM	Tube furnace set to 150
8/1/2012	10:30:43 PM	Helium valve closed
8/1/2012	10:30:43 PM	H2 valve closed
8/1/2012	10:30:43 PM	BCl3 valve closed
8/1/2012	10:30:43 PM	PH3 valve closed
8/1/2012	10:30:43 PM	SiCl4 pre valve closed
8/1/2012	10:30:43 PM	SiCl4 post valve closed
8/1/2012	10:30:43 PM	Bypass valve closed
8/1/2012	10:30:43 PM	Bubbler valve closed
8/1/2012	10:30:43 PM	Main Vac valve opened
8/1/2012	10:30:43 PM	Helium MFC set to  0.000000
8/1/2012	10:30:43 PM	H2 MFC set to  0.000000
8/1/2012	10:30:43 PM	BCl3 MFC set to  0.000000
8/1/2012	10:30:43 PM	PH3 MFC set to  0.000000
8/1/2012	10:30:43 PM	SiCl4 MFC set to  0.000000
8/1/2012	10:30:43 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	10:30:44 PM	Tube furnace set to 150
8/1/2012	10:31:14 PM	H2 valve closed
8/1/2012	10:31:14 PM	BCl3 valve closed
8/1/2012	10:31:14 PM	PH3 valve closed
8/1/2012	10:31:14 PM	SiCl4 pre valve closed
8/1/2012	10:31:14 PM	SiCl4 post valve closed
8/1/2012	10:31:14 PM	Bypass valve closed
8/1/2012	10:31:14 PM	Bubbler valve closed
8/1/2012	10:31:14 PM	Helium valve opened
8/1/2012	10:31:14 PM	Main Vac valve opened
8/1/2012	10:31:14 PM	Helium MFC set to  20.000000
8/1/2012	10:31:14 PM	H2 MFC set to  0.000000
8/1/2012	10:31:14 PM	BCl3 MFC set to  0.000000
8/1/2012	10:31:14 PM	PH3 MFC set to  0.000000
8/1/2012	10:31:14 PM	SiCl4 MFC set to  0.000000
8/1/2012	10:31:14 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	10:31:14 PM	Tube furnace set to 150
8/1/2012	10:33:14 PM	Helium valve closed
8/1/2012	10:33:14 PM	H2 valve closed
8/1/2012	10:33:14 PM	BCl3 valve closed
8/1/2012	10:33:14 PM	PH3 valve closed
8/1/2012	10:33:14 PM	SiCl4 pre valve closed
8/1/2012	10:33:14 PM	SiCl4 post valve closed
8/1/2012	10:33:14 PM	Bypass valve closed
8/1/2012	10:33:14 PM	Bubbler valve closed
8/1/2012	10:33:14 PM	Main Vac valve opened
8/1/2012	10:33:14 PM	Helium MFC set to  0.000000
8/1/2012	10:33:14 PM	H2 MFC set to  0.000000
8/1/2012	10:33:14 PM	BCl3 MFC set to  0.000000
8/1/2012	10:33:14 PM	PH3 MFC set to  0.000000
8/1/2012	10:33:14 PM	SiCl4 MFC set to  0.000000
8/1/2012	10:33:14 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	10:33:14 PM	Tube furnace set to 150
8/1/2012	10:33:44 PM	H2 valve closed
8/1/2012	10:33:44 PM	BCl3 valve closed
8/1/2012	10:33:44 PM	PH3 valve closed
8/1/2012	10:33:44 PM	SiCl4 pre valve closed
8/1/2012	10:33:44 PM	SiCl4 post valve closed
8/1/2012	10:33:44 PM	Bypass valve closed
8/1/2012	10:33:44 PM	Bubbler valve closed
8/1/2012	10:33:44 PM	Helium valve opened
8/1/2012	10:33:44 PM	Main Vac valve opened
8/1/2012	10:33:44 PM	Helium MFC set to  20.000000
8/1/2012	10:33:44 PM	H2 MFC set to  0.000000
8/1/2012	10:33:44 PM	BCl3 MFC set to  0.000000
8/1/2012	10:33:44 PM	PH3 MFC set to  0.000000
8/1/2012	10:33:44 PM	SiCl4 MFC set to  0.000000
8/1/2012	10:33:44 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	10:33:44 PM	Tube furnace set to 150
8/1/2012	10:34:14 PM	Helium valve closed
8/1/2012	10:34:14 PM	H2 valve closed
8/1/2012	10:34:14 PM	BCl3 valve closed
8/1/2012	10:34:14 PM	PH3 valve closed
8/1/2012	10:34:14 PM	SiCl4 pre valve closed
8/1/2012	10:34:14 PM	SiCl4 post valve closed
8/1/2012	10:34:14 PM	Bypass valve closed
8/1/2012	10:34:14 PM	Bubbler valve closed
8/1/2012	10:34:14 PM	Main Vac valve opened
8/1/2012	10:34:14 PM	Helium MFC set to  0.000000
8/1/2012	10:34:14 PM	H2 MFC set to  0.000000
8/1/2012	10:34:14 PM	BCl3 MFC set to  0.000000
8/1/2012	10:34:14 PM	PH3 MFC set to  0.000000
8/1/2012	10:34:14 PM	SiCl4 MFC set to  0.000000
8/1/2012	10:34:14 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	10:34:15 PM	Tube furnace set to 150
8/1/2012	10:34:45 PM	H2 valve closed
8/1/2012	10:34:45 PM	BCl3 valve closed
8/1/2012	10:34:45 PM	PH3 valve closed
8/1/2012	10:34:45 PM	SiCl4 pre valve closed
8/1/2012	10:34:45 PM	SiCl4 post valve closed
8/1/2012	10:34:45 PM	Bypass valve closed
8/1/2012	10:34:45 PM	Bubbler valve closed
8/1/2012	10:34:45 PM	Helium valve opened
8/1/2012	10:34:45 PM	Main Vac valve opened
8/1/2012	10:34:45 PM	Helium MFC set to  20.000000
8/1/2012	10:34:45 PM	H2 MFC set to  0.000000
8/1/2012	10:34:45 PM	BCl3 MFC set to  0.000000
8/1/2012	10:34:45 PM	PH3 MFC set to  0.000000
8/1/2012	10:34:45 PM	SiCl4 MFC set to  0.000000
8/1/2012	10:34:45 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	10:34:45 PM	Tube furnace set to 150
8/1/2012	10:36:45 PM	Helium valve closed
8/1/2012	10:36:45 PM	H2 valve closed
8/1/2012	10:36:45 PM	BCl3 valve closed
8/1/2012	10:36:45 PM	PH3 valve closed
8/1/2012	10:36:45 PM	SiCl4 pre valve closed
8/1/2012	10:36:45 PM	SiCl4 post valve closed
8/1/2012	10:36:45 PM	Bypass valve closed
8/1/2012	10:36:45 PM	Bubbler valve closed
8/1/2012	10:36:45 PM	Main Vac valve opened
8/1/2012	10:36:45 PM	Helium MFC set to  0.000000
8/1/2012	10:36:45 PM	H2 MFC set to  0.000000
8/1/2012	10:36:45 PM	BCl3 MFC set to  0.000000
8/1/2012	10:36:45 PM	PH3 MFC set to  0.000000
8/1/2012	10:36:45 PM	SiCl4 MFC set to  0.000000
8/1/2012	10:36:45 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	10:36:45 PM	Tube furnace set to 150
8/1/2012	10:37:15 PM	H2 valve closed
8/1/2012	10:37:15 PM	BCl3 valve closed
8/1/2012	10:37:15 PM	PH3 valve closed
8/1/2012	10:37:15 PM	SiCl4 pre valve closed
8/1/2012	10:37:15 PM	SiCl4 post valve closed
8/1/2012	10:37:15 PM	Bypass valve closed
8/1/2012	10:37:15 PM	Bubbler valve closed
8/1/2012	10:37:15 PM	Helium valve opened
8/1/2012	10:37:15 PM	Main Vac valve opened
8/1/2012	10:37:15 PM	Helium MFC set to  20.000000
8/1/2012	10:37:15 PM	H2 MFC set to  0.000000
8/1/2012	10:37:15 PM	BCl3 MFC set to  0.000000
8/1/2012	10:37:15 PM	PH3 MFC set to  0.000000
8/1/2012	10:37:15 PM	SiCl4 MFC set to  0.000000
8/1/2012	10:37:15 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	10:37:15 PM	Tube furnace set to 150
8/1/2012	10:37:45 PM	Helium valve closed
8/1/2012	10:37:45 PM	H2 valve closed
8/1/2012	10:37:45 PM	BCl3 valve closed
8/1/2012	10:37:45 PM	PH3 valve closed
8/1/2012	10:37:45 PM	SiCl4 pre valve closed
8/1/2012	10:37:45 PM	SiCl4 post valve closed
8/1/2012	10:37:45 PM	Bypass valve closed
8/1/2012	10:37:45 PM	Bubbler valve closed
8/1/2012	10:37:45 PM	Main Vac valve opened
8/1/2012	10:37:45 PM	Helium MFC set to  0.000000
8/1/2012	10:37:45 PM	H2 MFC set to  0.000000
8/1/2012	10:37:45 PM	BCl3 MFC set to  0.000000
8/1/2012	10:37:45 PM	PH3 MFC set to  0.000000
8/1/2012	10:37:45 PM	SiCl4 MFC set to  0.000000
8/1/2012	10:37:45 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	10:37:45 PM	Tube furnace set to 150
8/1/2012	10:38:15 PM	H2 valve closed
8/1/2012	10:38:15 PM	BCl3 valve closed
8/1/2012	10:38:16 PM	PH3 valve closed
8/1/2012	10:38:16 PM	SiCl4 pre valve closed
8/1/2012	10:38:16 PM	SiCl4 post valve closed
8/1/2012	10:38:16 PM	Bypass valve closed
8/1/2012	10:38:16 PM	Bubbler valve closed
8/1/2012	10:38:16 PM	Helium valve opened
8/1/2012	10:38:16 PM	Main Vac valve opened
8/1/2012	10:38:16 PM	Helium MFC set to  20.000000
8/1/2012	10:38:16 PM	H2 MFC set to  0.000000
8/1/2012	10:38:16 PM	BCl3 MFC set to  0.000000
8/1/2012	10:38:16 PM	PH3 MFC set to  0.000000
8/1/2012	10:38:16 PM	SiCl4 MFC set to  0.000000
8/1/2012	10:38:16 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	10:38:16 PM	Tube furnace set to 150
8/1/2012	10:40:16 PM	Helium valve closed
8/1/2012	10:40:16 PM	H2 valve closed
8/1/2012	10:40:16 PM	BCl3 valve closed
8/1/2012	10:40:16 PM	PH3 valve closed
8/1/2012	10:40:16 PM	SiCl4 pre valve closed
8/1/2012	10:40:16 PM	SiCl4 post valve closed
8/1/2012	10:40:16 PM	Bypass valve closed
8/1/2012	10:40:16 PM	Bubbler valve closed
8/1/2012	10:40:16 PM	Main Vac valve opened
8/1/2012	10:40:16 PM	Helium MFC set to  0.000000
8/1/2012	10:40:16 PM	H2 MFC set to  0.000000
8/1/2012	10:40:16 PM	BCl3 MFC set to  0.000000
8/1/2012	10:40:16 PM	PH3 MFC set to  0.000000
8/1/2012	10:40:16 PM	SiCl4 MFC set to  0.000000
8/1/2012	10:40:16 PM	Bypass solenoid MFC set to  0.000000
8/1/2012	10:40:16 PM	Tube furnace set to 150
8/1/2012	10:40:17 PM	Run finished at 10:40 PM
